DOI: 10.1149/1.2425807. The Oxidation of Silicon in Dry Oxygen, Wet Oxygen, and Steam

The Oxidation of Silicon in Dry Oxygen, Wet Oxygen, and Steam

10.1149/1.2425807

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Deal, B. E. (1963). The Oxidation of Silicon in Dry Oxygen, Wet Oxygen, and Steam. Journal of The Electrochemical Society, 110(6), 527.

Authors 1

Bruce E. Deal (first)

References 0 Referenced 106

None

Dates

Type	When
Created	18 years, 6 months ago (Feb. 21, 2007, 4:24 p.m.)
Deposited	5 years, 7 months ago (Jan. 13, 2020, 8:33 a.m.)
Indexed	19 hours, 26 minutes ago (Aug. 26, 2025, 2:36 a.m.)
Issued	62 years, 7 months ago (Jan. 1, 1963)
Published	62 years, 7 months ago (Jan. 1, 1963)
Published Print	62 years, 7 months ago (Jan. 1, 1963)

Funders 0

None

BibTeX

@article{Deal_1963, title={The Oxidation of Silicon in Dry Oxygen, Wet Oxygen, and Steam}, volume={110}, ISSN={0013-4651}, url={http://dx.doi.org/10.1149/1.2425807}, DOI={10.1149/1.2425807}, number={6}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Deal, Bruce E.}, year={1963}, pages={527} }

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