DOI: 10.1557/proc-254-23. Fibxtem— Focussed Ion Beam Milling for TEM Sample Preparation

Fibxtem— Focussed Ion Beam Milling for TEM Sample Preparation

10.1557/proc-254-23

Crossref journal-article

Springer Science and Business Media LLC

MRS Proceedings (297)

Abstract

AbstractIn the semiconductor industry, shrinking geometries and increasing process complexity have greatly increased the demand for TEM analysis of specific submicron regions. Until recently, samples of this nature have been difficult if not impossible to prepare. We have combined cross-sectional TEM sample preparation (XTEM) and the precise material sputtering of focussed ion beam milling (FIB) to thin samples to electron transparency. We call this sample preparation technique FIBXTEM.Three advantages of this technique are:1) The area of interest can be analyzed in the scanning electron microscope before final thinning;2) Any specific defect area becomes a candidate for TEM analysis, including failed sub-micron structures; and3) Samples are generally artifact-free and of uniform thickness.Key elements of the FIBXTEM technique include precision planar polishing, unique holders for mounting and transferring samples between systems, and the FIB-induced deposition of a sacrificial protective layer over the area of interest during ion thinning.This technique extends the use of TEM analysis into new areas of semiconductor process development and failure analysis. Recent applications for materials problem solving and failure analysis are discussed.

Bibliography

Basile, D. P., Boylan, R., Baker, B., Hayes, K., & Soza, D. (1991). Fibxtemâ Focussed Ion Beam Milling for TEM Sample Preparation. MRS Proceedings, 254.

Authors 5

David P. Basile (first)
Ron Boylan (additional)
Brian Baker (additional)
Kathy Hayes (additional)
David Soza (additional)

References 14 Referenced 44

{'key': 'S1946427400402277_ref008', 'first-page': '74', 'volume': '19', 'author': 'Benedict', 'year': '1989', 'journal-title': 'EMSA Bulletin'} / EMSA Bulletin by Benedict (1989)
7. Kirch S.J. , Anderson R. , and Klepeis S.J. , in Proceedings of the 49th Annual Meeting of the Electron Microscopy Society of America, edited by G.W. Bailey and E.L. Hall (San Francisco Press, Inc., California, 1991), pp.1108–1109. (10.1017/S0424820100089858)
1. Anderson R. , in Proceedings of the 49th Annual Meeting of the Electron Microscopy Society of America, edited by G.W. Bailey and E.L. Hall (San Francisco Press, Inc., California, 1991), pp. 828–829. (10.1017/S0424820100088452)
2. Kirk E.C.G. , Williams D.A. , and Ahmed H. . in Proceedings of the 6th Microscopy of Semiconducting Materials Conf., Inst. Phys. Conf. Ser. No. 100: Section 7, 501 (1986).
{'key': 'S1946427400402277_ref003', 'first-page': '205', 'volume-title': 'Mater. Res. Soc. Proc.', 'volume': '199', 'author': 'Young', 'year': '1990'} / Mater. Res. Soc. Proc. by Young (1990)
{'key': 'S1946427400402277_ref009', 'first-page': '179', 'volume-title': 'Mater. Res. Soc. Proc.', 'volume': '115', 'author': 'Klepeis', 'year': '1987'} / Mater. Res. Soc. Proc. by Klepeis (1987)
{'key': 'S1946427400402277_ref004', 'first-page': '271', 'volume-title': 'Mater. Res. Soc. Proc.', 'volume': '199', 'author': 'Park', 'year': '1990'} / Mater. Res. Soc. Proc. by Park (1990)
10.1116/1.585694
{'key': 'S1946427400402277_ref006', 'first-page': '417', 'volume-title': 'Proceedings of the 17th International Symposium for Testing and Failure Analysis', 'author': 'Morris', 'year': '1991'} / Proceedings of the 17th International Symposium for Testing and Failure Analysis by Morris (1991)
10.1116/1.584465
10.1116/1.583856
10.1116/1.584654
10.1116/1.584803
10.1116/1.584460

Dates

Type	When
Created	14 years, 5 months ago (March 5, 2011, 1:46 a.m.)
Deposited	3 years, 9 months ago (Nov. 19, 2021, 4:01 p.m.)
Indexed	11 months, 2 weeks ago (Sept. 10, 2024, 8:42 a.m.)
Issued	34 years, 7 months ago (Jan. 1, 1991)
Published	34 years, 7 months ago (Jan. 1, 1991)
Published Online	14 years, 6 months ago (Feb. 21, 2011)
Published Print	34 years, 7 months ago (Jan. 1, 1991)

Funders 0

None

BibTeX

@article{Basile_1991, title={Fibxtem— Focussed Ion Beam Milling for TEM Sample Preparation}, volume={254}, ISSN={1946-4274}, url={http://dx.doi.org/10.1557/proc-254-23}, DOI={10.1557/proc-254-23}, journal={MRS Proceedings}, publisher={Springer Science and Business Media LLC}, author={Basile, David P. and Boylan, Ron and Baker, Brian and Hayes, Kathy and Soza, David}, year={1991} }

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