DOI: 10.1143/jjap.38.122. Effect of Annealing on Fatigue Properties of Sb-Doped Lead Zirconate Titanate Thin Films Deposited by DC Reactive Sputtering

Effect of Annealing on Fatigue Properties of Sb-Doped Lead Zirconate Titanate Thin Films Deposited by DC Reactive Sputtering

10.1143/jjap.38.122

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

The effect of annealing on the ferroelectric properties of Pt-based thin film capacitors of Sb-doped lead zirconate titanate [Pt/Pb(Zr0.48Ti0.52)O3/Pt/SiO2/Si] were investigated. Undoped Pb(Zr0.48Ti0.52)O3 (PZT0) and Sb-doped Pb(Zr0.48Ti0.52)O3 (PZST07) thin films were annealed in oxygen atmosphere at 650°C for 30 min. The Sb cation in a PZT thin film before and after annealing was confirmed to be trivalent (Sb3+) by X-ray photoelectron spectroscopy (XPS). The grain sizes of undoped PZT (PZT0) and Sb-doped PZT (PZST07) thin films after annealing are seen to increase. These changes of grain size affect the fatigue properties of PZT thin films. Annealed Sb-doped PZT (PZST07) thin films show good fatigue behavior (fatigue free up to 1011 switching cycles) and a larger P * r-P ∧ r value (31 µ C/cm2) than SrBi2Ta2O9 (SBT) thin films.

Bibliography

Choi, W.-Y., & Kim, H.-G. (1999). Effect of Annealing on Fatigue Properties of Sb-Doped Lead Zirconate Titanate Thin Films Deposited by DC Reactive Sputtering. Japanese Journal of Applied Physics, 38(1R), 122.

Authors 2

Won-Youl Choi (first)
Ho-Gi Kim (additional)

References 22 Referenced 7

10.1126/science.246.4936.1400 / Science (1989)
10.1109/58.108872 / IEEE Trans. Ultrason. Ferroelectr. & Freq. Control (1991)
10.1143/JJAP.34.5233 / Jpn. J. Appl. Phys. (1995)
{'key': ''}
10.1143/JJAP.33.5223 / Jpn. J. Appl. Phys. (1994)
10.1557/JMR.1994.0955 / J. Mater. Res. (1994)
10.1080/10584589708019978 / Integrat. Ferroelectr. (1997)
10.1111/j.1151-2916.1995.tb08846.x / J. Am. Ceram. Soc. (1995)
10.1557/JMR.1994.0955 / J. Mater. Res. (1994)
10.1016/S0921-5107(96)01616-9 / Mater. Sci. & Eng. B (1996)
{'journal-title': 'Mater. Lett. (1998).', 'key': ''} / Mater. Lett. (1998).
{'journal-title': 'Appl. Phys. Lett.', 'key': ''} / Appl. Phys. Lett.
10.1143/JJAP.33.5155 / Jpn. J. Appl. Phys. (1994)
{'key': ''}
10.1021/ic50122a054 / Inorg. Chem. (1973)
10.1016/0022-4596(78)90080-4 / J. Solid State Chem. (1978)
10.1107/S0567739476001551 / Acta Cryst. A (1976)
{'key': '', 'first-page': '704', 'volume': '66', 'year': '1987', 'journal-title': 'Am. Ceram. Soc. Bull.'} / Am. Ceram. Soc. Bull. (1987)
10.1557/JMR.1994.0955 / J. Mater. Res. (1994)
10.1016/0079-6786(84)90001-3 / Prog. Solid State Chem. (1984)
10.1080/00150199108007935 / Ferroelectrics (1991)
{'journal-title': 'Integrat. Ferroelectr. (1998).', 'key': ''} / Integrat. Ferroelectr. (1998).

