DOI: 10.1557/proc-310-223. Organometallic Chemical Vapor Deposition of Lead Zirconate-Titanate Thin Films

Organometallic Chemical Vapor Deposition of Lead Zirconate-Titanate Thin Films

10.1557/proc-310-223

Crossref journal-article

Springer Science and Business Media LLC

MRS Proceedings (297)

Abstract

AbstractIn this paper the growth of PbZrxTi1-xO3 on 10 cm platinized silicon wafers using the precursors cursors tetra-ethyl-lead, titanium-tetra-isopropoxide, or titanium-tetra-tertiarybutoxide and zirconium-tetra-tertiarybutoxide will be discussed in some detail. The composition of the films as a function of growth parameters will be treated and the accompanying change in the ferroelectric properties will be discussed. For device manufacturing, the PbZrxTi1-xO3 films are subjected to a number of processing steps. Some results for partially processed wafers will be presented. Also, preliminary results of depositions on 15 cm wafers will be given.

Bibliography

Keuser, M. D., Veldhoven, P. J. V., & Dorman, G. J. M. (1993). Organometallic Chemical Vapor Deposition of Lead Zirconate-Titanate Thin Films. MRS Proceedings, 310.

Authors 3

M. De Keuser (first)
P.J. Van Veldhoven (additional)
G.J.M. Dorman (additional)

References 16 Referenced 29

13. Keijser M. de , Dormans G.J.M. , Veldhoven P.J. van , and Larsen P.K. , presented at the 4th International Symposium on Integrated Ferroelectrics, Monterey (1992). Integrated Ferroelectrics (in press).
{'key': 'S194642740040391X_ref010', 'first-page': '192', 'volume-title': 'Extended Abstracts of the 1991 International Conference on Solid State Devices and Materials', 'author': 'Kashihara', 'year': '1991'} / Extended Abstracts of the 1991 International Conference on Solid State Devices and Materials by Kashihara (1991)
10.1063/1.104269
10.1063/1.351190
{'key': 'S194642740040391X_ref009', 'first-page': '203', 'volume-title': 'Ferroelectric Thin Films II', 'volume': '243', 'author': 'Dormans', 'year': '1992'} / Ferroelectric Thin Films II by Dormans (1992)
12. Spierings G.A.C.M. , Zon J.B.A. van , Klee M. , and Larsen P.K. ,.presented at the 4th International Symposium on Integrated Ferroelectrics, Monterey (1992). Integrated Ferroelectrics (in press).
10.6028/jres.055.028
{'key': 'S194642740040391X_ref006', 'first-page': '141', 'volume-title': 'Ferroelectric Thin Films', 'volume': '200', 'author': 'Roy', 'year': '1990'} / Ferroelectric Thin Films by Roy (1990)
10.1063/1.347397
10.1063/1.107646
{'key': 'S194642740040391X_ref014', 'first-page': '875', 'volume': '43', 'author': 'Heartling', 'year': '1964', 'journal-title': 'Am. Ceram. Soc. Bull.'} / Am. Ceram. Soc. Bull. by Heartling (1964)
10.1063/1.104792
10.1080/00150199208015102
10.1080/10584589208215750
10.1016/0022-0248(92)90615-P
10.2109/jcersj.99.248

Dates

Type	When
Created	14 years, 5 months ago (March 5, 2011, 7:38 p.m.)
Deposited	4 years, 6 months ago (Feb. 24, 2021, 4:13 p.m.)
Indexed	1 year, 6 months ago (Feb. 7, 2024, 1:07 a.m.)
Issued	32 years, 7 months ago (Jan. 1, 1993)
Published	32 years, 7 months ago (Jan. 1, 1993)
Published Online	14 years, 6 months ago (Feb. 21, 2011)
Published Print	32 years, 7 months ago (Jan. 1, 1993)

Funders 0

None

BibTeX

@article{Keuser_1993, title={Organometallic Chemical Vapor Deposition of Lead Zirconate-Titanate Thin Films}, volume={310}, ISSN={1946-4274}, url={http://dx.doi.org/10.1557/proc-310-223}, DOI={10.1557/proc-310-223}, journal={MRS Proceedings}, publisher={Springer Science and Business Media LLC}, author={Keuser, M. De and Veldhoven, P.J. Van and Dorman, G.J.M.}, year={1993} }

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