DOI: 10.1143/jjap.38.l1146. Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching

Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching

10.1143/jjap.38.l1146

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

We demonstrate the three-dimensional microdrilling of glass by the multiphoton process with nonresonant femtosecond laser pulses and by the subsequent chemical etching. We use photomachinable glass which is sensitive to cw UV light of a wavelength shorter than 320 nm. After the focused irradiation of nonresonant femtosecond laser pulses at 400 nm and subsequent heat treatment, crystallites of Li2O·SiO2, which are more soluble in dilute hydrofluoric acid than matrix glass, precipitate in the focused area of the laser within the glass sample. After etching the crystallites, three-dimensional holes are formed in the glass sample. We produce straight and Y-branched holes in the glass sample. This technique can be applied to the fields of microoptics, microelectronics and microchemicals.

Bibliography

Kondo, Y., Qiu, J., Mitsuyu, T., Hirao, K., & Yoko, T. (1999). Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching. Japanese Journal of Applied Physics, 38(10A), L1146.

Authors 5

Yuki Kondo (first)
Jianrong Qiu (additional)
Tsuneo Mitsuyu (additional)
Kazuyuki Hirao (additional)
Toshinobu Yoko (additional)

References 11 Referenced 101

10.1116/1.584065 / J. Vac. Sci. & Technol. B (1988)
{'key': '', 'first-page': '227', 'volume': '66', 'year': '1993', 'journal-title': 'Glastech. Ber.'} / Glastech. Ber. (1993)
10.1016/0169-4332(94)00415-3 / Appl. Surf. Sci. (1995)
10.1016/0169-4332(95)00528-5 / Appl. Surf. Sci. (1996)
{'year': '1996', 'key': ''} (1996)
10.1143/JJAP.37.L94 / Jpn. J. Appl. Phys. (1998)
10.1016/S0022-3093(99)00410-X / J. Non-Cryst. Solids (1999)
{'key': ''}
10.1021/ie50517a039 / Ind. Eng. Chem. (1953)
10.1246/nikkashi1898.65.3_342 / Kogyo Kagaku Zasshi (1962)
10.1103/PhysRevLett.74.2248 / Phys. Rev. Lett. (1995)

Dates

Type	When
Created	22 years, 11 months ago (Oct. 1, 2002, 7:04 p.m.)
Deposited	2 years, 8 months ago (Dec. 14, 2022, 12:46 p.m.)
Indexed	1 month, 4 weeks ago (July 4, 2025, 2:11 a.m.)
Issued	25 years, 11 months ago (Oct. 1, 1999)
Published	25 years, 11 months ago (Oct. 1, 1999)
Published Print	25 years, 11 months ago (Oct. 1, 1999)

Funders 0

None

BibTeX

@article{Kondo_1999, title={Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching}, volume={38}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.38.l1146}, DOI={10.1143/jjap.38.l1146}, number={10A}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Kondo, Yuki and Qiu, Jianrong and Mitsuyu, Tsuneo and Hirao, Kazuyuki and Yoko, Toshinobu}, year={1999}, month=oct, pages={L1146} }

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