Abstract
Self-assembled monolayers (SAMs) bearing sulfonate (-SO3H) surface functional groups, on single-crystal Si wafers, were used as substrates for the deposition of TiO2 thin films from aqueous solutions. Polycrystalline TiO2 thin films over 50 nm thick formed in 2 h by hydrolysis of TiCl4 in aqueous HCI solutions at 80 °C. The films were pore-free, showed excellent adherence and uniformity, and consisted of anatase crystallites 2–4 nm in diameter. Annealing at temperatures up to 600 °C caused coarsening of the anatase grains, but no loss of adherence or structural integrity.
References
37
Referenced
130
10.1016/0921-5107(92)90132-S
- 35Can be estimated as 8 nm {=(Dt)½, using D = 1 X 10-16 cm2 s-1 as the diffusion coefficient of oxygen in Si at 600 °C. [E. A. Irene, J. Electrochem. Soc. 129, 413 (1982).]}
10.1016/S0040-4039(00)80820-5
10.1021/la00058a043
10.1007/978-1-4615-9597-7
10.1021/la00031a023
/ Langmuir by Le (1993)10.1557/JMR.1991.2417
10.1016/0021-9797(77)90393-9
{'key': 'S0884291400077323_ref026', 'first-page': '51', 'volume-title': 'Materials Synthesis Utilizing Biological Processes', 'volume': '174', 'author': 'Tarasevich', 'year': '1990'}
/ Materials Synthesis Utilizing Biological Processes by Tarasevich (1990)10.1149/1.2404316
10.1016/0040-6090(83)90433-9
10.1111/j.1151-2916.1992.tb05554.x
10.1109/PROC.1964.3430
10.1063/1.335546
{'key': 'S0884291400077323_ref036', 'first-page': '789', 'volume': '12', 'author': 'Nabivanets', 'year': '1967', 'journal-title': 'Russ. J. Inorg. Chem.'}
/ Russ. J. Inorg. Chem. by Nabivanets (1967)10.1557/JMR.1995.0699
{'key': 'S0884291400077323_ref009', 'first-page': '860', 'volume': '68', 'author': 'Ketron', 'year': '1989', 'journal-title': 'Bull. Am. Ceram. Soc.'}
/ Bull. Am. Ceram. Soc. by Ketron (1989)10.1063/1.343093
10.1364/AO.18.003133
10.1143/JJAP.25.1288
10.1016/0040-6090(89)90627-5
10.1016/0921-5107(89)90202-X
10.1063/1.342856
10.1149/1.2095566
10.1149/1.2086561
10.1016/0040-6090(83)90136-0
10.1116/1.572220
10.1016/0022-0248(76)90228-1
{'key': 'S0884291400077323_ref018', 'first-page': '343', 'volume-title': 'Chemical Vapor Deposition of Refractory Metals and Ceramics', 'volume': '168', 'author': 'Chang', 'year': '1990'}
/ Chemical Vapor Deposition of Refractory Metals and Ceramics by Chang (1990)10.1143/JJAP.25.1288
10.1126/science.1546311
10.1557/S0883769400046455
10.1007/BF01106796
10.1126/science.264.5155.48
- 33 Collins R. J. and Sukenik C. N. , unpublished.
{'key': 'S0884291400077323_ref034', 'volume-title': 'Handbook for X-ray Photoelectron Spectroscopy', 'author': 'Wagner', 'year': '1978'}
/ Handbook for X-ray Photoelectron Spectroscopy by Wagner (1978)10.1126/science.261.5126.1286
Dates
Type | When |
---|---|
Created | 17 years, 11 months ago (Sept. 27, 2007, 8:23 a.m.) |
Deposited | 4 years, 6 months ago (Feb. 24, 2021, 4:54 p.m.) |
Indexed | 2 weeks, 1 day ago (Aug. 12, 2025, 5:40 p.m.) |
Issued | 30 years, 5 months ago (March 1, 1995) |
Published | 30 years, 5 months ago (March 1, 1995) |
Published Online | 14 years, 5 months ago (March 3, 2011) |
Published Print | 30 years, 5 months ago (March 1, 1995) |
@article{Shin_1995, title={Synthesis and characterization of TiO2 thin films on organic self-assembled monolayers: Part I. Film formation from aqueous solutions}, volume={10}, ISSN={2044-5326}, url={http://dx.doi.org/10.1557/jmr.1995.0692}, DOI={10.1557/jmr.1995.0692}, number={3}, journal={Journal of Materials Research}, publisher={Springer Science and Business Media LLC}, author={Shin, H. and Collins, R.J. and De Guire, M.R. and Heuer, A.H. and Sukenik, C.N.}, year={1995}, month=mar, pages={692–698} }