DOI: 10.4028/www.scientific.net/kem.389-390.144. Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools

Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools

10.4028/www.scientific.net/kem.389-390.144

Crossref journal-article

Trans Tech Publications, Ltd.

Key Engineering Materials (2457)

Abstract

The service life of a diamond tool in cutting single-crystal silicon is normally very short because of severe tool wear. Therefore, it is important to use a proper coolant in order to restrain tool wear. In this paper, the performances of oil-based and water-based coolants were compared in silicon machining by investigating cutting forces and tool wear geometries. The water-based coolant was found to restrain flank wear more effectively than the oil-based one. The effective tool life using the water-based one was averagely three times longer than that using the oil-based one. The tool wear mechanism might be related to microplasma generated between silicon and diamond during cutting.

Bibliography

Ohta, T., Yan, J. W., Kodera, S., Yajima, S., Horikawa, N., Takahashi, Y., & Kuriyagawa, T. (2008). Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools. Key Engineering Materials, 389â390, 144â150.

Authors 7

Tsutomu Ohta (first)
Ji Wang Yan (additional)
Sunao Kodera (additional)
Shuuma Yajima (additional)
Naoyuki Horikawa (additional)
Youichi Takahashi (additional)
Tsunemoto Kuriyagawa (additional)

References 14 Referenced 10

P. N. Blake and R. O. Scattergood: J. Amer. Ceram. Soc., 73, 4 (1990) 949-957. (10.1111/j.1151-2916.1990.tb05142.x)
T. Nakasuji, S. Kodera, S. Hara, H. Matsunaga, N. Ikawa and S. Shimada: Ann. CIRP, 39, 1 (1990) 89-92. (10.1016/s0007-8506(07)61009-9)
J. Yan, K. Syoji, T. Kuriyagawa and H. Suzuki: J. Mater. Proc. Tech., 121, 2-3 (2002), 363-372.
T. Ohta, J. Yan, S. Yajima, Y. Takahashi, N. Horikawa and T. Kuriyagawa: Int. J. Surf. Sci. Eng., 1, 4, (2007) 374-392. (10.1504/IJSURFSE.2007.016691)
J. Yan, K. Syoji, J. Tamaki: Wear, 255, (2003) 1380-1387. (10.1016/S0043-1648(03)00076-0)
D. -Cardenas, P. Shore, X. Luo, T. Jacklin, S.A. Impey: Wear, 262, (2007) 340-349. (10.1016/j.wear.2006.05.022)
X. P. Li, T. He, M. Rahman: Wear, 259, (2005) 1207-1214. (10.1016/j.wear.2004.12.020)
M. S. Uddin, K. H. W. Seah, M. Rahman, X. P. Li, K. Liu: J. Mater. Process185, (2007) 24-30. (10.1016/j.jmatprotec.2006.03.138)
S. Asai, Y Taguti, K. Yokobori, T Kawanishi, A. Kobayashi: J. Jpn. Soc. Prec. Eng., 46, 7, (1990) 145-150.
J. Yan, K. Syoji, and T. Kuriyagawa: J. Jpn. Soc. Prec. Eng., 66, 7, (2000) 1130-1134. (10.2493/jjspe.66.1130)
K. Nakayama: J. Vac. Soc. Jpn., 49, 10, (2006) 618-623. (10.3131/jvsj.49.618)
K. Nakayama: Tribology Lett., 17, 1, (2004) 75-81. (10.1023/B:TRIL.0000017421.37209.15)
Handbook of Chemistry and Physics, edited by D. R. Lide. CRC Press, (2003-2004) 1-11.
K. Nakayama, Jpn. J. Apple. Phys., 46, 9, (2007) 6007-6014. (10.1143/JJAP.46.6007)

Dates

Type	When
Created	16 years, 5 months ago (March 11, 2009, 7:43 p.m.)
Deposited	4 years, 7 months ago (Jan. 12, 2021, 6:01 p.m.)
Indexed	2 years, 6 months ago (Feb. 7, 2023, 3:19 p.m.)
Issued	17 years ago (Sept. 1, 2008)
Published	17 years ago (Sept. 1, 2008)
Published Online	17 years ago (Sept. 1, 2008)

Funders 0

None

BibTeX

@article{Ohta_2008, title={Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools}, volume={389–390}, ISSN={1662-9795}, url={http://dx.doi.org/10.4028/www.scientific.net/kem.389-390.144}, DOI={10.4028/www.scientific.net/kem.389-390.144}, journal={Key Engineering Materials}, publisher={Trans Tech Publications, Ltd.}, author={Ohta, Tsutomu and Yan, Ji Wang and Kodera, Sunao and Yajima, Shuuma and Horikawa, Naoyuki and Takahashi, Youichi and Kuriyagawa, Tsunemoto}, year={2008}, month=sep, pages={144–150} }

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