DOI: 10.1149/1.3596018. Local Epitaxial Growth of Ru Thin Films by Atomic Layer Deposition at Low Temperature

Local Epitaxial Growth of Ru Thin Films by Atomic Layer Deposition at Low Temperature

10.1149/1.3596018

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Kim, S. K., Han, S., Kim, G. H., Jang, J. H., Han, J. H., & Hwang, C. S. (2011). Local Epitaxial Growth of Ru Thin Films by Atomic Layer Deposition at Low Temperature. Journal of The Electrochemical Society, 158(8), D477.

Authors 6

Seong Keun Kim (first)
Sora Han (additional)
Gun Hwan Kim (additional)
Jae Hyuck Jang (additional)
Jeong Hwan Han (additional)
Cheol Seong Hwang (additional)

References 16 Referenced 17

Dates

Type	When
Created	14 years, 3 months ago (May 31, 2011, 6:12 p.m.)
Deposited	5 years, 7 months ago (Jan. 13, 2020, 9:01 a.m.)
Indexed	1 year, 2 months ago (June 3, 2024, 7:46 p.m.)
Issued	14 years, 8 months ago (Jan. 1, 2011)
Published	14 years, 8 months ago (Jan. 1, 2011)
Published Print	14 years, 8 months ago (Jan. 1, 2011)

Funders 0

None

BibTeX

@article{Kim_2011, title={Local Epitaxial Growth of Ru Thin Films by Atomic Layer Deposition at Low Temperature}, volume={158}, ISSN={0013-4651}, url={http://dx.doi.org/10.1149/1.3596018}, DOI={10.1149/1.3596018}, number={8}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Kim, Seong Keun and Han, Sora and Kim, Gun Hwan and Jang, Jae Hyuck and Han, Jeong Hwan and Hwang, Cheol Seong}, year={2011}, pages={D477} }

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