DOI: 10.1557/proc-514-127. Monte Carlo Atomistic Simulation of Polycrystalline Aluminum Deposition

Monte Carlo Atomistic Simulation of Polycrystalline Aluminum Deposition

10.1557/proc-514-127

Crossref journal-article

Springer Science and Business Media LLC

MRS Proceedings (297)

Abstract

ABSTRACTA new atomistic scheme for simulating polycrystalline thin film deposition based on a Monte Carlo approach has been developed. Simulations of polycrystalline aluminum deposition and annealing at different temperatures are presented. The time evolution of the film morphology for those temperatures is discussed. During deposition, columnar growth is observed at low temperatures. Grain growth takes place mainly during annealing. Faceting and selection of preferred crystal orientations (texture) is observed.

Bibliography

Rubio, J. E., JaraÃz, M., BaiIÃ³n, L. A., Barbolla, J., LÃ³pez, M. J., & Gilmer, G. H. (1998). Monte Carlo Atomistic Simulation of Polycrystalline Aluminum Deposition. MRS Proceedings, 514.

Authors 6

J. Emiliano Rubio (first)
Martín Jaraíz (additional)
Luis A. BaiIón (additional)
Juan Barbolla (additional)
M José López (additional)
George H. Gilmer (additional)

References 7 Referenced 3

10.1557/S0883769400045619
{'key': 'S1946427400256777_ref006', 'first-page': '6225', 'volume': '23', 'author': 'Gupta', 'year': '1981', 'journal-title': 'Phys. Rev. B'} / Phys. Rev. B by Gupta (1981)
10.1117/12.48908
10.1080/14786436808227358
10.1109/16.141224 / IEEE Trans. Elect. Dev. by Goldham (1992)
7. Huang H. , Gilmer G. , Rubia T. Díaz de la , to be published.
10.1116/1.584901

Dates

Type	When
Created	14 years, 5 months ago (April 5, 2011, 12:13 p.m.)
Deposited	4 years, 6 months ago (Feb. 24, 2021, 4:28 p.m.)
Indexed	1 year, 6 months ago (Feb. 7, 2024, 1:04 a.m.)
Issued	27 years, 8 months ago (Jan. 1, 1998)
Published	27 years, 8 months ago (Jan. 1, 1998)
Published Online	14 years, 6 months ago (Feb. 10, 2011)
Published Print	27 years, 8 months ago (Jan. 1, 1998)

Funders 0

None

BibTeX

@article{Rubio_1998, title={Monte Carlo Atomistic Simulation of Polycrystalline Aluminum Deposition}, volume={514}, ISSN={1946-4274}, url={http://dx.doi.org/10.1557/proc-514-127}, DOI={10.1557/proc-514-127}, journal={MRS Proceedings}, publisher={Springer Science and Business Media LLC}, author={Rubio, J. Emiliano and Jaraíz, Martín and BaiIón, Luis A. and Barbolla, Juan and López, M José and Gilmer, George H.}, year={1998} }

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