DOI: 10.1557/proc-130-87. Measuring the Strength and Stiffness of Thin Film Materials by Mechanically Deflecting Cantilever Microbeams

Measuring the Strength and Stiffness of Thin Film Materials by Mechanically Deflecting Cantilever Microbeams

10.1557/proc-130-87

Crossref journal-article

Springer Science and Business Media LLC

MRS Proceedings (297)

Abstract

AbstractThe present authors recently introduced the mechanical deflection of cantilever microbeams as an experimental technique for measuring the strength and stiffness of thin films.[1] The technique utilizes conventional integrated circuit (IC) fabrication to process the samples, a Nanoindenter to deflect the cantilever beams mechanically, and simple elastic beam theory to analyze the data. This paper will review the technique and describe some of its current applications.

Bibliography

Weihs, T. P., Hong, S., Bravman, J. C., & Nix, W. D. (1988). Measuring the Strength and Stiffness of Thin Film Materials by Mechanically Deflecting Cantilever Microbeams. MRS Proceedings, 130.

Authors 4

T. P. Weihs (first)
S. Hong (additional)
J. C. Bravman (additional)
W. D. Nix (additional)

References 8 Referenced 20

{'key': 'S1946427400418920_ref003', 'first-page': '77', 'volume-title': 'Mechanical Metallurgy', 'author': 'Dieter', 'year': '1986'} / Mechanical Metallurgy by Dieter (1986)
10.1557/JMR.1986.0601
10.1016/0020-7683(88)90039-X
{'key': 'S1946427400418920_ref006', 'volume-title': 'Fall MRS Meeting', 'author': 'Pethica', 'year': '1988'} / Fall MRS Meeting by Pethica (1988)
10.1557/JMR.1988.0931
{'key': 'S1946427400418920_ref004', 'volume-title': 'Fall MRS Meeting', 'author': 'Farthing', 'year': '1988'} / Fall MRS Meeting by Farthing (1988)
{'key': 'S1946427400418920_ref005', 'volume-title': 'Fall MRS Meeting', 'author': 'Oliver', 'year': '1988'} / Fall MRS Meeting by Oliver (1988)
10.1063/1.1661935

Dates

Type	When
Created	14 years, 5 months ago (March 5, 2011, 9:01 p.m.)
Deposited	4 years, 5 months ago (Feb. 24, 2021, 3:32 p.m.)
Indexed	1 year, 6 months ago (Feb. 11, 2024, 4:56 a.m.)
Issued	37 years, 7 months ago (Jan. 1, 1988)
Published	37 years, 7 months ago (Jan. 1, 1988)
Published Online	14 years, 5 months ago (Feb. 22, 2011)
Published Print	37 years, 7 months ago (Jan. 1, 1988)

Funders 0

None

BibTeX

@article{Weihs_1988, title={Measuring the Strength and Stiffness of Thin Film Materials by Mechanically Deflecting Cantilever Microbeams}, volume={130}, ISSN={1946-4274}, url={http://dx.doi.org/10.1557/proc-130-87}, DOI={10.1557/proc-130-87}, journal={MRS Proceedings}, publisher={Springer Science and Business Media LLC}, author={Weihs, T. P. and Hong, S. and Bravman, J. C. and Nix, W. D.}, year={1988} }

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