DOI: 10.1557/s0883769400040598. Pulsed Laser Deposition History and Laser-Target Interactions

Pulsed Laser Deposition History and Laser-Target Interactions

10.1557/s0883769400040598

Crossref journal-article

Springer Science and Business Media LLC

MRS Bulletin (297)

Abstract

The laser, as a source of “pure” energy in the form of monochromatic and coherent photons, is enjoying ever increasing popularity in diverse and broad applications from drilling micron-sized holes on semiconductor devices to guidance systems used in drilling a mammoth tunnel under the English Channel. In many areas such as metallurgy, medical technology, and the electronics industry, it has become an irreplaceable tool.Like many other discoveries, the various applications of the laser were not initially defined but were consequences of natural evolution led by theoretical studies. Shortly after the demonstration of the first laser, the most intensely studied theoretical topics dealt with laser beam-solid interactions. Experiments were undertaken to verify different theoretical models for this process. Later, these experiments became the pillars of many applications. Figure 1 illustrates the history of laser development from its initial discovery to practical applications. In this tree of evolution, Pulsed Laser Deposition (PLD) is only a small branch. It remained relatively obscure for a long time. Only in the last few years has his branch started to blossom and bear fruits in thin film deposition.Conceptually and experimentally, PLD is extremely simple, probably the simplest among all thin film growth techniques. Figure 2 shows a schematic diagram of this technique. It uses pulsed laser radiation to vaporize materials and to deposit thin films in a vacuum chamber. However, the beam-solid interaction that leads to evaporation/ablation is a very complex physical phenomenon. The theoretical description of the mechanism is multidisciplinary and combines equilibrium and nonequilibrium processes. The impact of a laser beam on the surface of a solid material, electromagnetic energy is converted first into electronic excitation and then into thermal, chemical, and even mechanical energy to cause evaporation, ablation, excitation, and plasma formation.

Bibliography

Cheung, J., & Horwitz, J. (1992). Pulsed Laser Deposition History and Laser-Target Interactions. MRS Bulletin, 17(2), 30â36.

Authors 2

Jeff Cheung (first)
Jim Horwitz (additional)

