DOI: 10.1143/jjap.8.1307. Measurement of Resistance by Means of Electron Beam -III-

Measurement of Resistance by Means of Electron Beam -III-

10.1143/jjap.8.1307

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

An electron beam technique of measuring resistivity is reported. An electron beam was continuously scanned upon the specimen bar, and the ohmic drop (resistance × electron beam current) was electronically differentiated to get the resistivity. Resultant signal was displayed on a synchroscope screen. The technique was testified by using a GaAs bar whose dimensions were 0.5×0.9×7.0 mm3. The resistivity distribution was measured along the long axis. Energy, current and diameter of the beam were 15 keV, 5.5 nA and about 20 µm, respectively. Maximum resistivity of 4 M\varOmegacm was measured in a measuring time of 10 seconds.

Bibliography

Munakata, C., & Watanabe, H. (1969). Measurement of Resistance by Means of Electron Beam -III-. Japanese Journal of Applied Physics, 8(11), 1307.

Authors 2

Chusuke Munakata (first)
Hiroshi Watanabe (additional)

References 5 Referenced 1

10.1143/JJAP.4.250 / Jpn. J. Appl. Phys. (1965)
10.1143/JJAP.5.1157 / Jpn. J. Appl. Phys. (1966)
{'key': ''}
{'key': '', 'first-page': '639', 'volume': '1', 'year': '1968', 'journal-title': 'J. Sci. Instrum. Series 2'} / J. Sci. Instrum. Series 2 (1968)
10.1143/JJAP.6.963 / Jpn. J. Appl. Phys. (1967)

Dates

Type	When
Created	19 years, 9 months ago (Nov. 4, 2005, 2:16 a.m.)
Deposited	2 years, 8 months ago (Nov. 28, 2022, 5:51 a.m.)
Indexed	6 months ago (Feb. 21, 2025, 5:36 a.m.)
Issued	55 years, 9 months ago (Nov. 1, 1969)
Published	55 years, 9 months ago (Nov. 1, 1969)
Published Print	55 years, 9 months ago (Nov. 1, 1969)

Funders 0

None

BibTeX

@article{Munakata_1969, title={Measurement of Resistance by Means of Electron Beam -III-}, volume={8}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.8.1307}, DOI={10.1143/jjap.8.1307}, number={11}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Munakata, Chusuke and Watanabe, Hiroshi}, year={1969}, month=nov, pages={1307} }

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