DOI: 10.1557/jmr.1988.0931. Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films

Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films

10.1557/jmr.1988.0931

Crossref journal-article

Springer Science and Business Media LLC

Journal of Materials Research (297)

Abstract

The mechanical deflection of cantilever microbeams is presented as a new technique for testing the mechanical properties of thin films. Single-layer microbeams of Au and SiO2have been fabricated using conventional silicon micromachining techniques. Typical thickness, width, and length dimensions of the beams are 1.0,20, and 30 μm, respectively. The beams are mechanically deflected by a Nanoindenter, a submicron indentation instrument that continuously monitors load and deflection. Using simple beam theory and the load-deflection data, the Young's moduli and the yield strengths of thin-film materials that comprise the beams are determined. The measured mechanical properties are compared to those obtained by indenting similar thin films supported by their substrate.

Bibliography

Weihs, T. P., Hong, S., Bravman, J. C., & Nix, W. D. (1988). Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films. Journal of Materials Research, 3(5), 931â942.

Authors 4

T. P. Weihs (first)
S. Hong (additional)
J. C. Bravman (additional)
W. D. Nix (additional)

References 20 Referenced 334

{'key': 'S0884291400003319_ref019', 'first-page': '607', 'volume': '230', 'author': 'Nakada', 'year': '1964', 'journal-title': 'Trans. AIME'} / Trans. AIME by Nakada (1964)
{'key': 'S0884291400003319_ref018', 'first-page': '738', 'volume-title': 'Metals Handbook, Properties and Selection of Metals', 'volume': '2', 'year': '1980'} / Metals Handbook, Properties and Selection of Metals (1980)
{'key': 'S0884291400003319_ref016', 'first-page': '112', 'volume-title': 'The Elastic Constants of Crystals', 'author': 'Huntington', 'year': '1985'} / The Elastic Constants of Crystals by Huntington (1985)
10.1179/095066061790425893 / Metall. Rev. by Kosterand (1961)
10.1016/0040-6090(86)90351-2
{'key': 'S0884291400003319_ref010', 'first-page': '179', 'volume-title': 'Mechanics of Materials', 'author': 'Timoshenko', 'year': '1972'} / Mechanics of Materials by Timoshenko (1972)
10.1063/1.1735751
17 Bhattacharya A. and Nix W. D. , Int. J. Solids Struct, (submitted for publication).
{'key': 'S0884291400003319_ref020', 'first-page': '167', 'volume-title': 'Theory of Plates and Shells', 'author': 'Timoshenko', 'year': '1940'} / Theory of Plates and Shells by Timoshenko (1940)
{'key': 'S0884291400003319_ref014', 'first-page': 'F', 'volume-title': 'CRC of Chemistry and Physics', 'author': 'Weast', 'year': '1985'} / CRC of Chemistry and Physics by Weast (1985)
{'key': 'S0884291400003319_ref008', 'first-page': '1769', 'volume': '2', 'author': 'Hoffman', 'year': '1977', 'journal-title': 'Proc. 7th Int. Vacuum Congr., Vienna'} / Proc. 7th Int. Vacuum Congr., Vienna by Hoffman (1977)
10.1080/01418618308234914
{'key': 'S0884291400003319_ref003', 'first-page': '935', 'volume-title': 'Transactions of the 8th National Vacuum Symposium', 'author': 'Finegan', 'year': '1961'} / Transactions of the 8th National Vacuum Symposium by Finegan (1961)
10.1016/0040-6090(78)90337-1
10.1063/1.1708831
10.1103/PhysRev.100.1657
10.1557/JMR.1986.0601
10.1063/1.332083
10.1109/IRPS.1982.361940
10.1063/1.325870

Dates

Type	When
Created	17 years, 10 months ago (Sept. 27, 2007, 5:32 a.m.)
Deposited	3 years, 11 months ago (Aug. 24, 2021, 8:07 a.m.)
Indexed	2 weeks, 1 day ago (Aug. 6, 2025, 9:25 a.m.)
Issued	36 years, 10 months ago (Oct. 1, 1988)
Published	36 years, 10 months ago (Oct. 1, 1988)
Published Online	14 years, 6 months ago (Jan. 31, 2011)
Published Print	36 years, 10 months ago (Oct. 1, 1988)