References 68 Referenced 78

10.1063/1.339053
10.1063/1.100628 / Appl. Phys. Lett. by Dye (1988)
10.1063/1.322578
10.1016/0009-2614(91)80308-K
10.1007/3-540-12593-0
{'key': 'S0883769400040598_ref060', 'first-page': '1107', 'volume': '69', 'author': 'Neifled', 'year': '1991', 'journal-title': 'Appl. Phys. Lett.'} / Appl. Phys. Lett. by Neifled (1991)
10.1016/0169-4332(89)90241-9
10.1063/1.103979
10.1063/1.102362
{'key': 'S0883769400040598_ref056', 'volume-title': 'Thin Solid Films', 'author': 'Chrisey', 'year': '1991'} / Thin Solid Films by Chrisey (1991)
10.1116/1.583024
{'key': 'S0883769400040598_ref055', 'first-page': '233', 'volume': '70', 'author': 'Weidman', 'year': '1991', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. by Weidman (1991)
10.1063/1.98366
10.1080/10408438808244625
10.1063/1.348835
10.1117/12.965158
{'key': 'S0883769400040598_ref030', 'first-page': '639', 'volume': '25', 'author': "Afana'ev", 'year': '1967', 'journal-title': 'Sov. Phys. JETP'} / Sov. Phys. JETP by Afana'ev (1967)
10.1103/PhysRevLett.67.2102
10.1063/1.100573
10.1063/1.100549 / Appl. Phys. Lett. by Weimer (1988)
10.1063/1.98366
{'key': 'S0883769400040598_ref002', 'first-page': '387', 'volume-title': 'Photochemical Processing of Electronic Materials', 'author': 'Beech', 'year': '1991'} / Photochemical Processing of Electronic Materials by Beech (1991)
10.1038/scientificamerican1091-54
10.1063/1.101553
10.1116/1.574032
10.1063/1.106284
10.1063/1.342424
10.1016/0022-4596(78)90137-8
Gaponov S.V. , Luskin B.M. , and Salashchenko N.N. 39 (1981) p. 301.
{'key': 'S0883769400040598_ref008', 'first-page': '2', 'volume': '2', 'author': 'Barr', 'year': '1969', 'journal-title': 'J. Phys.'} / J. Phys. by Barr (1969)
{'key': 'S0883769400040598_ref012', 'first-page': '1736', 'volume': '19', 'author': 'Gaponov', 'year': '1977', 'journal-title': 'Sov. Phys. Solid State'} / Sov. Phys. Solid State by Gaponov (1977)
10.1116/1.574220
10.1016/0040-6090(75)90213-8
10.1116/1.1492692
10.1364/AO.25.001962
10.1093/imamat/15.1.59
{'key': 'S0883769400040598_ref014', 'first-page': '193', 'volume': '5', 'author': 'Gaponov', 'year': '1979', 'journal-title': 'Sov. Tech. Phys. Lett.'} / Sov. Tech. Phys. Lett. by Gaponov (1979)
{'key': 'S0883769400040598_ref034', 'volume-title': 'Laser Ablation for Material Synthesis', 'volume': '191', 'author': 'Paine', 'year': '1990'} / Laser Ablation for Material Synthesis by Paine (1990)
10.1364/AO.4.000147
10.1016/0025-5408(68)90005-6
10.1007/BF00558179
10.1063/1.435725
{'key': 'S0883769400040598_ref023', 'first-page': '2475', 'volume': '65', 'author': 'Sankur', 'year': '1989', 'journal-title': 'Appl. Phys. Lett.'} / Appl. Phys. Lett. by Sankur (1989)
10.1063/1.99904
{'key': 'S0883769400040598_ref011', 'first-page': '195', 'volume': '5', 'author': 'Gaponov', 'year': '1979', 'journal-title': 'Sov. Tech. Phys. Lett.'} / Sov. Tech. Phys. Lett. by Gaponov (1979)
10.1063/1.1714012
{'key': 'S0883769400040598_ref031', 'first-page': '182', 'volume': '27', 'author': 'Anisimov', 'year': '1968', 'journal-title': 'Sov. Phys. JETP'} / Sov. Phys. JETP by Anisimov (1968)
10.1016/0025-5408(68)90004-4
10.1116/1.583811
10.1016/0167-899X(84)90031-4
{'key': 'S0883769400040598_ref067', 'volume-title': 'Molecular Theory ofGasses and Liquid', 'author': 'Hirshfelder', 'year': '1954'} / Molecular Theory ofGasses and Liquid by Hirshfelder (1954)
10.1063/1.321801
10.1063/1.105481
10.1063/1.98756
{'key': 'S0883769400040598_ref037', 'first-page': '205', 'volume-title': 'Laser Ablation for Materials Synthesis', 'volume': '191', 'author': 'Foltyn', 'year': '1990'} / Laser Ablation for Materials Synthesis by Foltyn (1990)
{'key': 'S0883769400040598_ref062', 'volume-title': 'Proceedings of Laser Ablation Workshop', 'author': 'Nogar', 'year': '1990'} / Proceedings of Laser Ablation Workshop by Nogar (1990)
{'key': 'S0883769400040598_ref035', 'volume-title': 'Effects of High Power Radiation', 'author': 'Ready', 'year': '1971'} / Effects of High Power Radiation by Ready (1971)
10.1103/PhysRevB.41.8843
10.1063/1.99673
10.1063/1.101999
10.1063/1.100550
10.1063/1.104272
10.1063/1.106386
10.1063/1.1680538
10.1063/1.347209
10.1063/1.105484
10.1063/1.101490
{'key': 'S0883769400040598_ref064', 'first-page': '314', 'volume': 'B32', 'author': 'Kelly', 'year': '1988', 'journal-title': 'Nucl. Instrum. Methods'} / Nucl. Instrum. Methods by Kelly (1988)

Dates

Type	When
Created	9 years ago (Aug. 8, 2016, 5:28 a.m.)
Deposited	4 years, 6 months ago (Feb. 24, 2021, 4:22 p.m.)
Indexed	4 weeks, 2 days ago (Aug. 6, 2025, 8:32 a.m.)
Issued	33 years, 7 months ago (Feb. 1, 1992)
Published	33 years, 7 months ago (Feb. 1, 1992)
Published Online	11 years, 9 months ago (Nov. 29, 2013)
Published Print	33 years, 7 months ago (Feb. 1, 1992)

