DOI: 10.1149/1.2086706. Programmed Rate Processing to Increase Throughput in LPCVD

Programmed Rate Processing to Increase Throughput in LPCVD

10.1149/1.2086706

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Cale, T. S., Jain, M. K., & Raupp, G. B. (1990). Programmed Rate Processing to Increase Throughput in LPCVD. Journal of The Electrochemical Society, 137(5), 1526â1533.

Authors 3

T. S. Cale (first)
M. K. Jain (additional)
G. B. Raupp (additional)

References 0 Referenced 26

None

Dates

Type	When
Created	19 years, 2 months ago (June 14, 2006, 12:31 p.m.)
Deposited	4 years, 11 months ago (Sept. 7, 2020, 1:50 p.m.)
Indexed	2 months, 4 weeks ago (June 5, 2025, 7:47 a.m.)
Issued	35 years, 4 months ago (May 1, 1990)
Published	35 years, 4 months ago (May 1, 1990)
Published Online	5 years, 8 months ago (Dec. 7, 2019)
Published Print	35 years, 4 months ago (May 1, 1990)

Funders 0

None

BibTeX

@article{Cale_1990, title={Programmed Rate Processing to Increase Throughput in LPCVD}, volume={137}, ISSN={1945-7111}, url={http://dx.doi.org/10.1149/1.2086706}, DOI={10.1149/1.2086706}, number={5}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Cale, T. S. and Jain, M. K. and Raupp, G. B.}, year={1990}, month=may, pages={1526–1533} }

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