DOI: 10.1143/jjap.43.l1400. Fabrication of Indium Phosphide Compound Photonic Crystal by Hydrogen Iodide/Xenon Inductively Coupled Plasma Etching

Fabrication of Indium Phosphide Compound Photonic Crystal by Hydrogen Iodide/Xenon Inductively Coupled Plasma Etching

10.1143/jjap.43.l1400

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Bibliography

Fujita, M., Sugitatsu, A., Uesugi, T., & Noda, S. (2004). Fabrication of Indium Phosphide Compound Photonic Crystal by Hydrogen Iodide/Xenon Inductively Coupled Plasma Etching. Japanese Journal of Applied Physics, 43(No. 11A), L1400âL1402.

Authors 4

Masayuki Fujita (first)
Atsushi Sugitatsu (additional)
Toshitsugu Uesugi (additional)
Susumu Noda (additional)

References 0 Referenced 10

None

Dates

Type	When
Created	20 years, 6 months ago (Feb. 9, 2005, 8:31 p.m.)
Deposited	5 years, 3 months ago (May 31, 2020, 7:03 p.m.)
Indexed	1 year, 7 months ago (Jan. 10, 2024, 12:27 a.m.)
Issued	20 years, 10 months ago (Oct. 8, 2004)
Published	20 years, 10 months ago (Oct. 8, 2004)
Published Online	20 years, 10 months ago (Oct. 8, 2004)

Funders 0

None

BibTeX

@article{Fujita_2004, title={Fabrication of Indium Phosphide Compound Photonic Crystal by Hydrogen Iodide/Xenon Inductively Coupled Plasma Etching}, volume={43}, ISSN={0021-4922}, url={http://dx.doi.org/10.1143/jjap.43.l1400}, DOI={10.1143/jjap.43.l1400}, number={No. 11A}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Fujita, Masayuki and Sugitatsu, Atsushi and Uesugi, Toshitsugu and Noda, Susumu}, year={2004}, month=oct, pages={L1400–L1402} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        1,
        10
      ]
    ],
    "date-time": "2024-01-10T05:27:17Z",
    "timestamp": 1704864437524
  },
  "reference-count": 0,
  "publisher": "IOP Publishing",
  "issue": "No. 11A",
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "DOI": "10.1143/jjap.43.l1400",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2005,
        2,
        10
      ]
    ],
    "date-time": "2005-02-10T01:31:32Z",
    "timestamp": 1107999092000
  },
  "page": "L1400-L1402",
  "source": "Crossref",
  "is-referenced-by-count": 10,
  "title": "Fabrication of Indium Phosphide Compound Photonic Crystal by Hydrogen Iodide/Xenon Inductively Coupled Plasma Etching",
  "prefix": "10.35848",
  "volume": "43",
  "author": [
    {
      "given": "Masayuki",
      "family": "Fujita",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Atsushi",
      "family": "Sugitatsu",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Toshitsugu",
      "family": "Uesugi",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Susumu",
      "family": "Noda",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "266",
  "published-online": {
    "date-parts": [
      [
        2004,
        10,
        8
      ]
    ]
  },
  "container-title": "Japanese Journal of Applied Physics",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://stacks.iop.org/1347-4065/43/i=11A/a=L1400/pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2020,
        5,
        31
      ]
    ],
    "date-time": "2020-05-31T23:03:19Z",
    "timestamp": 1590966199000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.43.L1400"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2004,
        10,
        8
      ]
    ]
  },
  "references-count": 0,
  "journal-issue": {
    "issue": "No. 11A",
    "published-print": {
      "date-parts": [
        [
          2004,
          11
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1143/JJAP.43.L1400",
  "relation": {},
  "ISSN": [
    "0021-4922"
  ],
  "subject": [],
  "container-title-short": "Jpn. J. Appl. Phys.",
  "published": {
    "date-parts": [
      [
        2004,
        10,
        8
      ]
    ]
  }
}