Funders 0

None

BibTeX

@article{Cheung_1992, title={Pulsed Laser Deposition History and Laser-Target Interactions}, volume={17}, ISSN={1938-1425}, url={http://dx.doi.org/10.1557/s0883769400040598}, DOI={10.1557/s0883769400040598}, number={2}, journal={MRS Bulletin}, publisher={Springer Science and Business Media LLC}, author={Cheung, Jeff and Horwitz, Jim}, year={1992}, month=feb, pages={30–36} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        6
      ]
    ],
    "date-time": "2025-08-06T12:32:19Z",
    "timestamp": 1754483539168
  },
  "reference-count": 68,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "2",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2013,
            11,
            29
          ]
        ],
        "date-time": "2013-11-29T00:00:00Z",
        "timestamp": 1385683200000
      },
      "content-version": "unspecified",
      "delay-in-days": 7972,
      "URL": "https://www.cambridge.org/core/terms"
    }
  ],
  "content-domain": {
    "domain": [
      "journals.cambridge.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1992,
        2
      ]
    ]
  },
  "abstract": "<jats:p>The laser, as a source of \u201cpure\u201d energy in the form of monochromatic and coherent photons, is enjoying ever increasing popularity in diverse and broad applications from drilling micron-sized holes on semiconductor devices to guidance systems used in drilling a mammoth tunnel under the English Channel. In many areas such as metallurgy, medical technology, and the electronics industry, it has become an irreplaceable tool.</jats:p><jats:p>Like many other discoveries, the various applications of the laser were not initially defined but were consequences of natural evolution led by theoretical studies. Shortly after the demonstration of the first laser, the most intensely studied theoretical topics dealt with laser beam-solid interactions. Experiments were undertaken to verify different theoretical models for this process. Later, these experiments became the pillars of many applications. Figure 1 illustrates the history of laser development from its initial discovery to practical applications. In this tree of evolution, Pulsed Laser Deposition (PLD) is only a small branch. It remained relatively obscure for a long time. Only in the last few years has his branch started to blossom and bear fruits in thin film deposition.</jats:p><jats:p>Conceptually and experimentally, PLD is extremely simple, probably the simplest among all thin film growth techniques. Figure 2 shows a schematic diagram of this technique. It uses pulsed laser radiation to vaporize materials and to deposit thin films in a vacuum chamber. However, the beam-solid interaction that leads to evaporation/ablation is a very complex physical phenomenon. The theoretical description of the mechanism is multidisciplinary and combines equilibrium and nonequilibrium processes. The impact of a laser beam on the surface of a solid material, electromagnetic energy is converted first into electronic excitation and then into thermal, chemical, and even mechanical energy to cause evaporation, ablation, excitation, and plasma formation.</jats:p>",
  "DOI": "10.1557/s0883769400040598",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2016,
        8,
        8
      ]
    ],
    "date-time": "2016-08-08T09:28:40Z",
    "timestamp": 1470648520000
  },
  "page": "30-36",
  "update-policy": "http://dx.doi.org/10.1017/policypage",
  "source": "Crossref",
  "is-referenced-by-count": 78,
  "title": "Pulsed Laser Deposition History and Laser-Target Interactions",
  "prefix": "10.1557",
  "volume": "17",
  "author": [
    {
      "given": "Jeff",
      "family": "Cheung",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Jim",
      "family": "Horwitz",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "published-online": {
    "date-parts": [
      [
        2013,
        11,
        29
      ]
    ]
  },
  "reference": [
    {
      "key": "S0883769400040598_ref026",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.339053"
    },
    {
      "key": "S0883769400040598_ref043",
      "doi-asserted-by": "crossref",
      "first-page": "534",
      "DOI": "10.1063/1.100628",
      "volume": "53",
      "author": "Dye",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "S0883769400040598_ref028",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.322578"
    },
    {
      "key": "S0883769400040598_ref068",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0009-2614(91)80308-K"
    },
    {
      "key": "S0883769400040598_ref063",
      "doi-asserted-by": "publisher",
      "DOI": "10.1007/3-540-12593-0"
    },
    {
      "key": "S0883769400040598_ref060",
      "first-page": "1107",
      "volume": "69",
      "author": "Neifled",
      "year": "1991",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "S0883769400040598_ref059",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0169-4332(89)90241-9"
