DOI: 10.1557/jmr.1995.2996. Patterning of dielectric oxide thin layers by microcontact printing of self-assembled monolayers

Patterning of dielectric oxide thin layers by microcontact printing of self-assembled monolayers

10.1557/jmr.1995.2996

Crossref journal-article

Springer Science and Business Media LLC

Journal of Materials Research (297)

Abstract

This communication describes a technique used to pattern oxide thin layers using microcontact printing (μCP) and sol-gel deposition. The technique involves μCP of self-assembled monolayers (SAM's) of alkylsiloxane on various substrates (SiO2/Si, sapphire, ITO, and glass), followed by deposition of oxide thin layers from sol-gel precursors. Delamination of oxide layers from SAM-derivatized regions allows selective deposition of crystalline dielectric oxide layers on underivatized regions. To demonstrate the viability of this technique for integrated microelectronics and optics applications, patterned (Pb,La)TiO3 (PLT) and LiNbO3 layers were deposited on sapphire, silicon, and indium tin oxide (ITO) substrates. Use of lattice-matched substrates allows lithography-free deposition of patterned heteroepitaxial oxide layers. Strip waveguides of heteroepitaxial LiNbO3 with 4 μm lateral dimensions were fabricated on sapphire. Dielectric measurements for patterned PLT thin layers on ITO are also reported.

Bibliography

Jeon, N. L., Clem, P. G., Nuzzo, R. G., & Payne, D. A. (1995). Patterning of dielectric oxide thin layers by microcontact printing of self-assembled monolayers. Journal of Materials Research, 10(12), 2996â2999.

Authors 4

N.L. Jeon (first)
P.G. Clem (additional)
R.G. Nuzzo (additional)
D.A. Payne (additional)

References 11 Referenced 86

10.1021/la00008a029
10.1063/1.93615
10.1002/adma.19940060719
10.1021/la00017a030
10.1007/BF00639300
4 Xia Y. , Mrksich M. , and Whitesides G.M. , unpublished.
10.1021/ic00333a003
10.1063/1.110628
10.1063/1.112783
10The Si substrates used were p-type, (100) orientation, with 20–25 A native oxide.
{'key': 'S0884291400080262_ref008', 'volume-title': 'Ferroelectric Thin Films IV', 'volume': '361', 'author': 'Clem', 'year': '1995'} / Ferroelectric Thin Films IV by Clem (1995)

Dates

Type	When
Created	17 years, 10 months ago (Sept. 27, 2007, 8:27 a.m.)
Deposited	4 years, 6 months ago (Feb. 24, 2021, 4:58 p.m.)
Indexed	2 months, 2 weeks ago (June 6, 2025, 5:47 a.m.)
Issued	29 years, 8 months ago (Dec. 1, 1995)
Published	29 years, 8 months ago (Dec. 1, 1995)
Published Online	14 years, 5 months ago (March 3, 2011)
Published Print	29 years, 8 months ago (Dec. 1, 1995)

Funders 0

None

BibTeX

@article{Jeon_1995, title={Patterning of dielectric oxide thin layers by microcontact printing of self-assembled monolayers}, volume={10}, ISSN={2044-5326}, url={http://dx.doi.org/10.1557/jmr.1995.2996}, DOI={10.1557/jmr.1995.2996}, number={12}, journal={Journal of Materials Research}, publisher={Springer Science and Business Media LLC}, author={Jeon, N.L. and Clem, P.G. and Nuzzo, R.G. and Payne, D.A.}, year={1995}, month=dec, pages={2996–2999} }

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