DOI: 10.1557/mrs2007.62. Focused Ion Beam Microscopy and Micromachining

Focused Ion Beam Microscopy and Micromachining

10.1557/mrs2007.62

Crossref journal-article

Springer Science and Business Media LLC

MRS Bulletin (297)

Abstract

AbstractThe fairly recent availability of commercial focused ion beam (FIB) microscopes has led to rapid development of their applications for materials science. FIB instruments have both imaging and micromachining capabilities at the nanometer–micrometer scale; thus, a broad range of fundamental studies and technological applications have been enhanced or made possible with FIB technology. This introductory article covers the basic FIB instrument and the fundamentals of ion–solid interactions that lead to the many unique FIB capabilities as well as some of the unwanted artifacts associated with FIB instruments. The four topical articles following this introduction give overviews of specific applications of the FIB in materials science, focusing on its particular strengths as a tool for characterization and transmission electron microscopy sample preparation, as well as its potential for ion beam fabrication and prototyping.

Bibliography

Volkert, C. A., & Minor, A. M. (2007). Focused Ion Beam Microscopy and Micromachining. MRS Bulletin, 32(5), 389â399.

Authors 2

C. A. Volkert (first)
A. M. Minor (additional)

References 37 Referenced 539

10.1017/CBO9780511565007
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10.1007/b101190
10.1046/j.1365-2818.1999.00476.x
18. Ziegler J.F. , Biersack J.P. , Littmark U. , The Stopping Range of Ions in Solids (Pergamon Press, New York, 1984). The SRIM code is available online at www.srim.org (accessed February 2007).
10.1116/1.583937
10.1016/j.apsusc.2004.06.101
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5. For example, FEI Co., Carl Zeiss Inc., Seiko Instruments Inc., Hitachi Inc., JEOL Ltd., Orsay Physics.
{'key': 'S0883769400007260_ref012', 'volume-title': 'Ion Implantation and Beam Processing', 'author': 'Williams', 'year': '1984'} / Ion Implantation and Beam Processing by Williams (1984)
32. Sigle W. , private communication (2002).
{'key': 'S0883769400007260_ref007', 'first-page': '291', 'volume-title': 'Focused Ion Beams from Liquid Metal Ion Sources', 'author': 'Prewitt', 'year': '1987'} / Focused Ion Beams from Liquid Metal Ion Sources by Prewitt (1987)
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10.1116/1.1417553
10.1116/1.589643
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10.1103/PhysRev.184.383
10.1093/jmicro/51.4.207
{'key': 'S0883769400007260_ref034', 'first-page': '6380', 'volume': '91', 'author': 'Park', 'year': '2002', 'journal-title': 'J. Appl. Phys'} / J. Appl. Phys by Park (2002)
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10.1116/1.588663
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Dates

Type	When
Created	14 years, 6 months ago (Feb. 2, 2011, 7:37 a.m.)
Deposited	4 years, 6 months ago (Feb. 24, 2021, 4:11 p.m.)
Indexed	4 weeks, 1 day ago (Aug. 3, 2025, 12:03 a.m.)
Issued	18 years, 4 months ago (May 1, 2007)
Published	18 years, 4 months ago (May 1, 2007)
Published Online	14 years, 7 months ago (Jan. 31, 2011)
Published Print	18 years, 4 months ago (May 1, 2007)

Funders 0

None

BibTeX

@article{Volkert_2007, title={Focused Ion Beam Microscopy and Micromachining}, volume={32}, ISSN={1938-1425}, url={http://dx.doi.org/10.1557/mrs2007.62}, DOI={10.1557/mrs2007.62}, number={5}, journal={MRS Bulletin}, publisher={Springer Science and Business Media LLC}, author={Volkert, C. A. and Minor, A. M.}, year={2007}, month=may, pages={389–399} }

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