Abstract
Single-point diamond turning tests were carried out in two different [001]-oriented semiconductors, InSb and Si single crystals. The analysis of the conditions in which the machining is in ductile or brittle mode indicates that the plasticity presented by semiconductor crystals during micromachining can be correlated to the value of the transition pressure. It is shown that the ductility presented by different semiconductor single crystals is inversely related to the transition pressure value of the material.
References
23
Referenced
13
- 23. Handbook of Chemestry and Physics, 76th ed., edited by David R. Lide (CRC Press, Boca Raton, FL, 1995–1996).
10.1557/JMR.1992.0535
10.1080/01418619408242212
10.1063/1.117346
10.1557/JMR.1991.1129
10.1002/pssa.2210140121
10.1103/PhysRevB.34.4679
10.1063/1.327714
10.1063/1.111949
10.1111/j.1151-2916.1990.tb05142.x
10.1557/JMR.1994.2907
10.1063/1.112633
{'key': 'S0884291400055837_ref020', 'first-page': '140', 'volume-title': 'Proceedings of the 13th Annual Meeting of the American Society for Precision Engineering', 'volume': '18', 'author': 'Jasinevicius', 'year': '1998'}
/ Proceedings of the 13th Annual Meeting of the American Society for Precision Engineering by Jasinevicius (1998)10.1103/PhysRevLett.69.320
10.1126/science.139.3556.762
10.1103/PhysRevB.35.1174
10.1038/357645a0
10.1557/JMR.1992.1614
10.1111/j.1151-2916.1995.tb08612.x
10.1103/PhysRevLett.60.2156
10.1080/01418618308234914
10.1038/271732a0
10.1016/0022-3697(62)90085-9
Dates
Type | When |
---|---|
Created | 17 years, 5 months ago (March 5, 2008, 9:37 p.m.) |
Deposited | 4 years, 6 months ago (Feb. 24, 2021, 5:17 p.m.) |
Indexed | 1 year, 6 months ago (Feb. 3, 2024, 3:44 p.m.) |
Issued | 25 years ago (Aug. 1, 2000) |
Published | 25 years ago (Aug. 1, 2000) |
Published Online | 14 years, 6 months ago (Jan. 31, 2011) |
Published Print | 25 years ago (Aug. 1, 2000) |
@article{Jasinevicius_2000, title={Brittle to Ductile Transition Dependence upon the Transition Pressure Value of Semiconductors in Micromachining}, volume={15}, ISSN={2044-5326}, url={http://dx.doi.org/10.1557/jmr.2000.0243}, DOI={10.1557/jmr.2000.0243}, number={8}, journal={Journal of Materials Research}, publisher={Springer Science and Business Media LLC}, author={Jasinevicius, Renato G. and Pizani, Paulo S. and Duduch, Jaime G.}, year={2000}, month=aug, pages={1688–1692} }