DOI: 10.1557/jmr.1996.0321. Processing and characterization of Pb(Zr, Ti)O<sub>3</sub>films, up to 10 μm thick, produced from a diol sol-gel route

Processing and characterization of Pb(Zr, Ti)O3films, up to 10 μm thick, produced from a diol sol-gel route

10.1557/jmr.1996.0321

Crossref journal-article

Springer Science and Business Media LLC

Journal of Materials Research (297)

Abstract

A recently developed diol sol-gel route has been modified in order to produce multilayer PbZr0.53Ti0.47O3films on platinized sapphire substrates. Up to 20 depositions of a 1.1 M sol were carried out leading to a final film thickness of 10 μm. A similar thickness could be achieved from 12 coatings of a more concentrated 1.6 M sol. Decomposition and crystallization of the multilayer coatings were performed using a two-stage prefiring sequence, at 350 °C and 600 °C, followed by a final firing step at 700 °C. Ferroelectric remanant polarization increased with increasing film thickness to a value of 40 μC cm−2for a 10 μm film, with a corresponding coercive field of 30 kV cm−1; the relative permittivity of this film was ∼1000 and the dissipation factor 0.04. The thickness dependence of relative permittivity could be modeled on a simple series capacitor circuit representing the ferroelectric Pb(Zr, Ti)O3(PZT) film and low-permittivity interface layers; but other possible contributory factors are also discussed.

Bibliography

Tu, Y. L., & Milne, S. J. (1996). Processing and characterization of Pb(Zr, Ti)O3films, up to 10 Î¼m thick, produced from a diol sol-gel route. Journal of Materials Research, 11(10), 2556â2564.

Authors 2

Y. L. Tu (first)
S. J. Milne (additional)

References 34 Referenced 70

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Dates

Type	When
Created	17 years, 6 months ago (March 5, 2008, 8:55 p.m.)
Deposited	2 years, 3 months ago (May 16, 2023, 5:25 p.m.)
Indexed	1 month, 4 weeks ago (July 7, 2025, 9:07 a.m.)
Issued	28 years, 11 months ago (Oct. 1, 1996)
Published	28 years, 11 months ago (Oct. 1, 1996)
Published Online	14 years, 7 months ago (Jan. 31, 2011)
Published Print	28 years, 11 months ago (Oct. 1, 1996)

Funders 0

None

BibTeX

@article{Tu_1996, title={Processing and characterization of Pb(Zr, Ti)O3films, up to 10 μm thick, produced from a diol sol-gel route}, volume={11}, ISSN={2044-5326}, url={http://dx.doi.org/10.1557/jmr.1996.0321}, DOI={10.1557/jmr.1996.0321}, number={10}, journal={Journal of Materials Research}, publisher={Springer Science and Business Media LLC}, author={Tu, Y. L. and Milne, S. J.}, year={1996}, month=oct, pages={2556–2564} }

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