PROCESSING AND CHARACTERIZATION OF PIEZOELECTRIC MATERIALS AND INTEGRATION INTO MICROELECTROMECHANICAL SYSTEMS
10.1146/annurev.matsci.28.1.563
Crossref journal-article
Annual Reviews
Annual Review of Materials Science (22)
Abstract

▪ Abstract  Piezoelectric materials have been integrated with silicon microelectromechanical systems (MEMS) in both microsensor and microactuator applications. Thin-film materials selection and processing routes are reviewed. Some recent and emerging applications of piezoelectric MEMS are presented including acoustic emission microsensors, vibration monitors, molecular recognition biosensors, precision positioners, micropumps, and linear stepper motors.

Bibliography

Polla, D. L., & Francis, L. F. (1998). PROCESSING AND CHARACTERIZATION OF PIEZOELECTRIC MATERIALS AND INTEGRATION INTO MICROELECTROMECHANICAL SYSTEMS. Annual Review of Materials Science, 28(1), 563–597.

Authors 2
  1. Dennis L. Polla (first)
  2. Lorraine F. Francis (additional)
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Dates
Type When
Created 23 years ago (July 27, 2002, 7:43 a.m.)
Deposited 8 months, 2 weeks ago (Dec. 8, 2024, 6:01 p.m.)
Indexed 3 days, 11 hours ago (Aug. 20, 2025, 8:31 a.m.)
Issued 27 years ago (Aug. 1, 1998)
Published 27 years ago (Aug. 1, 1998)
Published Print 27 years ago (Aug. 1, 1998)
Funders 0

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@article{Polla_1998, title={PROCESSING AND CHARACTERIZATION OF PIEZOELECTRIC MATERIALS AND INTEGRATION INTO MICROELECTROMECHANICAL SYSTEMS}, volume={28}, ISSN={0084-6600}, url={http://dx.doi.org/10.1146/annurev.matsci.28.1.563}, DOI={10.1146/annurev.matsci.28.1.563}, number={1}, journal={Annual Review of Materials Science}, publisher={Annual Reviews}, author={Polla, Dennis L. and Francis, Lorraine F.}, year={1998}, month=aug, pages={563–597} }