DOI: 10.1149/1.2404250. Low-Temperature Electrostatic Silicon-to-Silicon Seals Using Sputtered Borosilicate Glass

Low-Temperature Electrostatic Silicon-to-Silicon Seals Using Sputtered Borosilicate Glass

10.1149/1.2404250

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Brooks, A. D., Donovan, R. P., & Hardesty, C. A. (1972). Low-Temperature Electrostatic Silicon-to-Silicon Seals Using Sputtered Borosilicate Glass. Journal of The Electrochemical Society, 119(4), 545.

Authors 3

A. D. Brooks (first)
R. P. Donovan (additional)
C. A. Hardesty (additional)

References 0 Referenced 64

None

Dates

Type	When
Created	18 years, 6 months ago (Feb. 21, 2007, 4:53 p.m.)
Deposited	5 years, 7 months ago (Jan. 13, 2020, 9:12 a.m.)
Indexed	2 days, 8 hours ago (Sept. 3, 2025, 6:53 a.m.)
Issued	53 years, 8 months ago (Jan. 1, 1972)
Published	53 years, 8 months ago (Jan. 1, 1972)
Published Print	53 years, 8 months ago (Jan. 1, 1972)

Funders 0

None

BibTeX

@article{Brooks_1972, title={Low-Temperature Electrostatic Silicon-to-Silicon Seals Using Sputtered Borosilicate Glass}, volume={119}, ISSN={0013-4651}, url={http://dx.doi.org/10.1149/1.2404250}, DOI={10.1149/1.2404250}, number={4}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Brooks, A. D. and Donovan, R. P. and Hardesty, C. A.}, year={1972}, pages={545} }

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