10.31399/asm.cp.istfa2012p0388
Crossref proceedings-article
ASM International
International Symposium for Testing and Failure Analysis (14553)
Abstract

Abstract A new method and grid design is described for implementation of ex-situ lift-out of FIB prepared specimens. This technique negates all prior disadvantages to ex-situ liftout and provides a method for higher throughput and rethinning of ex-situ specimens. In particular, this method allows for easy, fast, and routine manipulation for subsequent backside FIB milling and analysis.

Bibliography

Giannuzzi, L. A. (2012). Routine Backside FIB Milling With EXpressLO™. ISTFA 2012: Conference Proceedings from the 38th International Symposium for Testing and Failure Analysis, 39791, 388–390.

Authors 1
  1. Lucille A. Giannuzzi (additional)
References 0 Referenced 2

None

Dates
Type When
Created 4 years, 7 months ago (Dec. 22, 2020, 4:42 a.m.)
Deposited 4 years, 7 months ago (Jan. 2, 2021, 3:01 a.m.)
Indexed 11 months, 2 weeks ago (Sept. 6, 2024, 8:20 p.m.)
Issued 12 years, 9 months ago (Nov. 1, 2012)
Published 12 years, 9 months ago (Nov. 1, 2012)
Published Print 12 years, 9 months ago (Nov. 1, 2012)
Funders 0

None

@inproceedings{Giannuzzi_2012, series={ISTFA2012}, title={Routine Backside FIB Milling With EXpressLO™}, volume={39791}, ISSN={0890-1740}, url={http://dx.doi.org/10.31399/asm.cp.istfa2012p0388}, DOI={10.31399/asm.cp.istfa2012p0388}, booktitle={ISTFA 2012: Conference Proceedings from the 38th International Symposium for Testing and Failure Analysis}, publisher={ASM International}, author={Giannuzzi, Lucille A.}, year={2012}, month=nov, pages={388–390}, collection={ISTFA2012} }