    },
    {
      "key": "S0883769400040598_ref065",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.103979"
    },
    {
      "key": "S0883769400040598_ref049",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.102362"
    },
    {
      "key": "S0883769400040598_ref056",
      "volume-title": "Thin Solid Films",
      "author": "Chrisey",
      "year": "1991"
    },
    {
      "key": "S0883769400040598_ref022",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.583024"
    },
    {
      "key": "S0883769400040598_ref055",
      "first-page": "233",
      "volume": "70",
      "author": "Weidman",
      "year": "1991",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "S0883769400040598_ref054",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.98366"
    },
    {
      "key": "S0883769400040598_ref001",
      "doi-asserted-by": "publisher",
      "DOI": "10.1080/10408438808244625"
    },
    {
      "key": "S0883769400040598_ref051",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.348835"
    },
    {
      "key": "S0883769400040598_ref050",
      "doi-asserted-by": "publisher",
      "DOI": "10.1117/12.965158"
    },
    {
      "key": "S0883769400040598_ref030",
      "first-page": "639",
      "volume": "25",
      "author": "Afana'ev",
      "year": "1967",
      "journal-title": "Sov. Phys. JETP"
    },
    {
      "key": "S0883769400040598_ref052",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevLett.67.2102"
    },
    {
      "key": "S0883769400040598_ref048",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.100573"
    },
    {
      "key": "S0883769400040598_ref047",
      "doi-asserted-by": "crossref",
      "first-page": "2698",
      "DOI": "10.1063/1.100549",
      "volume": "53",
      "author": "Weimer",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "S0883769400040598_ref046",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.98366"
    },
    {
      "key": "S0883769400040598_ref002",
      "first-page": "387",
      "volume-title": "Photochemical Processing of Electronic Materials",
      "author": "Beech",
      "year": "1991"
    },
    {
      "key": "S0883769400040598_ref025",
      "doi-asserted-by": "publisher",
      "DOI": "10.1038/scientificamerican1091-54"
    },
    {
      "key": "S0883769400040598_ref045",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.101553"
    },
    {
      "key": "S0883769400040598_ref018",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.574032"
    },
    {
      "key": "S0883769400040598_ref009",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.106284"
    },
    {
      "key": "S0883769400040598_ref058",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.342424"
    },
    {
      "key": "S0883769400040598_ref015",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0022-4596(78)90137-8"
    },
    {
      "key": "S0883769400040598_ref013",
      "unstructured": "Gaponov S.V. , Luskin B.M. , and Salashchenko N.N. 39 (1981) p. 301."
    },
    {
      "key": "S0883769400040598_ref008",
      "first-page": "2",
      "volume": "2",
      "author": "Barr",
      "year": "1969",
      "journal-title": "J. Phys."
    },
    {
      "key": "S0883769400040598_ref012",
      "first-page": "1736",
      "volume": "19",
      "author": "Gaponov",
      "year": "1977",
      "journal-title": "Sov. Phys. Solid State"
    },
    {
      "key": "S0883769400040598_ref019",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.574220"
    },
    {
      "key": "S0883769400040598_ref010",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0040-6090(75)90213-8"
    },
    {
      "key": "S0883769400040598_ref007",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.1492692"
    },
    {
      "key": "S0883769400040598_ref024",
      "doi-asserted-by": "publisher",
      "DOI": "10.1364/AO.25.001962"
    },
    {
      "key": "S0883769400040598_ref029",
      "doi-asserted-by": "publisher",
      "DOI": "10.1093/imamat/15.1.59"
    },
    {
      "key": "S0883769400040598_ref014",
      "first-page": "193",
      "volume": "5",
      "author": "Gaponov",
      "year": "1979",
      "journal-title": "Sov. Tech. Phys. Lett."
    },
    {
      "key": "S0883769400040598_ref034",
      "volume-title": "Laser Ablation for Material Synthesis",
      "volume": "191",
      "author": "Paine",
      "year": "1990"
    },
    {
      "key": "S0883769400040598_ref003",
      "doi-asserted-by": "publisher",
      "DOI": "10.1364/AO.4.000147"
    },
    {
      "key": "S0883769400040598_ref005",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0025-5408(68)90005-6"
    },
    {
      "key": "S0883769400040598_ref006",
      "doi-asserted-by": "publisher",
      "DOI": "10.1007/BF00558179"
    },
    {
