DOI: 10.1557/proc-101-483. Focused Ion Beam Sims for Micromachining Applications

Focused Ion Beam Sims for Micromachining Applications

10.1557/proc-101-483

Crossref journal-article

Springer Science and Business Media LLC

MRS Proceedings (297)

Abstract

ABSTRACTA secondary ion mass spectrometry (SIMS) system has been incorporated into the AT&T-BL second generation focused ion beam (FIB) micromachining system. The primary applications are end-point detection and topographical element mapping. End-point detection of Cr micromachining on photomasks was done with raster sizes ranging from 10 μm x 10 μm to 3 μm x 3 μm. SIMS end-points, total ions images, and transmitted light measurements show that the ion-milling can be controlled to stop prior to or after the Cr/glass interface. Mass selected secondary ion images have been obtained for high yield ions such as52Cr+ and27 A1+ on raster fields of 25 μm in time intervals ranging from 20 to 100 sec. Al+ SIMS images of 1 μm lines and spaces from a VLSI test pattern have been obtained.

Bibliography

Harriott, L. R., & Vasile, M. J. (1987). Focused Ion Beam Sims for Micromachining Applications. MRS Proceedings, 101.

Authors 2

L. R. Harriott (first)
M. J. Vasile (additional)

References 8 Referenced 2

8 Comstock, Inc., Oak Ridge, TN
{'key': 'S1946427400533351_ref007', 'volume': '773', 'author': 'Harriott', 'year': '1987', 'journal-title': 'Proc. SPIE, Int. Soc. Opt. Eng.'} / Proc. SPIE, Int. Soc. Opt. Eng. by Harriott (1987)
{'key': 'S1946427400533351_ref005', 'first-page': '319', 'volume-title': 'Applied Materials Characterization', 'volume': '48', 'author': 'Kingham', 'year': '1985'} / Applied Materials Characterization by Kingham (1985)
10.1016/0169-4332(86)90067-X
{'key': 'S1946427400533351_ref002', 'first-page': '126', 'volume': '537', 'author': 'Prewett', 'year': '1985', 'journal-title': 'Proc. SPIE, Int. Soc. Opt. Eng.'} / Proc. SPIE, Int. Soc. Opt. Eng. by Prewett (1985)
{'key': 'S1946427400533351_ref001', 'first-page': '126', 'volume': '632', 'author': 'Parker', 'year': '1986', 'journal-title': 'Proc. SPIE, Int. Soc. Opt. Eng.'} / Proc. SPIE, Int. Soc. Opt. Eng. by Parker (1986)
10.1016/0168-583X(85)90299-X
10.1116/1.583937

Dates

Type	When
Created	14 years, 5 months ago (March 6, 2011, 5:13 a.m.)
Deposited	4 years, 6 months ago (Feb. 24, 2021, 4:03 p.m.)
Indexed	1 year, 10 months ago (Oct. 26, 2023, 10:57 p.m.)
Issued	38 years, 8 months ago (Jan. 1, 1987)
Published	38 years, 8 months ago (Jan. 1, 1987)
Published Online	14 years, 6 months ago (Feb. 26, 2011)
Published Print	38 years, 8 months ago (Jan. 1, 1987)

Funders 0

None

BibTeX

@article{Harriott_1987, title={Focused Ion Beam Sims for Micromachining Applications}, volume={101}, ISSN={1946-4274}, url={http://dx.doi.org/10.1557/proc-101-483}, DOI={10.1557/proc-101-483}, journal={MRS Proceedings}, publisher={Springer Science and Business Media LLC}, author={Harriott, L. R. and Vasile, M. J.}, year={1987} }

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