Funders 0

None

BibTeX

@article{Weihs_1988, title={Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films}, volume={3}, ISSN={2044-5326}, url={http://dx.doi.org/10.1557/jmr.1988.0931}, DOI={10.1557/jmr.1988.0931}, number={5}, journal={Journal of Materials Research}, publisher={Springer Science and Business Media LLC}, author={Weihs, T. P. and Hong, S. and Bravman, J. C. and Nix, W. D.}, year={1988}, month=oct, pages={931–942} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        6
      ]
    ],
    "date-time": "2025-08-06T13:25:06Z",
    "timestamp": 1754486706860
  },
  "reference-count": 20,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "5",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2011,
            1,
            31
          ]
        ],
        "date-time": "2011-01-31T00:00:00Z",
        "timestamp": 1296432000000
      },
      "content-version": "unspecified",
      "delay-in-days": 8157,
      "URL": "https://www.cambridge.org/core/terms"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1988,
        10
      ]
    ]
  },
  "abstract": "<jats:p>The mechanical deflection of cantilever microbeams is presented as a new technique for testing the mechanical properties of thin films. Single-layer microbeams of Au and SiO<jats:sub>2</jats:sub>have been fabricated using conventional silicon micromachining techniques. Typical thickness, width, and length dimensions of the beams are 1.0,20, and 30 \u03bcm, respectively. The beams are mechanically deflected by a Nanoindenter, a submicron indentation instrument that continuously monitors load and deflection. Using simple beam theory and the load-deflection data, the Young's moduli and the yield strengths of thin-film materials that comprise the beams are determined. The measured mechanical properties are compared to those obtained by indenting similar thin films supported by their substrate.</jats:p>",
  "DOI": "10.1557/jmr.1988.0931",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2007,
        9,
        27
      ]
    ],
    "date-time": "2007-09-27T09:32:52Z",
    "timestamp": 1190885572000
  },
  "page": "931-942",
  "source": "Crossref",
  "is-referenced-by-count": 334,
  "title": "Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films",
  "prefix": "10.1557",
  "volume": "3",
  "author": [
    {
      "given": "T. P.",
      "family": "Weihs",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "S.",
      "family": "Hong",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "J. C.",
      "family": "Bravman",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "W. D.",
      "family": "Nix",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "published-online": {
    "date-parts": [
      [
        2011,
        1,
        31
      ]
    ]
  },
  "reference": [
    {
      "key": "S0884291400003319_ref019",
      "first-page": "607",
      "volume": "230",
      "author": "Nakada",
      "year": "1964",
      "journal-title": "Trans. AIME"
    },
    {
      "key": "S0884291400003319_ref018",
      "first-page": "738",
      "volume-title": "Metals Handbook, Properties and Selection of Metals",
      "volume": "2",
      "year": "1980"
    },
    {
      "key": "S0884291400003319_ref016",
      "first-page": "112",
      "volume-title": "The Elastic Constants of Crystals",
      "author": "Huntington",
      "year": "1985"
    },
    {
      "key": "S0884291400003319_ref015",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1179/095066061790425893",
      "volume": "6",
      "author": "Kosterand",
      "year": "1961",
      "journal-title": "Metall. Rev."
    },
    {
      "key": "S0884291400003319_ref013",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0040-6090(86)90351-2"
    },
    {
      "key": "S0884291400003319_ref010",
      "first-page": "179",
      "volume-title": "Mechanics of Materials",
      "author": "Timoshenko",
      "year": "1972"
    },
    {
      "key": "S0884291400003319_ref012",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1735751"
    },
    {
      "key": "S0884291400003319_ref017",
      "unstructured": "17 Bhattacharya A. and Nix W. D. , Int. J. Solids Struct, (submitted for publication)."
    },
    {
      "key": "S0884291400003319_ref020",
      "first-page": "167",
      "volume-title": "Theory of Plates and Shells",
      "author": "Timoshenko",
      "year": "1940"
    },
    {
      "key": "S0884291400003319_ref014",
      "first-page": "F",
      "volume-title": "CRC of Chemistry and Physics",
      "author": "Weast",
      "year": "1985"
    },
    {
      "key": "S0884291400003319_ref008",
      "first-page": "1769",
      "volume": "2",
      "author": "Hoffman",
      "year": "1977",
      "journal-title": "Proc. 7th Int. Vacuum Congr., Vienna"
    },
    {
      "key": "S0884291400003319_ref002",
      "doi-asserted-by": "publisher",
      "DOI": "10.1080/01418618308234914"
    },
    {
      "key": "S0884291400003319_ref003",
      "first-page": "935",
      "volume-title": "Transactions of the 8th National Vacuum Symposium",
      "author": "Finegan",
      "year": "1961"
    },
    {
      "key": "S0884291400003319_ref004",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0040-6090(78)90337-1"
    },
    {
      "key": "S0884291400003319_ref011",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1708831"
    },
    {
      "key": "S0884291400003319_ref006",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRev.100.1657"
    },
    {
      "key": "S0884291400003319_ref001",
      "doi-asserted-by": "publisher",
      "DOI": "10.1557/JMR.1986.0601"
    },
    {
      "key": "S0884291400003319_ref007",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.332083"
    },
    {
      "key": "S0884291400003319_ref005",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/IRPS.1982.361940"
    },
    {
      "key": "S0884291400003319_ref009",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.325870"
    }
  ],
  "container-title": "Journal of Materials Research",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S0884291400003319",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2021,
        8,
        24
      ]
    ],
    "date-time": "2021-08-24T12:07:30Z",
    "timestamp": 1629806850000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "http://link.springer.com/10.1557/JMR.1988.0931"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1988,
        10
      ]
    ]
  },
  "references-count": 20,
  "journal-issue": {
    "issue": "5",
    "published-print": {
      "date-parts": [
        [
          1988,
          10
        ]
      ]
    }
  },
  "alternative-id": [
    "S0884291400003319"
  ],
  "URL": "http://dx.doi.org/10.1557/JMR.1988.0931",
  "relation": {},
  "ISSN": [
    "0884-2914",
    "2044-5326"
  ],
  "subject": [],
  "container-title-short": "J. Mater. Res.",
  "published": {
    "date-parts": [
      [
        1988,
        10
      ]
    ]
  }
}