DOI: 10.1146/annurev.ms.09.080179.002013. Plasma Deposition of Inorganic Thin Films

Plasma Deposition of Inorganic Thin Films

10.1146/annurev.ms.09.080179.002013

Crossref journal-article

Annual Reviews

Annual Review of Materials Science (22)

Bibliography

Reinberg, A. R. (1979). Plasma Deposition of Inorganic Thin Films. Annual Review of Materials Science, 9(1), 341â372.

Authors 1

A R Reinberg (first)

References 0 Referenced 39

None

Dates

Type	When
Created	22 years, 1 month ago (July 2, 2003, 3:05 a.m.)
Deposited	3 years, 10 months ago (Oct. 13, 2021, 4:29 p.m.)
Indexed	2 months ago (June 25, 2025, 8:52 p.m.)
Issued	46 years ago (Aug. 1, 1979)
Published	46 years ago (Aug. 1, 1979)
Published Print	46 years ago (Aug. 1, 1979)

Funders 0

None

BibTeX

@article{Reinberg_1979, title={Plasma Deposition of Inorganic Thin Films}, volume={9}, ISSN={0084-6600}, url={http://dx.doi.org/10.1146/annurev.ms.09.080179.002013}, DOI={10.1146/annurev.ms.09.080179.002013}, number={1}, journal={Annual Review of Materials Science}, publisher={Annual Reviews}, author={Reinberg, A R}, year={1979}, month=aug, pages={341–372} }

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