DOI: 10.1557/proc-480-19. Focused Ion Beam Milling and Micromanipulation Lift-Out for Site Specific Cross-Section Tem Specimen Preparation

Focused Ion Beam Milling and Micromanipulation Lift-Out for Site Specific Cross-Section Tem Specimen Preparation

10.1557/proc-480-19

Crossref journal-article

Springer Science and Business Media LLC

MRS Proceedings (297)

Abstract

AbstractA site specific technique for cross-section transmission electron microscopy specimen preparation of difficult materials is presented. Focused ion beams are used to slice an electron transparent sliver of the specimen from a specific area of interest. Micromanipulation lift-out procedures are then used to transport the electron transparent specimen to a carbon coated copper grid for subsequent TEM analysis. The experimental procedures are described in detail and an example of the lift-out technique is presented.

Bibliography

Giannuzzi, L. A., Drown, J. L., Brown, S. R., Irwin, R. B., & Stevie, F. A. (1997). Focused Ion Beam Milling and Micromanipulation Lift-Out for Site Specific Cross-Section Tem Specimen Preparation. MRS Proceedings, 480.

Authors 5

L. A. Giannuzzi (first)
J. L. Drown (additional)
S. R. Brown (additional)
R. B. Irwin (additional)
F. A. Stevie (additional)

References 27 Referenced 132

8. System specifications for FEI 200 and 800 Focused Ion Beam Workstations. FEI Company (USA), 7451 N.E. Evergreen Parkway, Hillsboro, Oregon, 97124–5830.
10.1002/sia.740230204
4. Mantusiewicz G. R. , Kirch S. J. , and Seeley V. J. , IEEE/IRPS Proc., p. 167 (1991).
10.1143/JJAP.32.3938 / Jpn. J. Appl. Phys. by Tomikawa (1993)
26. Giannuzzi L.A. , Drown J. L. , Brown S.R. , Irwin R.B. , and Stevie F. A. , in press, J. Mat. Res.
10.1149/1.2056082
10.1116/1.586998
10.1016/0167-9317(93)90051-6
{'key': 'S1946427400183113_ref009', 'first-page': '501', 'volume': '100', 'author': 'Kirk', 'year': '1989', 'journal-title': 'Inst. Phys. Conf. Ser.'} / Inst. Phys. Conf. Ser. by Kirk (1989)
10.1117/12.47342 / SPIE Proc. by Lange (1991)
25. Hull R. , Stevie F. A. , and Bahnck D. , Mater Res. Soc. Symp. Proc. (1994).
10.1557/PROC-254-23
10.1016/0169-4332(89)90939-2
10.1116/1.586415
10.1143/JJAP.31.L1305
10.1116/1.586536
10.1116/1.586554
{'key': 'S1946427400183113_ref002', 'first-page': '43', 'author': 'Nikawa', 'year': '1989', 'journal-title': 'IEEE/IRPS Proc.'} / IEEE/IRPS Proc. by Nikawa (1989)
10.1116/1.586840
{'key': 'S1946427400183113_ref019', 'first-page': '397', 'volume-title': '17ty Int. Symp. for Testing and Failure Analysis', 'author': 'Lange', 'year': '1991'} / 17ty Int. Symp. for Testing and Failure Analysis by Lange (1991)
10.1116/1.586537
10.1117/12.139343
10.1063/1.109032
27. Narishige Micromanipulator, Narishige USA, Inc., Sea Cliff, NY.
10.1117/12.139346
10.1117/12.139342
{'key': 'S1946427400183113_ref020', 'first-page': '239', 'volume-title': 'Mater. Res. Soc. Symp. on Specimen Preparation for Transmission Electron Microscopy of Materials-Ill', 'author': 'Sanborn', 'year': '1992'} / Mater. Res. Soc. Symp. on Specimen Preparation for Transmission Electron Microscopy of Materials-Ill by Sanborn (1992)

Dates

Type	When
Created	14 years, 4 months ago (April 5, 2011, 10:52 a.m.)
Deposited	4 years, 5 months ago (Feb. 24, 2021, 5:03 p.m.)
Indexed	1 day, 17 hours ago (Aug. 19, 2025, 6:18 a.m.)
Issued	28 years, 7 months ago (Jan. 1, 1997)
Published	28 years, 7 months ago (Jan. 1, 1997)
Published Online	14 years, 6 months ago (Feb. 10, 2011)
Published Print	28 years, 7 months ago (Jan. 1, 1997)

Funders 0

None

BibTeX

@article{Giannuzzi_1997, title={Focused Ion Beam Milling and Micromanipulation Lift-Out for Site Specific Cross-Section Tem Specimen Preparation}, volume={480}, ISSN={1946-4274}, url={http://dx.doi.org/10.1557/proc-480-19}, DOI={10.1557/proc-480-19}, journal={MRS Proceedings}, publisher={Springer Science and Business Media LLC}, author={Giannuzzi, L. A. and Drown, J. L. and Brown, S. R. and Irwin, R. B. and Stevie, F. A.}, year={1997} }

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