Abstract
Abstract A new method and grid design is described for implementation of ex-situ lift-out of FIB prepared specimens. This technique negates all prior disadvantages to ex-situ liftout and provides a method for higher throughput and rethinning of ex-situ specimens. In particular, this method allows for easy, fast, and routine manipulation for subsequent backside FIB milling and analysis.
Dates
Type | When |
---|---|
Created | 4 years, 7 months ago (Dec. 22, 2020, 4:42 a.m.) |
Deposited | 4 years, 7 months ago (Jan. 2, 2021, 3:01 a.m.) |
Indexed | 11 months, 2 weeks ago (Sept. 6, 2024, 8:20 p.m.) |
Issued | 12 years, 9 months ago (Nov. 1, 2012) |
Published | 12 years, 9 months ago (Nov. 1, 2012) |
Published Print | 12 years, 9 months ago (Nov. 1, 2012) |
@inproceedings{Giannuzzi_2012, series={ISTFA2012}, title={Routine Backside FIB Milling With EXpressLO™}, volume={39791}, ISSN={0890-1740}, url={http://dx.doi.org/10.31399/asm.cp.istfa2012p0388}, DOI={10.31399/asm.cp.istfa2012p0388}, booktitle={ISTFA 2012: Conference Proceedings from the 38th International Symposium for Testing and Failure Analysis}, publisher={ASM International}, author={Giannuzzi, Lucille A.}, year={2012}, month=nov, pages={388–390}, collection={ISTFA2012} }