DOI: 10.1149/1.1838257. Wet Etching of Al2 O 3 for Selective Patterning of Microstructures Using Ar + Ion Implantation and H 3 PO 4

Wet Etching of Al2 O 3 for Selective Patterning of Microstructures Using Ar + Ion Implantation and H 3 PO 4

10.1149/1.1838257

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Levy, P., Bianconi, M., & Correra, L. (1998). Wet Etching of Al2âOâ3 for Selective Patterning of Microstructures Using Arâ+â Ion Implantation and âHâ3âPOâ4. Journal of The Electrochemical Society, 145(1), 344â347.

Authors 3

P. Levy (first)
M. Bianconi (additional)
L. Correra (additional)

References 0 Referenced 5

None

Dates

Type	When
Created	19 years, 2 months ago (June 16, 2006, 10:08 a.m.)
Deposited	4 years, 11 months ago (Sept. 7, 2020, 3:32 p.m.)
Indexed	3 months, 1 week ago (May 15, 2025, 10:41 p.m.)
Issued	27 years, 7 months ago (Jan. 1, 1998)
Published	27 years, 7 months ago (Jan. 1, 1998)
Published Online	5 years, 8 months ago (Dec. 6, 2019)
Published Print	27 years, 7 months ago (Jan. 1, 1998)

Funders 0

None

BibTeX

@article{Levy_1998, title={Wet Etching of Al2 O 3 for Selective Patterning of Microstructures Using Ar + Ion Implantation and H 3 PO 4}, volume={145}, ISSN={1945-7111}, url={http://dx.doi.org/10.1149/1.1838257}, DOI={10.1149/1.1838257}, number={1}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Levy, P. and Bianconi, M. and Correra, L.}, year={1998}, month=jan, pages={344–347} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        5,
        16
      ]
    ],
    "date-time": "2025-05-16T02:41:00Z",
    "timestamp": 1747363260935
  },
  "reference-count": 0,
  "publisher": "The Electrochemical Society",
  "issue": "1",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2019,
            12,
            6
          ]
        ],
        "date-time": "2019-12-06T00:00:00Z",
        "timestamp": 1575590400000
      },
      "content-version": "vor",
      "delay-in-days": 8009,
      "URL": "https://iopscience.iop.org/page/copyright"
    },
    {
      "start": {
        "date-parts": [
          [
            2019,
            12,
            6
          ]
        ],
        "date-time": "2019-12-06T00:00:00Z",
        "timestamp": 1575590400000
      },
      "content-version": "tdm",
      "delay-in-days": 8009,
      "URL": "https://iopscience.iop.org/info/page/text-and-data-mining"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1998,
        1,
        1
      ]
    ]
  },
  "DOI": "10.1149/1.1838257",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        6,
        16
      ]
    ],
    "date-time": "2006-06-16T14:08:50Z",
    "timestamp": 1150466930000
  },
  "page": "344-347",
  "source": "Crossref",
  "is-referenced-by-count": 5,
  "title": "Wet Etching of Al2\u2009O\u20093 for Selective Patterning of Microstructures Using Ar\u2009+\u2009 Ion Implantation and \u2009H\u20093\u2009PO\u20094",
  "prefix": "10.1149",
  "volume": "145",
  "author": [
    {
      "given": "P.",
      "family": "Levy",
      "sequence": "first",
      "affiliation": [
        {
          "name": "CNR \u2014 Istituto LAMEL, I\u2010 40129 Bologna, Italy"
        }
      ]
    },
    {
      "given": "M.",
      "family": "Bianconi",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "CNR \u2014 Istituto LAMEL, I\u2010 40129 Bologna, Italy"
        }
      ]
    },
    {
      "given": "L.",
      "family": "Correra",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "CNR \u2014 Istituto LAMEL, I\u2010 40129 Bologna, Italy"
        }
      ]
    }
  ],
  "member": "77",
  "published-online": {
    "date-parts": [
      [
        2019,
        12,
        6
      ]
    ]
  },
  "container-title": "Journal of The Electrochemical Society",
  "original-title": [],
  "link": [
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.1838257",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.1838257/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.1838257/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.1838257/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2020,
        9,
        7
      ]
    ],
    "date-time": "2020-09-07T19:32:59Z",
    "timestamp": 1599507179000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://iopscience.iop.org/article/10.1149/1.1838257"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1998,
        1,
        1
      ]
    ]
  },
  "references-count": 0,
  "journal-issue": {
    "issue": "1"
  },
  "URL": "http://dx.doi.org/10.1149/1.1838257",
  "relation": {},
  "ISSN": [
    "0013-4651",
    "1945-7111"
  ],
  "subject": [],
  "container-title-short": "J. Electrochem. Soc.",
  "published": {
    "date-parts": [
      [
        1998,
        1,
        1
      ]
    ]
  }
}