DOI: 10.1557/proc-540-27. The Structure of Ion-Implanted Amorphous Silicon

The Structure of Ion-Implanted Amorphous Silicon

10.1557/proc-540-27

Crossref journal-article

Springer Science and Business Media LLC

MRS Proceedings (297)

Abstract

AbstractUsing fluctuation microscopy, we show that ion-implanted amorphous silicon has more medium-range order than is expected from the continuous random network model. From our previous work on evaporated and sputtered amorphous silicon, we conclude that the structure is paracrystalline, i.e. it possesses crystalline-like order which decays with distance from any point. The observation might pose an explanation for the large heat of relaxation that is evolved by ion-implanted amorphous semiconductors.

Bibliography

Gibson, J. M., Cheng, J.-Y., Voyles, P., TREACY, M. M. J., & Jacobson, D. C. (1998). The Structure of Ion-Implanted Amorphous Silicon. MRS Proceedings, 540.

Authors 5

J. M. Gibson (first)
J-Y. Cheng (additional)
P. Voyles (additional)
M.M.J. TREACY (additional)
D.C. Jacobson (additional)

References 7 Referenced 2

10.1557/JMR.1989.1057
10.1063/1.122683
10.1103/PhysRevLett.78.1074
10.1016/S0022-3093(98)00371-8
10.1063/1.101593
10.1063/1.102984
10.1107/S0108767395012876 / Acta Crystallogr. by Treacy (1996)

Dates

Type	When
Created	14 years, 4 months ago (April 5, 2011, 3:27 p.m.)
Deposited	4 years, 6 months ago (Feb. 24, 2021, 4:39 p.m.)
Indexed	1 year, 6 months ago (Feb. 6, 2024, 11:03 p.m.)
Issued	27 years, 8 months ago (Jan. 1, 1998)
Published	27 years, 8 months ago (Jan. 1, 1998)
Published Online	14 years, 6 months ago (Feb. 15, 2011)
Published Print	27 years, 8 months ago (Jan. 1, 1998)

Funders 0

None

BibTeX

@article{Gibson_1998, title={The Structure of Ion-Implanted Amorphous Silicon}, volume={540}, ISSN={1946-4274}, url={http://dx.doi.org/10.1557/proc-540-27}, DOI={10.1557/proc-540-27}, journal={MRS Proceedings}, publisher={Springer Science and Business Media LLC}, author={Gibson, J. M. and Cheng, J-Y. and Voyles, P. and TREACY, M.M.J. and Jacobson, D.C.}, year={1998} }

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