DOI: 10.1149/1.1393323. A Detailed Study on the Growth of Thin Oxide Layers on Silicon Using Ozonated Solutions

A Detailed Study on the Growth of Thin Oxide Layers on Silicon Using Ozonated Solutions

10.1149/1.1393323

Crossref journal-article

The Electrochemical Society

Journal of The Electrochemical Society (77)

Bibliography

Smedt, F. D., Vinckier, C., Cornelissen, I., Gendt, S. D., & Heyns, M. (2000). A Detailed Study on the Growth of Thin Oxide Layers on Silicon Using Ozonated Solutions. Journal of The Electrochemical Society, 147(3), 1124.

Authors 5

F. De Smedt (first)
C. Vinckier (additional)
I. Cornelissen (additional)
S. De Gendt (additional)
M. Heyns (additional)

References 0 Referenced 57

None

Dates

Type	When
Created	23 years ago (July 28, 2002, 6:22 p.m.)
Deposited	5 years, 7 months ago (Jan. 10, 2020, 4:54 p.m.)
Indexed	11 months, 3 weeks ago (Aug. 28, 2024, 9:08 a.m.)
Issued	25 years, 7 months ago (Jan. 1, 2000)
Published	25 years, 7 months ago (Jan. 1, 2000)
Published Print	25 years, 7 months ago (Jan. 1, 2000)

Funders 0

None

BibTeX

@article{Smedt_2000, title={A Detailed Study on the Growth of Thin Oxide Layers on Silicon Using Ozonated Solutions}, volume={147}, ISSN={0013-4651}, url={http://dx.doi.org/10.1149/1.1393323}, DOI={10.1149/1.1393323}, number={3}, journal={Journal of The Electrochemical Society}, publisher={The Electrochemical Society}, author={Smedt, F. De and Vinckier, C. and Cornelissen, I. and Gendt, S. De and Heyns, M.}, year={2000}, pages={1124} }

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