DOI: 10.1149/1.2113750. Bias‐Dependent Etching of Silicon in Aqueous KOH

Bias‐Dependent Etching of Silicon in Aqueous KOH

10.1149/1.2113750

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Glembocki, O. J., Stahlbush, R. E., & Tomkiewicz, M. (1985). BiasâDependent Etching of Silicon in Aqueous âKOH. Journal of The Electrochemical Society, 132(1), 145â151.

Authors 3

Orest J. Glembocki (first)
Robert E. Stahlbush (additional)
Micha Tomkiewicz (additional)

References 0 Referenced 128

None

Dates

Type	When
Created	19 years, 2 months ago (June 14, 2006, 2:46 p.m.)
Deposited	4 years, 11 months ago (Sept. 7, 2020, 12:55 p.m.)
Indexed	1 month, 1 week ago (July 11, 2025, 6:12 a.m.)
Issued	40 years, 7 months ago (Jan. 1, 1985)
Published	40 years, 7 months ago (Jan. 1, 1985)
Published Online	5 years, 8 months ago (Dec. 7, 2019)
Published Print	40 years, 7 months ago (Jan. 1, 1985)

Funders 0

None

BibTeX

@article{Glembocki_1985, title={Bias‐Dependent Etching of Silicon in Aqueous KOH}, volume={132}, ISSN={1945-7111}, url={http://dx.doi.org/10.1149/1.2113750}, DOI={10.1149/1.2113750}, number={1}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Glembocki, Orest J. and Stahlbush, Robert E. and Tomkiewicz, Micha}, year={1985}, month=jan, pages={145–151} }

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