DOI: 10.1557/jmr.2004.0367. Contribution of substrate to converse piezoelectric response of constrained thin films

Contribution of substrate to converse piezoelectric response of constrained thin films

10.1557/jmr.2004.0367

Crossref journal-article

Springer Science and Business Media LLC

Journal of Materials Research (297)

Abstract

The converse piezoelectric response of a thin film constrained by a substrate is analyzed in different geometries under various boundary conditions. We considerthe effects of elastic deformation of the substrate on the total displacement of thefilm surface induced by the electric field. The change of film thickness and the bending curvature of a film/substrate couple are calculated. For a thin film island clamped on a large thick substrate, the theoretical estimation of the piezoresponse, including a local bending in the vicinity of the island/substrate interface, is in agreement with the finite element calculation.

Bibliography

Chen, L., Li, J.-H., Slutsker, J., Ouyang, J., & Roytburd, A. L. (2004). Contribution of substrate to converse piezoelectric response of constrained thin films. Journal of Materials Research, 19(10), 2853â2858.

Authors 5

Lang Chen (first)
J-H. Li (additional)
J. Slutsker (additional)
J. Ouyang (additional)
A.L. Roytburd (additional)

References 16 Referenced 33

10.1063/1.122914
10.1063/1.1288161
10.1063/1.1695641
10.1063/1.1516857
{'key': 'S0884291400086751_ref008', 'first-page': '3195', 'article-title': 'Thermodynamic theory of stress distribution in epitaxial Pb(Zr, Ti)O3 thin films.', 'volume': '75', 'author': 'Buhlman', 'year': '2002', 'journal-title': 'Appl. Phys. Lett.'} / Appl. Phys. Lett. / Thermodynamic theory of stress distribution in epitaxial Pb(Zr, Ti)O3 thin films. by Buhlman (2002)
10.1016/0022-5096(96)84548-0
10.1080/10584580108016924
10.1063/1.357693
10.1063/1.370771
{'key': 'S0884291400086751_ref003', 'first-page': '106', 'article-title': 'Measurement of the effective transverse piezoelectric coefficient', 'volume': '77', 'author': 'Dubois', 'year': '1999', 'journal-title': 'e 31,f of AlN and Pb(Zrx, Ti1-x )O3 thin films. Sens. Actuators A'} / e 31,f of AlN and Pb(Zrx, Ti1-x )O3 thin films. Sens. Actuators A / Measurement of the effective transverse piezoelectric coefficient by Dubois (1999)
10.1143/JJAP.38.5402
10.1063/1.1147000
10.1103/PhysRevLett.85.190
10.2320/matertrans.43.1023
{'key': 'S0884291400086751_ref013', 'first-page': '93', 'volume-title': 'Proceedings of the 11th IEEE ISAF 98,', 'author': 'Steinhausen', 'year': '1998'} / Proceedings of the 11th IEEE ISAF 98, by Steinhausen (1998)
10.1063/1.1558228

Dates

Type	When
Created	20 years, 3 months ago (May 6, 2005, 1:43 p.m.)
Deposited	4 years, 6 months ago (Feb. 24, 2021, 3:16 p.m.)
Indexed	1 year, 3 months ago (May 28, 2024, 9:29 p.m.)
Issued	20 years, 11 months ago (Oct. 1, 2004)
Published	20 years, 11 months ago (Oct. 1, 2004)
Published Online	20 years, 11 months ago (Oct. 1, 2004)

Funders 0

None

BibTeX

@article{Chen_2004, title={Contribution of substrate to converse piezoelectric response of constrained thin films}, volume={19}, ISSN={2044-5326}, url={http://dx.doi.org/10.1557/jmr.2004.0367}, DOI={10.1557/jmr.2004.0367}, number={10}, journal={Journal of Materials Research}, publisher={Springer Science and Business Media LLC}, author={Chen, Lang and Li, J-H. and Slutsker, J. and Ouyang, J. and Roytburd, A.L.}, year={2004}, month=oct, pages={2853–2858} }

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