Dates

Type	When
Created	22 years, 11 months ago (Oct. 1, 2002, 6:51 p.m.)
Deposited	2 years, 8 months ago (Dec. 14, 2022, 11:53 a.m.)
Indexed	6 months, 2 weeks ago (Feb. 21, 2025, 5:33 a.m.)
Issued	26 years, 8 months ago (Jan. 1, 1999)
Published	26 years, 8 months ago (Jan. 1, 1999)
Published Print	26 years, 8 months ago (Jan. 1, 1999)

Funders 0

None

BibTeX

@article{Choi_1999, title={Effect of Annealing on Fatigue Properties of Sb-Doped Lead Zirconate Titanate Thin Films Deposited by DC Reactive Sputtering}, volume={38}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.38.122}, DOI={10.1143/jjap.38.122}, number={1R}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Choi, Won-Youl and Kim, Ho-Gi}, year={1999}, month=jan, pages={122} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        2,
        21
      ]
    ],
    "date-time": "2025-02-21T10:33:40Z",
    "timestamp": 1740134020718,
    "version": "3.37.3"
  },
  "reference-count": 22,
  "publisher": "IOP Publishing",
  "issue": "1R",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1999,
            1,
            1
          ]
        ],
        "date-time": "1999-01-01T00:00:00Z",
        "timestamp": 915148800000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "https://iopscience.iop.org/page/copyright"
    },
    {
      "start": {
        "date-parts": [
          [
            1999,
            1,
            1
          ]
        ],
        "date-time": "1999-01-01T00:00:00Z",
        "timestamp": 915148800000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://iopscience.iop.org/info/page/text-and-data-mining"
    }
  ],
  "content-domain": {
    "domain": [
      "iopscience.iop.org"
    ],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1999,
        1,
        1
      ]
    ]
  },
  "abstract": "<jats:p> \n  The effect of annealing on the ferroelectric properties of \n  Pt-based thin film capacitors of Sb-doped lead zirconate titanate \n  [Pt/Pb(Zr<jats:sub>0.48</jats:sub>Ti<jats:sub>0.52</jats:sub>)O<jats:sub>3</jats:sub>/Pt/SiO<jats:sub>2</jats:sub>/Si] were \n  investigated. Undoped Pb(Zr<jats:sub>0.48</jats:sub>Ti<jats:sub>0.52</jats:sub>)O<jats:sub>3</jats:sub> (PZT0) and \n  Sb-doped Pb(Zr<jats:sub>0.48</jats:sub>Ti<jats:sub>0.52</jats:sub>)O<jats:sub>3</jats:sub> (PZST07) thin films were \n  annealed in oxygen atmosphere at 650\u00b0C for 30 min. The Sb \n  cation in a PZT thin film before and after annealing was confirmed \n  to be trivalent (Sb<jats:sup>3+</jats:sup>) by X-ray photoelectron spectroscopy \n  (XPS). The grain sizes of undoped PZT (PZT0) and Sb-doped PZT \n  (PZST07) thin films after annealing are seen to increase. These \n  changes of grain size affect the fatigue properties of PZT thin \n  films. Annealed Sb-doped PZT (PZST07) thin films show good fatigue \n  behavior (fatigue free up to 10<jats:sup>11</jats:sup> switching cycles) and a \n  larger <jats:italic>P</jats:italic>\n                  <jats:sup>*</jats:sup>\n                  <jats:sub>r</jats:sub>-<jats:italic>P</jats:italic>\n                  <jats:sup>\u2227</jats:sup>\n                  <jats:sub>r</jats:sub> value (31 \u00b5 \n  C/cm<jats:sup>2</jats:sup>) than SrBi<jats:sub>2</jats:sub>Ta<jats:sub>2</jats:sub>O<jats:sub>9</jats:sub> (SBT) thin films. \n  </jats:p>",
  "DOI": "10.1143/jjap.38.122",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        10,
        1
      ]
    ],
    "date-time": "2002-10-01T22:51:25Z",
    "timestamp": 1033512685000
  },
  "page": "122",
  "update-policy": "https://doi.org/10.1088/crossmark-policy",
  "source": "Crossref",
  "is-referenced-by-count": 7,
  "title": "Effect of Annealing on Fatigue Properties of Sb-Doped Lead Zirconate Titanate Thin Films Deposited by DC Reactive Sputtering",
  "prefix": "10.35848",
  "volume": "38",
  "author": [
    {
      "given": "Won-Youl",
      "family": "Choi",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Ho-Gi",
      "family": "Kim",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "266",
  "reference": [
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "1400",
      "DOI": "10.1126/science.246.4936.1400",
      "volume": "246",
      "year": "1989",
      "journal-title": "Science"
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "704",
      "DOI": "10.1109/58.108872",
      "volume": "38",
      "year": "1991",
      "journal-title": "IEEE Trans. Ultrason. Ferroelectr. & Freq. Control"
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "5233",
      "DOI": "10.1143/JJAP.34.5233",
      "volume": "34",
      "year": "1995",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": ""
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "5223",
      "DOI": "10.1143/JJAP.33.5223",
      "volume": "33",
