DOI: 10.1557/proc-433-285. Leakage Currents in CVD (Ba,Sr)TiO<sub>3</sub> Thin Films

Leakage Currents in CVD (Ba,Sr)TiO3 Thin Films

10.1557/proc-433-285

Crossref journal-article

Springer Science and Business Media LLC

MRS Proceedings (297)

Abstract

AbstractWe have analyzed the leakage behavior of polycrystalline MOCVD (Ba,Sr)TiO3 thin films as a function of both temperature and field. Of the possible mechanisms, thermionic (Schottky) emission gives a self-consistent description of the temperature and field dependencies of the true leakage current for fields in the range of 240–970 kV/cm, and yields realistic barrier heights of 1.2 eV for Pt as the cathode material. For film thicknesses of interest for use in DRAMs, the capacitance-voltage characteristics are explained via Landau-Ginzburg-Devonshire theory. Preliminary resistance degradation studies are also discussed.

Bibliography

Basceri, C., Streiffer, S. K., Kingon, A. I., Bilodeau, S., Carl, R., Buskirk, P. C. V., Summerfelt, S. R., Mcintyre, P., & Waser, R. (1996). Leakage Currents in CVD (Ba,Sr)TiO3 Thin Films. MRS Proceedings, 433.

Authors 9

C. Basceri (first)
S.K. Streiffer (additional)
A.I. Kingon (additional)
S. Bilodeau (additional)
R. Carl (additional)
P.C. Van Buskirk (additional)
S.R. Summerfelt (additional)
P. Mcintyre (additional)
R. Waser (additional)

References 16 Referenced 18

10.1111/j.1151-2916.1990.tb09809.x
[14] Dietz G. , Schumacher M. , Waser R. , Streiffer S.K. , Basceri C. , and Kingon A.I. , to be published.
10.1557/PROC-361-257
10.1080/10584589508220241
10.1143/JJAP.34.5245
10.1080/10584589508220244
10.1007/978-94-017-2950-5_16
10.1557/PROC-284-529
{'key': 'S1946427400222215_ref003', 'first-page': '219', 'volume': '43', 'author': 'Kuroiwa', 'year': '1994', 'journal-title': 'Ceramic Transactions'} / Ceramic Transactions by Kuroiwa (1994)
10.1063/1.114795
10.1063/1.360553
{'key': 'S1946427400222215_ref015', 'first-page': '71', 'volume-title': 'Principles and Applications of Ferroelectrics and Related Materials', 'author': 'Lines', 'year': '1977'} / Principles and Applications of Ferroelectrics and Related Materials by Lines (1977)
{'key': 'S1946427400222215_ref001', 'volume': '356', 'author': 'Scott', 'year': '1992', 'journal-title': 'Proc. of the 1992 IEEE Int. Symp. Appl. Ferro.'} / Proc. of the 1992 IEEE Int. Symp. Appl. Ferro. by Scott (1992)
[13] Streiffer S.K. , Basceri C. , Kingon A.I. , Lipa S. , Bilodeau S. , Carl R. , and Buskirk P.C. van , MRS Symp. Proc., in press (1996).
10.1063/1.114610
10.1143/JJAP.34.5178

Dates

Type	When
Created	14 years, 4 months ago (April 6, 2011, 7:43 a.m.)
Deposited	4 years, 6 months ago (Feb. 24, 2021, 4:14 p.m.)
Indexed	2 months, 3 weeks ago (June 6, 2025, 5:47 a.m.)
Issued	29 years, 7 months ago (Jan. 1, 1996)
Published	29 years, 7 months ago (Jan. 1, 1996)
Published Online	14 years, 6 months ago (Feb. 10, 2011)
Published Print	29 years, 7 months ago (Jan. 1, 1996)

Funders 0

None

BibTeX

@article{Basceri_1996, title={Leakage Currents in CVD (Ba,Sr)TiO3 Thin Films}, volume={433}, ISSN={1946-4274}, url={http://dx.doi.org/10.1557/proc-433-285}, DOI={10.1557/proc-433-285}, journal={MRS Proceedings}, publisher={Springer Science and Business Media LLC}, author={Basceri, C. and Streiffer, S.K. and Kingon, A.I. and Bilodeau, S. and Carl, R. and Buskirk, P.C. Van and Summerfelt, S.R. and Mcintyre, P. and Waser, R.}, year={1996} }

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