DOI: 10.1149/1.2097151. Selective Oxidation Using Ultrathin Nitrogen‐Rich Silicon Surface Layers Grown by Rapid Thermal Processing

Selective Oxidation Using Ultrathin Nitrogen‐Rich Silicon Surface Layers Grown by Rapid Thermal Processing

10.1149/1.2097151

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Paz de Araujo, C. A., Huang, Y. P., & Gallegos, R. (1989). Selective Oxidation Using Ultrathin NitrogenâRich Silicon Surface Layers Grown by Rapid Thermal Processing. Journal of The Electrochemical Society, 136(7), 2035â2038.

Authors 3

C. A. Paz de Araujo (first)
Y. P. Huang (additional)
R. Gallegos (additional)

References 0 Referenced 5

None

Dates

Type	When
Created	19 years, 2 months ago (June 14, 2006, 12:33 p.m.)
Deposited	4 years, 11 months ago (Sept. 7, 2020, 1:38 p.m.)
Indexed	1 year, 6 months ago (Feb. 10, 2024, 11:02 a.m.)
Issued	36 years, 1 month ago (July 1, 1989)
Published	36 years, 1 month ago (July 1, 1989)
Published Online	5 years, 8 months ago (Dec. 7, 2019)
Published Print	36 years, 1 month ago (July 1, 1989)

Funders 0

None

BibTeX

@article{Paz_de_Araujo_1989, title={Selective Oxidation Using Ultrathin Nitrogen‐Rich Silicon Surface Layers Grown by Rapid Thermal Processing}, volume={136}, ISSN={1945-7111}, url={http://dx.doi.org/10.1149/1.2097151}, DOI={10.1149/1.2097151}, number={7}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Paz de Araujo, C. A. and Huang, Y. P. and Gallegos, R.}, year={1989}, month=jul, pages={2035–2038} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        10
      ]
    ],
    "date-time": "2024-02-10T16:02:06Z",
    "timestamp": 1707580926038
  },
  "reference-count": 0,
  "publisher": "The Electrochemical Society",
  "issue": "7",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2019,
            12,
            7
          ]
        ],
        "date-time": "2019-12-07T00:00:00Z",
        "timestamp": 1575676800000
      },
      "content-version": "vor",
      "delay-in-days": 11116,
      "URL": "https://iopscience.iop.org/page/copyright"
    },
    {
      "start": {
        "date-parts": [
          [
            2019,
            12,
            7
          ]
        ],
        "date-time": "2019-12-07T00:00:00Z",
        "timestamp": 1575676800000
      },
      "content-version": "tdm",
      "delay-in-days": 11116,
      "URL": "https://iopscience.iop.org/info/page/text-and-data-mining"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1989,
        7,
        1
      ]
    ]
  },
  "DOI": "10.1149/1.2097151",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        6,
        14
      ]
    ],
    "date-time": "2006-06-14T16:33:04Z",
    "timestamp": 1150302784000
  },
  "page": "2035-2038",
  "source": "Crossref",
  "is-referenced-by-count": 5,
  "title": "Selective Oxidation Using Ultrathin Nitrogen\u2010Rich Silicon Surface Layers Grown by Rapid Thermal Processing",
  "prefix": "10.1149",
  "volume": "136",
  "author": [
    {
      "given": "C. A.",
      "family": "Paz de Araujo",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Microelectronics Research Laboratories, University of Colorado at Colorado Springs, Colorado Springs, Colorado 80933"
        }
      ]
    },
    {
      "given": "Y. P.",
      "family": "Huang",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Microelectronics Research Laboratories, University of Colorado at Colorado Springs, Colorado Springs, Colorado 80933"
        }
      ]
    },
    {
      "given": "R.",
      "family": "Gallegos",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Microelectronics Research Laboratories, University of Colorado at Colorado Springs, Colorado Springs, Colorado 80933"
        }
      ]
    }
  ],
  "member": "77",
  "published-online": {
    "date-parts": [
      [
        2019,
        12,
        7
      ]
    ]
  },
  "container-title": "Journal of The Electrochemical Society",
  "original-title": [],
  "link": [
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.2097151",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.2097151/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.2097151/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.2097151/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2020,
        9,
        7
      ]
    ],
    "date-time": "2020-09-07T17:38:26Z",
    "timestamp": 1599500306000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://iopscience.iop.org/article/10.1149/1.2097151"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1989,
        7,
        1
      ]
    ]
  },
  "references-count": 0,
  "journal-issue": {
    "issue": "7"
  },
  "URL": "http://dx.doi.org/10.1149/1.2097151",
  "relation": {},
  "ISSN": [
    "0013-4651",
    "1945-7111"
  ],
  "subject": [],
  "container-title-short": "J. Electrochem. Soc.",
  "published": {
    "date-parts": [
      [
        1989,
        7,
        1
      ]
    ]
  }
}