      "year": "1994",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "955",
      "DOI": "10.1557/JMR.1994.0955",
      "volume": "9",
      "year": "1994",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "69",
      "DOI": "10.1080/10584589708019978",
      "volume": "14",
      "year": "1997",
      "journal-title": "Integrat. Ferroelectr."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "1513",
      "DOI": "10.1111/j.1151-2916.1995.tb08846.x",
      "volume": "78",
      "year": "1995",
      "journal-title": "J. Am. Ceram. Soc."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "955",
      "DOI": "10.1557/JMR.1994.0955",
      "volume": "9",
      "year": "1994",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "16",
      "DOI": "10.1016/S0921-5107(96)01616-9",
      "volume": "41",
      "year": "1996",
      "journal-title": "Mater. Sci. & Eng. B"
    },
    {
      "journal-title": "Mater. Lett. (1998).",
      "key": ""
    },
    {
      "journal-title": "Appl. Phys. Lett.",
      "key": ""
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "5155",
      "DOI": "10.1143/JJAP.33.5155",
      "volume": "33",
      "year": "1994",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": ""
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "953",
      "DOI": "10.1021/ic50122a054",
      "volume": "12",
      "year": "1973",
      "journal-title": "Inorg. Chem."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "321",
      "DOI": "10.1016/0022-4596(78)90080-4",
      "volume": "23",
      "year": "1978",
      "journal-title": "J. Solid State Chem."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "751",
      "DOI": "10.1107/S0567739476001551",
      "volume": "32",
      "year": "1976",
      "journal-title": "Acta Cryst. A"
    },
    {
      "key": "",
      "first-page": "704",
      "volume": "66",
      "year": "1987",
      "journal-title": "Am. Ceram. Soc. Bull."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "955",
      "DOI": "10.1557/JMR.1994.0955",
      "volume": "9",
      "year": "1994",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "145",
      "DOI": "10.1016/0079-6786(84)90001-3",
      "volume": "13",
      "year": "1984",
      "journal-title": "Prog. Solid State Chem."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "117",
      "DOI": "10.1080/00150199108007935",
      "volume": "116",
      "year": "1991",
      "journal-title": "Ferroelectrics"
    },
    {
      "journal-title": "Integrat. Ferroelectr. (1998).",
      "key": ""
    }
  ],
  "container-title": "Japanese Journal of Applied Physics",
  "original-title": [],
  "link": [
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.38.122",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.38.122/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.38.122/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.38.122/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2022,
        12,
        14
      ]
    ],
    "date-time": "2022-12-14T16:53:19Z",
    "timestamp": 1671036799000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.38.122"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1999,
        1,
        1
      ]
    ]
  },
  "references-count": 22,
  "journal-issue": {
    "issue": "1R",
    "published-print": {
      "date-parts": [
        [
          1999,
          1,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1143/JJAP.38.122",
  "relation": {},
  "ISSN": [
    "0021-4922",
    "1347-4065"
  ],
  "subject": [],
  "container-title-short": "Jpn. J. Appl. Phys.",
  "published": {
    "date-parts": [
      [
        1999,
        1,
        1
      ]
    ]
  },
  "assertion": [
    {
      "value": "Effect of Annealing on Fatigue Properties of Sb-Doped Lead Zirconate Titanate Thin Films Deposited by DC Reactive Sputtering",
      "name": "article_title",
      "label": "Article Title"
    },
    {
      "value": "Japanese Journal of Applied Physics",
      "name": "journal_title",
      "label": "Journal Title"
    },
    {
      "value": "paper",
      "name": "article_type",
      "label": "Article Type"
    },
    {
      "value": "Copyright (c) 1999 The Japan Society of Applied Physics",
      "name": "copyright_information",
      "label": "Copyright Information"
    },
    {
      "value": "1998-07-27",
      "name": "date_received",
      "label": "Date Received",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    },
    {
      "value": "1998-09-24",
      "name": "date_accepted",
      "label": "Date Accepted",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    },
    {
      "name": "date_epub",
      "label": "Online publication date",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    }
  ]
}