DOI: 10.1149/1.1837160. Selective Dry Etching of III‐V Nitrides in Cl2 / Ar , CH 4 / H 2 / Ar , ICl/Ar, and IBr/Ar

Selective Dry Etching of III‐V Nitrides in Cl2 / Ar , CH 4 / H 2 / Ar , ICl/Ar, and IBr/Ar

10.1149/1.1837160

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Vartuli, C. B., Pearton, S. J., MacKenzie, J. D., Abernathy, C. R., & Shul, R. J. (1996). Selective Dry Etching of IIIâV Nitrides in Cl2â/âArâ,ââCHâ4â/ââHâ2â/âAr , ICl/Ar, and IBr/Ar. Journal of The Electrochemical Society, 143(10), L246âL248.

Authors 5

C. B. Vartuli (first)
S. J. Pearton (additional)
J. D. MacKenzie (additional)
C. R. Abernathy (additional)
R. J. Shul (additional)

References 0 Referenced 22

None

Dates

Type	When
Created	19 years, 2 months ago (June 14, 2006, 10:22 a.m.)
Deposited	4 years, 11 months ago (Sept. 7, 2020, 3:05 p.m.)
Indexed	1 year, 6 months ago (Feb. 6, 2024, 7:28 p.m.)
Issued	28 years, 11 months ago (Oct. 1, 1996)
Published	28 years, 11 months ago (Oct. 1, 1996)
Published Online	5 years, 8 months ago (Dec. 7, 2019)
Published Print	28 years, 11 months ago (Oct. 1, 1996)

Funders 0

None

BibTeX

@article{Vartuli_1996, title={Selective Dry Etching of III‐V Nitrides in Cl2 / Ar , CH 4 / H 2 / Ar , ICl/Ar, and IBr/Ar}, volume={143}, ISSN={1945-7111}, url={http://dx.doi.org/10.1149/1.1837160}, DOI={10.1149/1.1837160}, number={10}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Vartuli, C. B. and Pearton, S. J. and MacKenzie, J. D. and Abernathy, C. R. and Shul, R. J.}, year={1996}, month=oct, pages={L246–L248} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        7
      ]
    ],
    "date-time": "2024-02-07T00:28:49Z",
    "timestamp": 1707265729551
  },
  "reference-count": 0,
  "publisher": "The Electrochemical Society",
  "issue": "10",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2019,
            12,
            7
          ]
        ],
        "date-time": "2019-12-07T00:00:00Z",
        "timestamp": 1575676800000
      },
      "content-version": "vor",
      "delay-in-days": 8467,
      "URL": "https://iopscience.iop.org/page/copyright"
    },
    {
      "start": {
        "date-parts": [
          [
            2019,
            12,
            7
          ]
        ],
        "date-time": "2019-12-07T00:00:00Z",
        "timestamp": 1575676800000
      },
      "content-version": "tdm",
      "delay-in-days": 8467,
      "URL": "https://iopscience.iop.org/info/page/text-and-data-mining"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1996,
        10,
        1
      ]
    ]
  },
  "DOI": "10.1149/1.1837160",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        6,
        14
      ]
    ],
    "date-time": "2006-06-14T14:22:32Z",
    "timestamp": 1150294952000
  },
  "page": "L246-L248",
  "source": "Crossref",
  "is-referenced-by-count": 22,
  "title": "Selective Dry Etching of III\u2010V Nitrides in Cl2\u2009/\u2009Ar\u2009,\u2009\u2009CH\u20094\u2009/\u2009\u2009H\u20092\u2009/\u2009Ar , ICl/Ar, and IBr/Ar",
  "prefix": "10.1149",
  "volume": "143",
  "author": [
    {
      "given": "C. B.",
      "family": "Vartuli",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611"
        },
        {
          "name": "Sandia National Laboratories, Albuquerque, New Mexico 87185"
        }
      ]
    },
    {
      "given": "S. J.",
      "family": "Pearton",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611"
        },
        {
          "name": "Sandia National Laboratories, Albuquerque, New Mexico 87185"
        }
      ]
    },
    {
      "given": "J. D.",
      "family": "MacKenzie",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611"
        },
        {
          "name": "Sandia National Laboratories, Albuquerque, New Mexico 87185"
        }
      ]
    },
    {
      "given": "C. R.",
      "family": "Abernathy",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611"
        },
        {
          "name": "Sandia National Laboratories, Albuquerque, New Mexico 87185"
        }
      ]
    },
    {
      "given": "R. J.",
      "family": "Shul",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611"
        },
        {
          "name": "Sandia National Laboratories, Albuquerque, New Mexico 87185"
        }
      ]
    }
  ],
  "member": "77",
  "published-online": {
    "date-parts": [
      [
        2019,
        12,
        7
      ]
    ]
  },
  "container-title": "Journal of The Electrochemical Society",
  "original-title": [],
  "link": [
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.1837160",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.1837160/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.1837160/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1149/1.1837160/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2020,
        9,
        7
      ]
    ],
    "date-time": "2020-09-07T19:05:34Z",
    "timestamp": 1599505534000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://iopscience.iop.org/article/10.1149/1.1837160"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1996,
        10,
        1
      ]
    ]
  },
  "references-count": 0,
  "journal-issue": {
    "issue": "10"
  },
  "URL": "http://dx.doi.org/10.1149/1.1837160",
  "relation": {},
  "ISSN": [
    "0013-4651",
    "1945-7111"
  ],
  "subject": [],
  "container-title-short": "J. Electrochem. Soc.",
  "published": {
    "date-parts": [
      [
        1996,
        10,
        1
      ]
    ]
  }
}