DOI: 10.1366/000370274774332849. Sputtering Studies Using the Matrix Isolation Technique

Sputtering Studies Using the Matrix Isolation Technique

10.1366/000370274774332849

Crossref journal-article

SAGE Publications

Applied Spectroscopy (179)

Abstract

The application of the matrix isolation technique to the study of the sputtering process is reported. Equations are derived which relate the experimentally measured absorbance data to the sputtering yield. These equations are applied to data from the sputtering of Nb metal by 50 keV rare gas ions. Relative sputtering yields obtained in this manner are in good agreement with sputtering yields obtained by weight loss measurements. The potential of the technique for studies of both physical and chemical sputtering and for the determination of oscillator strengths is discussed.

Bibliography

Green, D. W., Gruen, D. M., Schreiner, F., & Lerner, J. L. (1974). Sputtering Studies Using the Matrix Isolation Technique. Applied Spectroscopy, 28(1), 34â38.

Authors 4

David W. Green (first)
Dieter M. Gruen (additional)
Felix Schreiner (additional)
Jerome L. Lerner (additional)

References 16 Referenced 7

10.1007/978-1-4613-4595-4
{'volume-title': 'Ion Bombardment of Solids', 'year': '1968', 'author': 'Carter G.', 'key': 'bibr2-000370274774332849'} / Ion Bombardment of Solids by Carter G. (1968)
10.1007/978-3-642-46025-8
{'volume-title': 'Fifth American Isotope Separator Conference', 'year': '1972', 'author': 'Green D. W.', 'key': 'bibr4-000370274774332849'} / Fifth American Isotope Separator Conference by Green D. W. (1972)
10.1063/1.1674816
Gruen D. M., Gaudioso S. L., McBeth R. L., and Lerner J., J. Chem. Phys. 60 (1974). (10.1063/1.1680811)
10.1063/1.1678089
10.1063/1.1678944
{'key': 'bibr9-000370274774332849', 'volume-title': 'Progress in Nuclear Techniques and Instrumentation', 'volume': '3', 'author': 'Alvager T.', 'year': '1968'} / Progress in Nuclear Techniques and Instrumentation by Alvager T. (1968)
10.1063/1.1685342
{'volume-title': 'Quantitative Molecular Spectroscopy and Gas Emissivities', 'year': '1959', 'author': 'Penner S. S.', 'key': 'bibr11-000370274774332849'} / Quantitative Molecular Spectroscopy and Gas Emissivities by Penner S. S. (1959)
{'volume-title': 'Vacuum Deposition of Thin Films', 'year': '1958', 'author': 'Holland L.', 'key': 'bibr12-000370274774332849'} / Vacuum Deposition of Thin Films by Holland L. (1958)
Moore C. E., Natl. Bur. Std. (U.S.) Circ. 467 (1952).
Corliss C. H. and Bozman W. R., Natl. Bur. Std. (U.S.) Monograph 53 (1962).
The sputtering yields for Nb were obtained by dividing the sputtering yields of Mo (Ref. 16) by 1.6. The factor 1.6 comes from a comparison of Mo vs Nb sputtering yields with 45 ke VKr+ ions shown in Fig. 18 of Ref. 16.
10.1016/0029-554X(61)90026-X

Dates

Type	When
Created	19 years, 11 months ago (Sept. 30, 2005, 7:29 p.m.)
Deposited	5 months, 3 weeks ago (March 10, 2025, 10:31 a.m.)
Indexed	5 months, 3 weeks ago (March 11, 2025, 12:19 a.m.)
Issued	51 years, 8 months ago (Jan. 1, 1974)
Published	51 years, 8 months ago (Jan. 1, 1974)
Published Online	51 years, 8 months ago (Jan. 1, 1974)
Published Print	51 years, 8 months ago (Jan. 1, 1974)

Funders 0

None

BibTeX

@article{Green_1974, title={Sputtering Studies Using the Matrix Isolation Technique}, volume={28}, ISSN={1943-3530}, url={http://dx.doi.org/10.1366/000370274774332849}, DOI={10.1366/000370274774332849}, number={1}, journal={Applied Spectroscopy}, publisher={SAGE Publications}, author={Green, David W. and Gruen, Dieter M. and Schreiner, Felix and Lerner, Jerome L.}, year={1974}, month=jan, pages={34–38} }

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