DOI: 10.1149/1.2403670. Silicon Surface Contamination: Polishing and Cleaning

Silicon Surface Contamination: Polishing and Cleaning

10.1149/1.2403670

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Meek, R. L., Buck, T. M., & Gibbon, C. F. (1973). Silicon Surface Contamination: Polishing and Cleaning. Journal of The Electrochemical Society, 120(9), 1241.

Authors 3

R. L. Meek (first)
T. M. Buck (additional)
C. F. Gibbon (additional)

References 0 Referenced 17

None

Dates

Type	When
Created	18 years, 5 months ago (March 28, 2007, 10:05 a.m.)
Deposited	5 years, 7 months ago (Jan. 13, 2020, 4 a.m.)
Indexed	2 months, 2 weeks ago (June 13, 2025, 12:41 p.m.)
Issued	52 years, 7 months ago (Jan. 1, 1973)
Published	52 years, 7 months ago (Jan. 1, 1973)
Published Print	52 years, 7 months ago (Jan. 1, 1973)

Funders 0

None

BibTeX

@article{Meek_1973, title={Silicon Surface Contamination: Polishing and Cleaning}, volume={120}, ISSN={0013-4651}, url={http://dx.doi.org/10.1149/1.2403670}, DOI={10.1149/1.2403670}, number={9}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Meek, R. L. and Buck, T. M. and Gibbon, C. F.}, year={1973}, pages={1241} }

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