DOI: 10.1557/mrs.2012.273. Thin-film piezoelectric MEMS

Thin-film piezoelectric MEMS

10.1557/mrs.2012.273

Crossref journal-article

Springer Science and Business Media LLC

MRS Bulletin (297)

Abstract

Bibliography

Eom, C.-B., & Trolier-McKinstry, S. (2012). Thin-film piezoelectric MEMS. MRS Bulletin, 37(11), 1007â1017.

Authors 2

Chang-Beom Eom (first)
Susan Trolier-McKinstry (additional)

References 87 Referenced 283

75. http://global.epson.com/innovation/printing_technology/micro_piezo_technology/future.
10.1088/0964-1726/17/4/043001
10.1109/JLT.2003.811792
10.1111/j.1551-2916.2010.04240.x
10.1049/el:19990559
10.1109/JMEMS.2006.880208
{'key': 'S0883769412002734_ref33', 'first-page': '22', 'volume': '51', 'author': 'Auciello', 'year': '1998', 'journal-title': 'Phys. Ferroelectr. Memories'} / Phys. Ferroelectr. Memories by Auciello (1998)
10.2514/1.25047
10.1007/BF00551962
10.1103/PhysRevLett.80.4321
10.1103/PhysRevLett.81.3014
10.1038/nnano.2010.265
10.1063/1.3479479
10.1016/j.apsusc.2005.06.004
10.1063/1.3479479
10.1063/1.1396633
10.1126/science.1103218
10.1109/JLT.2005.844213
10.1109/TUFFC.2007.469
{'key': 'S0883769412002734_ref66', 'first-page': '2139', 'author': 'Bhave', 'year': '2005', 'journal-title': 'Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems'} / Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems by Bhave (2005)
10.1063/1.369252
10.1063/1.124035
10.1557/PROC-360-109
10.1016/j.mser.2007.03.001
10.1016/j.sna.2010.04.011
10.1103/PhysRevLett.64.804
10.1111/j.1551-2916.2008.02421.x
10.1038/35002022
10.1016/S0140-3664(02)00248-7
10.1023/B:JECR.0000033998.72845.51
{'key': 'S0883769412002734_ref80', 'volume-title': 'Foundations of Nanomechanics—From Solid-State Theory to Device Applications', 'author': 'Cleland', 'year': '2003'} / Foundations of Nanomechanics—From Solid-State Theory to Device Applications by Cleland (2003)
10.1088/0964-1726/19/11/115011
{'key': 'S0883769412002734_ref59', 'volume-title': 'Critical Issues of Complex, Epitaxial Oxide Growth and Integration with Silicon by Molecular Beam Epitaxy', 'author': 'Lettieri', 'year': '2002'} / Critical Issues of Complex, Epitaxial Oxide Growth and Integration with Silicon by Molecular Beam Epitaxy by Lettieri (2002)
10.1016/j.newar.2005.11.019
10.1109/22.780400
10.1063/1.365983
10.1063/1.124157
10.1063/1.1927327
10.1002/9781119991151
10.1126/science.246.4936.1400
10.1063/1.126063
10.1088/0953-8984/14/34/202
10.1146/annurev.matsci.30.1.263
10.1126/science.1098252
{'key': 'S0883769412002734_ref7', 'first-page': '1', 'volume-title': 'Solid-State Sensor and Actuator Workshop', 'author': 'Aksyuk', 'year': '2002'} / Solid-State Sensor and Actuator Workshop by Aksyuk (2002)
10.1146/annurev.matsci.37.061206.113016
10.1126/science.1207186
10.1016/j.jeurceramsoc.2005.03.125
10.1063/1.1338959
10.1063/1.1646213
{'key': 'S0883769412002734_ref6', 'first-page': '211', 'author': 'Lopez', 'year': '2002', 'journal-title': '2002 IEEE/LEOS International Conference on Optical MEMS'} / 2002 IEEE/LEOS International Conference on Optical MEMS by Lopez (2002)
10.1088/0022-3727/40/20/S19
74. Zlotan S. , US Patent 3965376 (June 22, 1976).
10.1109/22.260698
10.1109/TMC.2010.202
10.1117/12.388842
10.1109/JSEN.2005.853595
10.1063/1.3679102
10.1109/TUFFC.2011.2015
10.1146/annurev.matsci.28.1.563
10.1557/mrs2009.177
10.1111/j.1551-2916.2012.05155.x
10.1063/1.1589192
10.1038/nature02773
10.1063/1.126977
10.1109/TUFFC.2007.556
10.1557/S0883769400033170
10.1109/JMEMS.2006.879122
10.1063/1.118008
10.1063/1.371404
10.1063/1.110436
10.1063/1.124536
10.1002/adma.201104398
10.1063/1.3163057
10.1063/1.1600824
10.1002/adma.200904306
10.1126/science.252.5008.944
10.1126/science.258.5089.1766
10.1063/1.102436
10.1117/12.895475
10.1063/1.3629551
10.1088/2058-7058/14/2/29
10.1126/science.290.5496.1532
{'key': 'S0883769412002734_ref81', 'first-page': '299', 'author': 'Akarvardar', 'year': '2007', 'journal-title': 'IEEE IEDM'} / IEEE IEDM by Akarvardar (2007)
10.1103/PhysRevLett.83.1347
10.1063/1.3530443
10.1111/j.1551-2916.2008.02413.x

Dates

Type	When
Created	12 years, 9 months ago (Nov. 12, 2012, 8:26 a.m.)
Deposited	4 years, 6 months ago (Feb. 24, 2021, 4:45 p.m.)
Indexed	3 weeks, 4 days ago (Aug. 7, 2025, 5:02 p.m.)
Issued	12 years, 10 months ago (Nov. 1, 2012)
Published	12 years, 10 months ago (Nov. 1, 2012)
Published Online	12 years, 9 months ago (Nov. 12, 2012)
Published Print	12 years, 10 months ago (Nov. 1, 2012)

Funders 0

None

BibTeX

@article{Eom_2012, title={Thin-film piezoelectric MEMS}, volume={37}, ISSN={1938-1425}, url={http://dx.doi.org/10.1557/mrs.2012.273}, DOI={10.1557/mrs.2012.273}, number={11}, journal={MRS Bulletin}, publisher={Springer Science and Business Media LLC}, author={Eom, Chang-Beom and Trolier-McKinstry, Susan}, year={2012}, month=nov, pages={1007–1017} }

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