DOI: 10.1149/1.2044153. Mechanisms of Thermal Nitridation of Silicon

Mechanisms of Thermal Nitridation of Silicon

10.1149/1.2044153

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Baumvol, I. J. R., Stedile, F. C., Ganem, J. âJ., Rigo, S., & Trimaille, I. (1995). Mechanisms of Thermal Nitridation of Silicon. Journal of The Electrochemical Society, 142(4), 1205â1214.

Authors 5

I. J. R. Baumvol (first)
F. C. Stedile (additional)
J. ‐J. Ganem (additional)
S. Rigo (additional)
I. Trimaille (additional)

References 0 Referenced 35

None

Dates

Type	When
Created	19 years, 2 months ago (June 14, 2006, 10:40 a.m.)
Deposited	4 years, 11 months ago (Sept. 7, 2020, 2:55 p.m.)
Indexed	1 month ago (July 22, 2025, 6:42 a.m.)
Issued	30 years, 4 months ago (April 1, 1995)
Published	30 years, 4 months ago (April 1, 1995)
Published Online	5 years, 8 months ago (Dec. 7, 2019)
Published Print	30 years, 4 months ago (April 1, 1995)

Funders 0

None

BibTeX

@article{Baumvol_1995, title={Mechanisms of Thermal Nitridation of Silicon}, volume={142}, ISSN={1945-7111}, url={http://dx.doi.org/10.1149/1.2044153}, DOI={10.1149/1.2044153}, number={4}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Baumvol, I. J. R. and Stedile, F. C. and Ganem, J. ‐J. and Rigo, S. and Trimaille, I.}, year={1995}, month=apr, pages={1205–1214} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        22
      ]
    ],
    "date-time": "2025-07-22T10:42:55Z",
    "timestamp": 1753180975200
  },
  "reference-count": 0,
  "publisher": "The Electrochemical Society",
  "issue": "4",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2019,
            12,
            7
          ]
        ],
        "date-time": "2019-12-07T00:00:00Z",
        "timestamp": 1575676800000
      },
      "content-version": "vor",
      "delay-in-days": 9016,
      "URL": "https://iopscience.iop.org/page/copyright"
    },
    {
      "start": {
        "date-parts": [
          [
            2019,
            12,
            7
          ]
        ],
        "date-time": "2019-12-07T00:00:00Z",
        "timestamp": 1575676800000
      },
      "content-version": "tdm",
      "delay-in-days": 9016,
      "URL": "https://iopscience.iop.org/info/page/text-and-data-mining"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1995,
        4,
        1
      ]
    ]
  },
  "DOI": "10.1149/1.2044153",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        6,
        14
      ]
    ],
    "date-time": "2006-06-14T14:40:22Z",
    "timestamp": 1150296022000
  },
  "page": "1205-1214",
  "source": "Crossref",
  "is-referenced-by-count": 35,
  "title": "Mechanisms of Thermal Nitridation of Silicon",
  "prefix": "10.1149",
  "volume": "142",
  "author": [
    {
      "given": "I. J. R.",
      "family": "Baumvol",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Instituto de F\u00edsica and Instituto de Qu\u00edmica, Universidade Federal do Rio Grande do Sul, 91501\u2010970, Porto Alegre, RS Brazil"
        },
        {
          "name": "Groupe de Physique des Solides, Universit\u00e9 Paris 7 et 6, Paris 75005, France"
        }
      ]
    },
    {
      "given": "F. C.",
      "family": "Stedile",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Instituto de F\u00edsica and Instituto de Qu\u00edmica, Universidade Federal do Rio Grande do Sul, 91501\u2010970, Porto Alegre, RS Brazil"
        },
        {
          "name": "Groupe de Physique des Solides, Universit\u00e9 Paris 7 et 6, Paris 75005, France"
        }
      ]
    },
    {
      "given": "J. \u2010J.",
      "family": "Ganem",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Instituto de F\u00edsica and Instituto de Qu\u00edmica, Universidade Federal do Rio Grande do Sul, 91501\u2010970, Porto Alegre, RS Brazil"
        },
        {
          "name": "Groupe de Physique des Solides, Universit\u00e9 Paris 7 et 6, Paris 75005, France"
        }
      ]
    },
    {
      "given": "S.",
      "family": "Rigo",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Instituto de F\u00edsica and Instituto de Qu\u00edmica, Universidade Federal do Rio Grande do Sul, 91501\u2010970, Porto Alegre, RS Brazil"
        },
        {
          "name": "Groupe de Physique des Solides, Universit\u00e9 Paris 7 et 6, Paris 75005, France"
        }
      ]
    },
    {
      "given": "I.",
      "family": "Trimaille",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Instituto de F\u00edsica and Instituto de Qu\u00edmica, Universidade Federal do Rio Grande do Sul, 91501\u2010970, Porto Alegre, RS Brazil"
        },
        {
          "name": "Groupe de Physique des Solides, Universit\u00e9 Paris 7 et 6, Paris 75005, France"
        }
      ]
    }
  ],
  "member": "77",
  "published-online": {
    "date-parts": [
      [
        2019,
        12,
        7
      ]
    ]
  },
  "container-title": "Journal of The Electrochemical Society",
  "original-title": [],
  "link": [
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.2044153",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.2044153/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.2044153/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.2044153/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2020,
        9,
        7
      ]
    ],
    "date-time": "2020-09-07T18:55:46Z",
    "timestamp": 1599504946000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://iopscience.iop.org/article/10.1149/1.2044153"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1995,
        4,
        1
      ]
    ]
  },
  "references-count": 0,
  "journal-issue": {
    "issue": "4"
  },
  "URL": "http://dx.doi.org/10.1149/1.2044153",
  "relation": {},
  "ISSN": [
    "0013-4651",
    "1945-7111"
  ],
  "subject": [],
  "container-title-short": "J. Electrochem. Soc.",
  "published": {
    "date-parts": [
      [
        1995,
        4,
        1
      ]
    ]
  }
}