DOI: 10.1520/stp10981s. Direct Tension and Fracture Toughness Testing Using the Lateral Force Capabilities of a Nanomechanical Test System

Direct Tension and Fracture Toughness Testing Using the Lateral Force Capabilities of a Nanomechanical Test System

10.1520/stp10981s

Crossref book-chapter

ASTM International100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959

Mechanical Properties of Structural Films (381)

Abstract

The behavior of MEMS devices is limited by the strength of critical features such as thin ligaments, oxide cuts joining layers, pin joints, and hinges. Polysilicon devices fabricated at Sandia's Microelectronic Development Laboratory as well as single layer amorphous diamond MEMS structures have been successfully tested to investigate these features. A series of measurements was performed on 2.5 μm thick, 1.8 μm wide samples with gage lengths of 15 to 1000 μm. Conventional samples, notched samples, as well as samples that include the critical features of standard components in the test section were tested.

Bibliography

LaVan, D., Jackson, K., McKenzie, B., Glass, S., Friedmann, T., Sullivan, J., & Buchheit, T. (2001). Direct Tension and Fracture Toughness Testing Using the Lateral Force Capabilities of a Nanomechanical Test System. Mechanical Properties of Structural Films, 62â71.

Authors 7

DA LaVan (first)
K Jackson (additional)
B McKenzie (additional)
SJ Glass (additional)
TA Friedmann (additional)
JP Sullivan (additional)
TE Buchheit (additional)

References 17 Referenced 6

Connally, J. A. and Brown, S. B., “Slow Crack Growth In Single-Crystal Silicon,” Science 0036-8075, 12061992, Vol. 256, No. 5063, pp.1537–1539. (10.1126/science.256.5063.1537)
Koskinen J., Steinwall, J. E., Soave, R., and Johnson, H. H., “Microtensile Testing of Free-Standing Polysilicon Fibers of Various Grain Sizes,” Journal of Micromechanics & Microengineering, 031993, Vol. 3, No.1, pp.13–17. (10.1088/0960-1317/3/1/004)
Read D. T. and Marshall, J. C., “Measurements of Fracture Strength and Young's Modulus of Surface-Micromachined Polysilicon,” SPIE Proceedings 0277-786X, 1996, Vol. 2880, pp. 56–63. (10.1117/12.250967)
Tsuchiya T., Tabata, O., Sakata, J., and Taga, Y., “Tensile Testing of Polycrystalline Silicon Thin Films Using Electrostatic Force Grip,” Transactions of the Institute of Electrical Engineers of Japan, Part A, 121996, Vol.116-E, No. 10, pp. 441–446. (10.1541/ieejsmas.116.441)
Sharpe, , W. N. Jr., Yuan, B., and Edwards, R. L., “Fracture Tests of Polysilicon Film,” Thin-Films — Stresses and Mechanical Properties VII. MRS Proceedings, Warrendale, PA, 1998, pp. 51–56. (10.1557/PROC-505-51)
Greek, S. and Ericson, F., “Young's Modulus, Yield Strength and Fracture Strength of Microelements Determined By Tensile Testing,” Microelectromechanical Structures for Materials Research, MRS Proceedings, Warrendale, PA, 1998, Vol. 518, pp. 51–56. (10.1557/PROC-518-51)
Intelligent Micromachine Initiative, Sandia National Laboratories, available online, http://www.mdl.sandia.gov/Micromachine, 2000.
Sniegowski, J. J. and de Boer, M. P., “IC-Compatible Polysilicon Surface Micromachining,” Annual Review of Material Science 0084-6600, No. 30, 2000, pp. 299–333. (10.1146/annurev.matsci.30.1.299)
Friedmann, T. A., Sullivan, J. P., Knapp, J. A., Tallant, D. R., Follstaedt, D. M., Medlin, D. L., and Mirkarimi, P. B., “Thick Stress-Free Amorphous-Tetrahedral Carbon Films With Hardness Near That of Diamond,” Applied Physics Letters 0003-695110.1063/1.120515, Vol. 71, No. 26, 29121997, pp. 3820–3822. (10.1063/1.120515)
LaVan, D. A., Hohlfelder, R., Sullivan, J. P., Friedmann, T. A., Mitchell, M. A., and Ashby, C. I. H., “Tensile Properties of Amorphous Diamond Films,” Symposium U Amorphous and Nanostructured Carbon, Proceedings of the 1999 MRS Fall Meeting, 1–3 Dec. 1999, Boston, MA. (10.1557/PROC-594-295)
Weibull, W., “A Statistical Theory of the Strength of Materials,” Proceedings, Royal Swedish Institute Engineering Research, No. 151, 1939, pp. 1–45.
Sullivan, J. D. and Lauzon, P. H., “Experimental Probability Estimators for Weibull Plots,” Journal of Material Science Letters 0261-8028, Vol. 5, 1986, pp. 1245–1247. (10.1007/BF01729379)
{'key': '2025062515140392400_p62_c13', 'volume-title': 'Fracture Mechanics Fundamentals and Applications', 'author': 'Anderson', 'year': '1995', 'edition': '2nd ed.'} / Fracture Mechanics Fundamentals and Applications by Anderson (1995)
{'key': '2025062515140392400_p62_c14', 'volume-title': 'Deformation and Fracture Mechanics of Engineering Materials', 'author': 'Hertzberg', 'year': '1983', 'edition': '2nd ed.'} / Deformation and Fracture Mechanics of Engineering Materials by Hertzberg (1983)
Sharpe, W. N., Yuan, B., and Edwards, R. L., “Fracture Tests of Polysilicon Film,” MRS Symposium, Proceedings, Boston, MA, 121997, Vol. 505, pp. 51–56. (10.1557/PROC-505-51)
Kahn, H., Tayebi, N., Ballarini, R., Mullen, R. L., and Heuer, A. H., “Fracture Toughness of Polysilicon Mems Devices,” Sensors and Actuators 0250-6874, 2000, Vol. 82, pp. 274–280. (10.1016/S0924-4247(99)00366-0)
Adams, B. L., Wright, S. I., and Kunze, K., “Orientation Imaging: The Emergence of a New Microscopy,” Metallurgie Transactions, A, 1993, Vol. 24A, No. 4, p. 819. (10.1007/BF02656503)

Dates

Type	When
Created	17 years, 4 months ago (April 18, 2008, 2:09 p.m.)
Deposited	1 month, 4 weeks ago (June 25, 2025, 3:22 p.m.)
Indexed	1 month, 4 weeks ago (June 26, 2025, 12:09 a.m.)
Issued	24 years, 7 months ago (Jan. 1, 2001)
Published	24 years, 7 months ago (Jan. 1, 2001)
Published Print	24 years, 7 months ago (Jan. 1, 2001)

Funders 0

None

BibTeX

@inbook{LaVan_2001, title={Direct Tension and Fracture Toughness Testing Using the Lateral Force Capabilities of a Nanomechanical Test System}, ISBN={9780803154582}, url={http://dx.doi.org/10.1520/stp10981s}, DOI={10.1520/stp10981s}, booktitle={Mechanical Properties of Structural Films}, publisher={ASTM International100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959}, author={LaVan, DA and Jackson, K and McKenzie, B and Glass, SJ and Friedmann, TA and Sullivan, JP and Buchheit, TE}, year={2001}, month=jan, pages={62–71} }

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