DOI: 10.1557/jmr.2004.0164. Oxygen Permeability of Ferroelectric Thin Film Top Electrodes and Its Effect on Detectable Fatigue Cycling-Induced Oxygen Isotope Motion

Oxygen Permeability of Ferroelectric Thin Film Top Electrodes and Its Effect on Detectable Fatigue Cycling-Induced Oxygen Isotope Motion

10.1557/jmr.2004.0164

Crossref journal-article

Springer Science and Business Media LLC

Journal of Materials Research (297)

Abstract

We investigated the discrepancy between the significant 18O isotope motion observed after bipolar voltage cycling used to induce ferroelectric fatigue in unannealed Pt/Pb(Zr,Ti)O3/Ir (PZT) capacitors and the lack of any observable oxygen tracer motion in annealed capacitors. We found that while unannealed Pt electrodes are permeable to oxygen, annealed Pt electrodes are oxygen impermeable. Further, when the initial oxygen tracer profile does not vary strongly with depth, the ability to detect oxygen motion during fatigue voltage cycling depends critically on the oxygen permeability of the capacitor’s top electrode. Our results indicate that oxygen exchange between the PZT film and external oxygen sources and sinks during voltage cycling is not necessary for ferroelectric fatigue to be manifest. In addition, studies of the dependence of ferroelectric materials properties on ambient gases should be accompanied by analysis of the permeability of exposed surfaces to the gases of interest.

Bibliography

Schloss, L. F., Kim, H., & McIntyre, P. C. (2004). Oxygen Permeability of Ferroelectric Thin Film Top Electrodes and Its Effect on Detectable Fatigue Cycling-Induced Oxygen Isotope Motion. Journal of Materials Research, 19(4), 1265â1272.

Authors 3

Lawrence F. Schloss (first)
Hyoungsub Kim (additional)
Paul C. McIntyre (additional)

References 25 Referenced 6

10.1111/j.1151-2916.1991.tb07812.x
10.1016/S0921-5093(02)00084-9
10.1063/1.124703
10.1143/JJAP.36.1586
10.1143/JJAP.37.2007
{'key': 'S0884291400090919_ref019', 'first-page': '223', 'article-title': 'Appl. Phys. A Mater.', 'volume': 'A62', 'author': 'Schmiedl', 'year': '1996', 'journal-title': 'Sci. Proc.'} / Sci. Proc. / Appl. Phys. A Mater. by Schmiedl (1996)
10.1002/1099-0712(200005/10)10:3/5<145::AID-AMO416>3.0.CO;2-2
10.1063/1.1516628
10.1063/1.1421089
10.1063/1.350286
10.1063/1.1520718
10.1063/1.126786
10.1063/1.125938
10.1103/PhysRevLett.83.1231
{'key': 'S0884291400090919_ref003', 'volume': '57', 'author': 'Park', 'year': '1998', 'journal-title': 'Phys. Rev. B.'} / Phys. Rev. B. by Park (1998)
10.1002/pssa.2211330242
17 SIMS measurements were performed at Charles Evans & Associates, 810 Kifer Road, Sunnyvale, CA 94086.
10.1103/PhysRevLett.89.187601
{'key': 'S0884291400090919_ref014', 'first-page': '113', 'volume-title': 'Mater. Res. Soc. Symp. Proc.', 'volume': '688', 'author': 'McCormick', 'year': '2002'} / Mater. Res. Soc. Symp. Proc. by McCormick (2002)
10.1063/1.123251
{'key': 'S0884291400090919_ref023', 'first-page': '188', 'volume-title': 'Handbook of X-ray Photoelectron Spectroscopy', 'author': 'Moulder', 'year': '1992'} / Handbook of X-ray Photoelectron Spectroscopy by Moulder (1992)
10.1063/1.362600
10.1063/1.126739
10.1063/1.1509855
10.1111/j.1151-2916.1996.tb08736.x

Dates

Type	When
Created	20 years, 3 months ago (May 6, 2005, 1:53 p.m.)
Deposited	4 years, 5 months ago (Feb. 24, 2021, 3:15 p.m.)
Indexed	2 years ago (Aug. 1, 2023, 1:56 a.m.)
Issued	21 years, 4 months ago (April 1, 2004)
Published	21 years, 4 months ago (April 1, 2004)
Published Online	14 years, 5 months ago (March 3, 2011)
Published Print	21 years, 4 months ago (April 1, 2004)

