DOI: 10.1149/1.1436085. Pyrolysis of Negative Photoresists to Fabricate Carbon Structures for Microelectromechanical Systems and Electrochemical Applications

Pyrolysis of Negative Photoresists to Fabricate Carbon Structures for Microelectromechanical Systems and Electrochemical Applications

10.1149/1.1436085

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Singh, A., Jayaram, J., Madou, M., & Akbar, S. (2002). Pyrolysis of Negative Photoresists to Fabricate Carbon Structures for Microelectromechanical Systems and Electrochemical Applications. Journal of The Electrochemical Society, 149(3), E78.

Authors 4

Amit Singh (first)
Jaishankar Jayaram (additional)
Marc Madou (additional)
Sheikh Akbar (additional)

References 17 Referenced 136

10.1147/rd.411.0081 / IBM J. Res. Dev. by Shaw (1997)
10.1088/0960-1317/7/3/010 / J. Micromech. Microeng. by Lorenz (1997)
M. K. Ghosh and K. L. Mittal,Polyimides: Fundamentals and Applications, Marcel Dekker, New York (1996).
M. I. Bessonov and V. A. Zubkov,Polyamic Acids and Polyimides: Synthesis, Transformations, and Structure, CRC Press, Boca Raton, FL (1993).
B. S. Moon, Ph.D Thesis, University of Akron, Akron, OH (1996).
K. Horie and T. Yamashita,Photosensitive Polyimides: Fundamentals and Applications, Technomic Publishing AG, Basel, Switzerland. (1995).
10.1016/S0032-3861(96)01094-4 / Polymer by Langlade (1997)
10.1002/(SICI)1097-0126(199910)48:10<1053::AID-PI268>3.0.CO;2-T / Polym. Int. by Reichmanis (1999)
M. J. Madou,Fundamentals of Microfabrication, CRC Press, New York (1997).
D. J. Elliot,Integrated Circuit Fabrication Technology, McGraw-Hill, New York (1982).
S. M. Majji, M.S. Thesis, The Ohio State University, Columbus, OH (1999).
10.1149/1.1393188 / J. Electrochem. Soc. by Ranganathan (2000)
10.1021/cm960639v / Chem. Mater. by Whitesides (1997)
10.1116/1.583284 / J. Vac. Sci. Technol., B by Lyons (1985)
K. Kinoshita,Carbon-Electrochemical and Physicochemical Properties, John Wiley & Sons, New York (1988).
10.1016/S0008-6223(98)00223-1 / Carbon by Takeichi (1999)
R. L. McCreery, inInterfacial Electrochemistry, A. Wieckowski, Editor, Marcel Dekker, Chap. 35, New York (1999).

Dates

Type	When
Created	23 years ago (July 26, 2002, 10:13 a.m.)
Deposited	5 years, 7 months ago (Jan. 10, 2020, 4:46 p.m.)
Indexed	2 weeks, 5 days ago (Aug. 3, 2025, 12:37 a.m.)
Issued	23 years, 7 months ago (Jan. 1, 2002)
Published	23 years, 7 months ago (Jan. 1, 2002)
Published Print	23 years, 7 months ago (Jan. 1, 2002)

Funders 0

None

BibTeX

@article{Singh_2002, title={Pyrolysis of Negative Photoresists to Fabricate Carbon Structures for Microelectromechanical Systems and Electrochemical Applications}, volume={149}, ISSN={0013-4651}, url={http://dx.doi.org/10.1149/1.1436085}, DOI={10.1149/1.1436085}, number={3}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Singh, Amit and Jayaram, Jaishankar and Madou, Marc and Akbar, Sheikh}, year={2002}, pages={E78} }

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