      "key": "S0883769400040598_ref016",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.435725"
    },
    {
      "key": "S0883769400040598_ref023",
      "first-page": "2475",
      "volume": "65",
      "author": "Sankur",
      "year": "1989",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "S0883769400040598_ref021",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.99904"
    },
    {
      "key": "S0883769400040598_ref011",
      "first-page": "195",
      "volume": "5",
      "author": "Gaponov",
      "year": "1979",
      "journal-title": "Sov. Tech. Phys. Lett."
    },
    {
      "key": "S0883769400040598_ref027",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1714012"
    },
    {
      "key": "S0883769400040598_ref031",
      "first-page": "182",
      "volume": "27",
      "author": "Anisimov",
      "year": "1968",
      "journal-title": "Sov. Phys. JETP"
    },
    {
      "key": "S0883769400040598_ref004",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0025-5408(68)90004-4"
    },
    {
      "key": "S0883769400040598_ref020",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.583811"
    },
    {
      "key": "S0883769400040598_ref032",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0167-899X(84)90031-4"
    },
    {
      "key": "S0883769400040598_ref067",
      "volume-title": "Molecular Theory ofGasses and Liquid",
      "author": "Hirshfelder",
      "year": "1954"
    },
    {
      "key": "S0883769400040598_ref033",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.321801"
    },
    {
      "key": "S0883769400040598_ref066",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.105481"
    },
    {
      "key": "S0883769400040598_ref036",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.98756"
    },
    {
      "key": "S0883769400040598_ref037",
      "first-page": "205",
      "volume-title": "Laser Ablation for Materials Synthesis",
      "volume": "191",
      "author": "Foltyn",
      "year": "1990"
    },
    {
      "key": "S0883769400040598_ref062",
      "volume-title": "Proceedings of Laser Ablation Workshop",
      "author": "Nogar",
      "year": "1990"
    },
    {
      "key": "S0883769400040598_ref035",
      "volume-title": "Effects of High Power Radiation",
      "author": "Ready",
      "year": "1971"
    },
    {
      "key": "S0883769400040598_ref039",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevB.41.8843"
    },
    {
      "key": "S0883769400040598_ref040",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.99673"
    },
    {
      "key": "S0883769400040598_ref038",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.101999"
    },
    {
      "key": "S0883769400040598_ref042",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.100550"
    },
    {
      "key": "S0883769400040598_ref057",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.104272"
    },
    {
      "key": "S0883769400040598_ref041",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.106386"
    },
    {
      "key": "S0883769400040598_ref017",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1680538"
    },
    {
      "key": "S0883769400040598_ref053",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.347209"
    },
    {
      "key": "S0883769400040598_ref061",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.105484"
    },
    {
      "key": "S0883769400040598_ref044",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.101490"
    },
    {
      "key": "S0883769400040598_ref064",
      "first-page": "314",
      "volume": "B32",
      "author": "Kelly",
      "year": "1988",
      "journal-title": "Nucl. Instrum. Methods"
    }
  ],
  "container-title": "MRS Bulletin",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S0883769400040598",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2021,
        2,
        24
      ]
    ],
    "date-time": "2021-02-24T21:22:12Z",
    "timestamp": 1614201732000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "http://link.springer.com/10.1557/S0883769400040598"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1992,
        2
      ]
    ]
  },
  "references-count": 68,
  "journal-issue": {
    "issue": "2",
    "published-print": {
      "date-parts": [
        [
          1992,
          2
        ]
      ]
    }
  },
  "alternative-id": [
    "S0883769400040598"
  ],
  "URL": "http://dx.doi.org/10.1557/S0883769400040598",
  "relation": {},
  "ISSN": [
    "0883-7694",
    "1938-1425"
  ],
  "subject": [],
  "container-title-short": "MRS Bull.",
  "published": {
    "date-parts": [
      [
        1992,
        2
      ]
    ]
  },
  "assertion": [
    {
      "value": "Copyright \u00a9 Materials Research Society 1992",
      "name": "license",
      "label": "License",
      "group": {
        "name": "copyright_and_licensing",
        "label": "Copyright and Licensing"
      }
    }
  ]
}