DOI: 10.1149/1.2095434. A Mathematical Model for a Parallel Plate Plasma Etching Reactor

A Mathematical Model for a Parallel Plate Plasma Etching Reactor

10.1149/1.2095434

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Economou, D. J., & Alkire, R. C. (1988). A Mathematical Model for a Parallel Plate Plasma Etching Reactor. Journal of The Electrochemical Society, 135(11), 2786â2794.

Authors 2

Demetre J. Economou (first)
Richard C. Alkire (additional)

References 0 Referenced 29

None

Dates

Type	When
Created	19 years, 2 months ago (June 14, 2006, 12:47 p.m.)
Deposited	4 years, 11 months ago (Sept. 7, 2020, 1:17 p.m.)
Indexed	1 year, 6 months ago (Feb. 2, 2024, 9:06 a.m.)
Issued	36 years, 9 months ago (Nov. 1, 1988)
Published	36 years, 9 months ago (Nov. 1, 1988)
Published Online	5 years, 8 months ago (Dec. 7, 2019)
Published Print	36 years, 9 months ago (Nov. 1, 1988)

Funders 0

None

BibTeX

@article{Economou_1988, title={A Mathematical Model for a Parallel Plate Plasma Etching Reactor}, volume={135}, ISSN={1945-7111}, url={http://dx.doi.org/10.1149/1.2095434}, DOI={10.1149/1.2095434}, number={11}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Economou, Demetre J. and Alkire, Richard C.}, year={1988}, month=nov, pages={2786–2794} }

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