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journal-article
SAGE Publications
International Materials Reviews (179)
References
79
Referenced
76
- Suntola T.: in ‘Handbook of crystal growth’, (ed. Huerle D. T. J.), Vol. 3, 601–663; 1994, Amsterdam, Elsevier.
- Suntola T. and Antson J. ‘Method for producing compound thin films’, US Patent no.4,058,430, 1977.
10.1002/adma.200700079
10.1016/j.tsf.2009.08.025
10.1021/cr900056b
-
Seidel T. E.: in ‘Handbook of semiconductor manufacturing technology’, (ed. Nishi Y. and Doering R.), 14-1–14-36; 2007, Boca Raton, FL, Taylor & Francis Group.
(
10.1201/9781420017663.ch14
) 10.1073/pnas.1000954107
10.1016/j.aca.2004.11.073
10.2174/092986708783885219
10.1002/adma.200901327
10.1002/adma.200901327
10.1007/s11814-010-0434-x
10.1021/am1003365
10.1016/j.tsf.2010.07.027
10.1149/1.3280224
10.1116/1.2713403
10.1002/pssr.200701242
10.1063/1.3431349
10.1016/j.tsf.2010.03.011
10.1021/jp810845e
10.1063/1.2199707
{'key': 'CIT0022', 'first-page': '15', 'volume': '20', 'author': 'Liu L.', 'year': '2008', 'journal-title': 'Sensor Mater.'}
/ Sensor Mater. by Liu L. (2008)10.1021/nl0494001
10.1117/1.3486202
10.1021/nn901842r
10.1002/adma.200803786
10.1021/nl101046t
10.1038/nmat2805
10.1098/rsta.2010.0011
10.1016/j.micromeso.2009.05.024
10.1007/s10544-008-9217-0
10.1007/s11837-009-0081-z
10.1016/S1369-7021(10)70035-3
10.1039/b716652d
10.1088/1742-6596/187/1/012043
10.1021/cm0304546
10.1016/j.surfcoat.2011.05.017
10.1016/j.apsusc.2010.07.051
10.1016/j.apsusc.2011.06.031
10.1021/am9003667
10.1021/la902830d
10.1088/1748-6041/4/2/025001
10.1021/la904604z
10.1021/ac050286w
10.1021/nn200108s
10.1016/j.tsf.2008.09.007
10.1021/nl060413j
10.1039/B711764G
10.1021/la903106j
10.1039/b610188g
10.1088/0957-4484/21/5/055304
10.1016/S0021-9258(20)69471-6
/ J. Biol. Chem. by Kresge N. (2004)10.1039/c0cc01689f
10.1039/b820436e
10.1021/nn901055d
10.1021/jp8070794
10.1016/j.sna.2009.12.038
10.1002/jbm.a.31732
10.1016/j.sna.2006.05.013
10.1016/j.tsf.2009.03.013
10.1021/am200158y
10.1021/la103337a
10.1021/jp0540656
10.1021/ja0638760
10.1021/am900904k
10.1021/ac902224q
- Ackerman J. F. ‘Production of diffuse reflective coatings by atomic layer epitaxy’, US Patent no.5,256,244, 1993.
- Chan L., Chu S., Ng C. H., Pradeep Y. R. and Zheng J. Z. ‘Method of forming a surface coating layer within an opening within a body by atomic layer deposition’, US Patent no.6,716,693, 2004.
- Carlisle J. A., Pellin M. J., Elam J. W. and Wang J. ‘Hermetic bio-inert coatings for bio-implants fabricated using atomic layer deposition’, US Patent no. 2006/0251875 A1, 2006.
- Francis R. W. A., Istephanous N. S., Bonde E. H., Schugt M. A. and O’Brien R. J. ’Atomic layer deposition coatings for implantable medical devices’, US Patent no. 2007/0250142 A1, 2007.
- Gerrish P. F., Batchelder G., Fenner A. A., Larson L. R., Malin A. J., Mattes M. F., Mueller T., Ruben D. A. and Tyler L. E. ‘Hermetically-sealed electrical circuit apparatus’, US Patent no. 2010/0314149 A1, 2010.
- Hossick-Schott J., Istephanous N. S., Norton J. D., Rorvick A. W. and Francis R. W. A. ‘Capacitor electrodes produced with atomic layer deposition for use in implantable medical devices’, US Patent no. 7,491,246 B2, 2009.
- Liang X., Weimer A. W. and Bryant S. J. ‘Implantable devices having ceramic coating applied via an atomic layer deposition method’, US Patent no. 2009/0304774 A1, 2009.
- Weimer A. W., Pratsinis S. E., Angeletakis C. and George S. M. ‘Dental composite filler particles’, US Patent no.7,396,862, 2008.
10.1116/1.3670745
10.1021/cm0006594
10.1557/mrs.2011.239
10.1039/c2nr11875k
10.1007/s11837-008-0028-9
Dates
Type | When |
---|---|
Created | 13 years ago (Aug. 3, 2012, 8:15 a.m.) |
Deposited | 5 months, 1 week ago (March 10, 2025, 12:24 p.m.) |
Indexed | 6 hours, 17 minutes ago (Aug. 23, 2025, 1:08 a.m.) |
Issued | 12 years, 6 months ago (Feb. 1, 2013) |
Published | 12 years, 6 months ago (Feb. 1, 2013) |
Published Online | 11 years, 9 months ago (Nov. 12, 2013) |
Published Print | 12 years, 6 months ago (Feb. 1, 2013) |
@article{Skoog_2013, title={Atomic layer deposition: medical and biological applications}, volume={58}, ISSN={1743-2804}, url={http://dx.doi.org/10.1179/1743280412y.0000000009}, DOI={10.1179/1743280412y.0000000009}, number={2}, journal={International Materials Reviews}, publisher={SAGE Publications}, author={Skoog, S. A. and Elam, J. W. and Narayan, R. J.}, year={2013}, month=feb, pages={113–129} }