DOI: 10.1557/proc-199-205. Fabrication of Planar and Cross-Sectional TEM Specimens Using a Focused Ion Beam

Fabrication of Planar and Cross-Sectional TEM Specimens Using a Focused Ion Beam

10.1557/proc-199-205

Crossref journal-article

Springer Science and Business Media LLC

MRS Proceedings (297)

Abstract

ABSTRACTA new technique using a focused ion beam has been developed for the fabrication of transmission electron microscopy specimens in pre-selected regions. The method has been proven in the fabrication of both cross-sectional and planar specimens, with no induced artefacts. The lateral accuracy achievable in the selection of an area for cross-sectional analysis is better than one micrometre. The technique has been applied to a number of silicon and III-V based integrated circuits, and is expected to be suitable for many other materials and structures.

Bibliography

Young, R. J., Kirk, E. C. G., Williams, D. A., & Ahmed, H. (1990). Fabrication of Planar and Cross-Sectional TEM Specimens Using a Focused Ion Beam. MRS Proceedings, 199.

Authors 4

R. J. Young (first)
E. C. G. Kirk (additional)
D. A. Williams (additional)
H. Ahmed (additional)

References 8 Referenced 56

{'key': 'S1946427400361498_ref007', 'first-page': '501', 'volume': '100', 'author': 'Kirk', 'year': '1989', 'journal-title': 'Inst.Phys.Conf. Ser.'} / Inst.Phys.Conf. Ser. by Kirk (1989)
10.1007/BF01729909
{'key': 'S1946427400361498_ref004', 'first-page': 'D183', 'volume-title': 'Handbook of Chemistry and Physics', 'author': 'Weast', 'year': '1975'} / Handbook of Chemistry and Physics by Weast (1975)
{'key': 'S1946427400361498_ref003', 'first-page': '1', 'volume-title': 'Scanning Electron Microscopy', 'author': 'Levi-Setti', 'year': '1983'} / Scanning Electron Microscopy by Levi-Setti (1983)
10.1116/1.583293
2. Young R.J. , Cleaver J.R.A. , and Ahmed H. , Microelectron.Eng. (in press).
10.1016/0167-9317(88)90020-2
{'key': 'S1946427400361498_ref006', 'first-page': '691', 'volume': '87', 'author': 'Kirk', 'year': '1987', 'journal-title': 'Inst.Phys.Conf. Ser.'} / Inst.Phys.Conf. Ser. by Kirk (1987)

Dates

Type	When
Created	14 years, 5 months ago (March 5, 2011, 7:39 p.m.)
Deposited	4 years, 5 months ago (Feb. 24, 2021, 3:33 p.m.)
Indexed	2 months ago (June 19, 2025, 2:23 p.m.)
Issued	35 years, 7 months ago (Jan. 1, 1990)
Published	35 years, 7 months ago (Jan. 1, 1990)
Published Online	14 years, 6 months ago (Feb. 16, 2011)
Published Print	35 years, 7 months ago (Jan. 1, 1990)

Funders 0

None

BibTeX

@article{Young_1990, title={Fabrication of Planar and Cross-Sectional TEM Specimens Using a Focused Ion Beam}, volume={199}, ISSN={1946-4274}, url={http://dx.doi.org/10.1557/proc-199-205}, DOI={10.1557/proc-199-205}, journal={MRS Proceedings}, publisher={Springer Science and Business Media LLC}, author={Young, R. J. and Kirk, E. C. G. and Williams, D. A. and Ahmed, H.}, year={1990} }

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