Funders 0

None

BibTeX

@article{Schloss_2004, title={Oxygen Permeability of Ferroelectric Thin Film Top Electrodes and Its Effect on Detectable Fatigue Cycling-Induced Oxygen Isotope Motion}, volume={19}, ISSN={2044-5326}, url={http://dx.doi.org/10.1557/jmr.2004.0164}, DOI={10.1557/jmr.2004.0164}, number={4}, journal={Journal of Materials Research}, publisher={Springer Science and Business Media LLC}, author={Schloss, Lawrence F. and Kim, Hyoungsub and McIntyre, Paul C.}, year={2004}, month=apr, pages={1265–1272} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2023,
        8,
        1
      ]
    ],
    "date-time": "2023-08-01T05:56:11Z",
    "timestamp": 1690869371083
  },
  "reference-count": 25,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "4",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2011,
            3,
            3
          ]
        ],
        "date-time": "2011-03-03T00:00:00Z",
        "timestamp": 1299110400000
      },
      "content-version": "unspecified",
      "delay-in-days": 2527,
      "URL": "https://www.cambridge.org/core/terms"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2004,
        4
      ]
    ]
  },
  "abstract": "<jats:p>We investigated the discrepancy between the significant <jats:sup>18</jats:sup>O isotope motion observed after bipolar voltage cycling used to induce ferroelectric fatigue in unannealed Pt/Pb(Zr,Ti)O<jats:sub>3</jats:sub>/Ir (PZT) capacitors and the lack of any observable oxygen tracer motion in annealed capacitors. We found that while unannealed Pt electrodes are permeable to oxygen, annealed Pt electrodes are oxygen impermeable. Further, when the initial oxygen tracer profile does not vary strongly with depth, the ability to detect oxygen motion during fatigue voltage cycling depends critically on the oxygen permeability of the capacitor\u2019s top electrode. Our results indicate that oxygen exchange between the PZT film and external oxygen sources and sinks during voltage cycling is not necessary for ferroelectric fatigue to be manifest. In addition, studies of the dependence of ferroelectric materials properties on ambient gases should be accompanied by analysis of the permeability of exposed surfaces to the gases of interest.</jats:p>",
  "DOI": "10.1557/jmr.2004.0164",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2005,
        5,
        6
      ]
    ],
    "date-time": "2005-05-06T17:53:25Z",
    "timestamp": 1115402005000
  },
  "page": "1265-1272",
  "source": "Crossref",
  "is-referenced-by-count": 6,
  "title": "Oxygen Permeability of Ferroelectric Thin Film Top Electrodes and Its Effect on Detectable Fatigue Cycling-Induced Oxygen Isotope Motion",
  "prefix": "10.1557",
  "volume": "19",
  "author": [
    {
      "given": "Lawrence F.",
      "family": "Schloss",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Hyoungsub",
      "family": "Kim",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Paul C.",
      "family": "McIntyre",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "published-online": {
    "date-parts": [
      [
        2011,
        3,
        3
      ]
    ]
  },
  "reference": [
    {
      "key": "S0884291400090919_ref025",
      "doi-asserted-by": "publisher",
      "DOI": "10.1111/j.1151-2916.1991.tb07812.x"
    },
    {
      "key": "S0884291400090919_ref024",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/S0921-5093(02)00084-9"
    },
    {
      "key": "S0884291400090919_ref022",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.124703"
    },
    {
      "key": "S0884291400090919_ref021",
      "doi-asserted-by": "publisher",
      "DOI": "10.1143/JJAP.36.1586"
    },
    {
      "key": "S0884291400090919_ref020",
      "doi-asserted-by": "publisher",
      "DOI": "10.1143/JJAP.37.2007"
    },
    {
      "key": "S0884291400090919_ref019",
      "first-page": "223",
      "article-title": "Appl. Phys. A Mater.",
      "volume": "A62",
      "author": "Schmiedl",
      "year": "1996",
      "journal-title": "Sci. Proc."
    },
    {
      "key": "S0884291400090919_ref016",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/1099-0712(200005/10)10:3/5<145::AID-AMO416>3.0.CO;2-2"
    },
    {
      "key": "S0884291400090919_ref015",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1516628"
    },
    {
      "key": "S0884291400090919_ref012",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1421089"
    },
    {
      "key": "S0884291400090919_ref010",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.350286"
    },
    {
      "key": "S0884291400090919_ref009",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1520718"
    },
    {
      "key": "S0884291400090919_ref007",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.126786"
    },
    {
      "key": "S0884291400090919_ref005",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.125938"
    },
    {
      "key": "S0884291400090919_ref004",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevLett.83.1231"
    },
    {
      "key": "S0884291400090919_ref003",
      "volume": "57",
      "author": "Park",
      "year": "1998",
      "journal-title": "Phys. Rev. B."
    },
    {
      "key": "S0884291400090919_ref001",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/pssa.2211330242"
    },
    {
      "key": "S0884291400090919_ref017",
      "unstructured": "17 SIMS measurements were performed at Charles Evans & Associates, 810 Kifer Road, Sunnyvale, CA 94086."
    },
    {
      "key": "S0884291400090919_ref008",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevLett.89.187601"
    },
    {
      "key": "S0884291400090919_ref014",
      "first-page": "113",
      "volume-title": "Mater. Res. Soc. Symp. Proc.",
      "volume": "688",
      "author": "McCormick",
      "year": "2002"
    },
    {
      "key": "S0884291400090919_ref013",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.123251"
    },
    {
      "key": "S0884291400090919_ref023",
      "first-page": "188",
      "volume-title": "Handbook of X-ray Photoelectron Spectroscopy",
      "author": "Moulder",
      "year": "1992"
    },
    {
      "key": "S0884291400090919_ref002",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.362600"
    },
    {
      "key": "S0884291400090919_ref006",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.126739"
    },
    {
      "key": "S0884291400090919_ref018",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1509855"
    },
    {
      "key": "S0884291400090919_ref011",
      "doi-asserted-by": "publisher",
      "DOI": "10.1111/j.1151-2916.1996.tb08736.x"
    }
  ],
  "container-title": "Journal of Materials Research",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S0884291400090919",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2021,
        2,
        24
      ]
    ],
    "date-time": "2021-02-24T20:15:37Z",
    "timestamp": 1614197737000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "http://link.springer.com/10.1557/JMR.2004.0164"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2004,
        4
      ]
    ]
  },
  "references-count": 25,
  "journal-issue": {
    "issue": "4",
    "published-print": {
      "date-parts": [
        [
          2004,
          4
        ]
      ]
    }
  },
  "alternative-id": [
    "S0884291400090919"
  ],
  "URL": "http://dx.doi.org/10.1557/JMR.2004.0164",
  "relation": {},
  "ISSN": [
    "0884-2914",
    "2044-5326"
  ],
  "subject": [],
  "container-title-short": "J. Mater. Res.",
  "published": {
    "date-parts": [
      [
        2004,
        4
      ]
    ]
  }
}