DOI: 10.1149/1.3610994. Ultrafast Atomic Layer Deposition of Alumina Layers for Solar Cell Passivation

Ultrafast Atomic Layer Deposition of Alumina Layers for Solar Cell Passivation

10.1149/1.3610994

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Poodt, P., Tiba, V., Werner, F., Schmidt, J., Vermeer, A., & Roozeboom, F. (2011). Ultrafast Atomic Layer Deposition of Alumina Layers for Solar Cell Passivation. Journal of The Electrochemical Society, 158(9), H937.

Authors 6

P. Poodt (first)
V. Tiba (additional)
F. Werner (additional)
J. Schmidt (additional)
A. Vermeer (additional)
F. Roozeboom (additional)

References 16 Referenced 40

10.1021/cr900056b
W. M. M. Kessels, H. B. Profijt, S. E. Potts and M. C. M van de Sanden , inALD of Nanostructured Materials, M. Knez and N. Pinna , Editors, VCH-Wiley, Weinheim (2011).
10.1063/1.1940727
10.1016/j.surfcoat.2007.05.009
D. J. Maas, B. van Someren, A. S. Lexmond, C. I. M. A. Spee, A. E. Duisterwinkel, and A. J. P. M. Vermeer , European Pat. 2159304 (A1) (2010) and WO Pat. 2010/024671 (2010).
10.1002/adma.201000766
10.1109/JDT.2009.2022770
10.1002/pip.823
10.1063/1.2945287
W. C. Sinke, W. van Hooff, G. Coletti, B. Ehlen, G. Hahn, S. Reber, J. John, G. Beaucarne, E. van Kerschaver, M. de Wild-Scholten, and A. Metz , Proceedings of 24th EU-PVSEC, Hamburg, p. 845 (2009).
10.1063/1.3505311
B. Vermang, A. Rothschild, A. Racz, J. John, J. Poortmans, R. Mertens, P. Poodt, V. Tiba, F. Roozeboom , Prog. Photovoltaics, accepted.
10.1149/1.3485280
10.1098/rspa.1941.0067
J. Schmidt, B. Veith, F. Werner, D. Zielke, and R. Brendel , inProceedings of 35th IEEE PVSC, Honolulu, HI, p. 885 (2010).
A. Vermeer and G. Janssen , WO Pat. 2011/014070 (2011)

Dates

Type	When
Created	14 years, 1 month ago (July 20, 2011, 2:01 p.m.)
Deposited	5 years, 7 months ago (Jan. 13, 2020, 4:02 a.m.)
Indexed	1 week, 6 days ago (Aug. 21, 2025, 12:40 p.m.)
Issued	14 years, 8 months ago (Jan. 1, 2011)
Published	14 years, 8 months ago (Jan. 1, 2011)
Published Print	14 years, 8 months ago (Jan. 1, 2011)

Funders 0

None

BibTeX

@article{Poodt_2011, title={Ultrafast Atomic Layer Deposition of Alumina Layers for Solar Cell Passivation}, volume={158}, ISSN={0013-4651}, url={http://dx.doi.org/10.1149/1.3610994}, DOI={10.1149/1.3610994}, number={9}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Poodt, P. and Tiba, V. and Werner, F. and Schmidt, J. and Vermeer, A. and Roozeboom, F.}, year={2011}, pages={H937} }

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