DOI: 10.1149/1.2050096. An Experimental Study of Megasonic Cleaning of Silicon Wafers

An Experimental Study of Megasonic Cleaning of Silicon Wafers

10.1149/1.2050096

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Busnaina, A. A., Kashkoush, I. I., & Gale, G. W. (1995). An Experimental Study of Megasonic Cleaning of Silicon Wafers. Journal of The Electrochemical Society, 142(8), 2812â2817.

Authors 3

Ahmed A. Busnaina (first)
Ismail I. Kashkoush (additional)
Glenn W. Gale (additional)

References 0 Referenced 72

None

Dates

Type	When
Created	19 years, 2 months ago (June 14, 2006, 10:40 a.m.)
Deposited	4 years, 11 months ago (Sept. 7, 2020, 3:01 p.m.)
Indexed	2 months, 1 week ago (June 14, 2025, 11:10 a.m.)
Issued	30 years ago (Aug. 1, 1995)
Published	30 years ago (Aug. 1, 1995)
Published Online	5 years, 8 months ago (Dec. 7, 2019)
Published Print	30 years ago (Aug. 1, 1995)

Funders 0

None

BibTeX

@article{Busnaina_1995, title={An Experimental Study of Megasonic Cleaning of Silicon Wafers}, volume={142}, ISSN={1945-7111}, url={http://dx.doi.org/10.1149/1.2050096}, DOI={10.1149/1.2050096}, number={8}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Busnaina, Ahmed A. and Kashkoush, Ismail I. and Gale, Glenn W.}, year={1995}, month=aug, pages={2812–2817} }

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