DOI: 10.1149/1.1430230. Bottom-up Filling of Submicrometer Features in Catalyst-Enhanced Chemical Vapor Deposition of Copper

Bottom-up Filling of Submicrometer Features in Catalyst-Enhanced Chemical Vapor Deposition of Copper

10.1149/1.1430230

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Shim, K.-C., Lee, H.-B., Kwon, O.-K., Park, H.-S., Koh, W., & Kang, S.-W. (2002). Bottom-up Filling of Submicrometer Features in Catalyst-Enhanced Chemical Vapor Deposition of Copper. Journal of The Electrochemical Society, 149(2), G109.

Authors 6

Kew-Chan Shim (first)
Hyun-Bae Lee (additional)
Oh-Kyum Kwon (additional)
Hyung-Sang Park (additional)
Wonyong Koh (additional)
Sang-Won Kang (additional)

References 8 Referenced 43

10.1016/0040-6090(93)90680-N / Thin Solid Films by Murarka (1993)
10.1149/1.2085434 / J. Electrochem. Soc. by Kaufman (1991)
10.1147/rd.425.0567 / IBM J. Res. Dev. by Andricacos (1998)
10.1149/1.1838941 / J. Electrochem. Soc. by Chae (1998)
10.1021/cm00022a009 / Chem. Mater. by Shin (1992)
10.1103/PhysRevB.51.14806 / Phys. Rev. B by van der Vegt (1995)
10.1021/cm990805+ / Chem. Mater. by Hwang (2000)
10.1021/j100200a059 / J. Phys. Chem. by Lin (1992)

Dates

Type	When
Created	23 years ago (July 26, 2002, 10:13 a.m.)
Deposited	5 years, 7 months ago (Jan. 10, 2020, 4:46 p.m.)
Indexed	2 months, 3 weeks ago (June 2, 2025, 8:07 a.m.)
Issued	23 years, 7 months ago (Jan. 1, 2002)
Published	23 years, 7 months ago (Jan. 1, 2002)
Published Print	23 years, 7 months ago (Jan. 1, 2002)

Funders 0

None

BibTeX

@article{Shim_2002, title={Bottom-up Filling of Submicrometer Features in Catalyst-Enhanced Chemical Vapor Deposition of Copper}, volume={149}, ISSN={0013-4651}, url={http://dx.doi.org/10.1149/1.1430230}, DOI={10.1149/1.1430230}, number={2}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Shim, Kew-Chan and Lee, Hyun-Bae and Kwon, Oh-Kyum and Park, Hyung-Sang and Koh, Wonyong and Kang, Sang-Won}, year={2002}, pages={G109} }

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