DOI: 10.1143/jjap.36.5219. Fabrication of Pb(Zr, Ti)O<sub>3</sub> Microscopic Capacitors by Electron Beam Lithography

Fabrication of Pb(Zr, Ti)O3 Microscopic Capacitors by Electron Beam Lithography

10.1143/jjap.36.5219

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

An epitaxial microscopic capacitor array of Pb(Zr, Ti)O3/SrRuO3 with 0.5-to 2-µ m squares was fabricated by electron-beam lithography and Ar-ion etching on a SrTiO3(001) substrate. Atomic force microscopic observation revealed that line-and-spacing larger than 1 µ m assures adequate separation between capacitors. A thin barrier is formed on the terrace edge of the capacitors due to re-deposition of Ar-ion etched oxide.

Bibliography

Hiratani, M., Okazaki, C., Hasegawa, H., Sugii, N., Tarutani, Y., & Takagi, K. (1997). Fabrication of Pb(Zr, Ti)O3 Microscopic Capacitors by Electron Beam Lithography. Japanese Journal of Applied Physics, 36(8R), 5219.

Authors 6

Masahiko Hiratani (first)
Choichiro Okazaki (additional)
Haruhiro Hasegawa (additional)
Nobuyuki Sugii (additional)
Yoshinobu Tarutani (additional)
Kazumasa Takagi (additional)

References 9 Referenced 15

10.1080/10584589708013026 / Integrat. Ferroelectr. (1997)
10.1111/j.1151-2916.1989.tb07706.x / J. Am. Ceram. Soc. (1989)
10.1111/j.1151-2916.1986.tb07420.x / J. Am. Ceram. Soc. (1986)
10.1143/JJAP.78.4258 / Jpn. J. Appl. Phys. (1996)
{'journal-title': 'Integrat. Ferroelectr.', 'key': ''} / Integrat. Ferroelectr.
10.1063/1.115154 / Appl. Phys. Lett. (1995)
10.1063/1.107690 / Appl. Phys. Lett. (1992)
10.1016/S0169-4332(96)00607-1 / Appl. Surf. Sci. (1997)
10.1063/1.102199 / Appl. Phys. Lett. (1989)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 1, 2002, 6:25 p.m.)
Deposited	2 years, 8 months ago (Dec. 14, 2022, 12:56 p.m.)
Indexed	2 months, 2 weeks ago (June 6, 2025, 5:46 a.m.)
Issued	28 years ago (Aug. 1, 1997)
Published	28 years ago (Aug. 1, 1997)
Published Print	28 years ago (Aug. 1, 1997)

Funders 0

None

BibTeX

@article{Hiratani_1997, title={Fabrication of Pb(Zr, Ti)O3 Microscopic Capacitors by Electron Beam Lithography}, volume={36}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.36.5219}, DOI={10.1143/jjap.36.5219}, number={8R}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Hiratani, Masahiko and Okazaki, Choichiro and Hasegawa, Haruhiro and Sugii, Nobuyuki and Tarutani, Yoshinobu and Takagi, Kazumasa}, year={1997}, month=aug, pages={5219} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        6,
        6
      ]
    ],
    "date-time": "2025-06-06T09:46:43Z",
    "timestamp": 1749203203398,
    "version": "3.37.3"
  },
  "reference-count": 9,
  "publisher": "IOP Publishing",
  "issue": "8R",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1997,
            8,
            1
          ]
        ],
        "date-time": "1997-08-01T00:00:00Z",
        "timestamp": 870393600000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "https://iopscience.iop.org/page/copyright"
    },
    {
      "start": {
        "date-parts": [
          [
            1997,
            8,
            1
          ]
        ],
        "date-time": "1997-08-01T00:00:00Z",
        "timestamp": 870393600000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://iopscience.iop.org/info/page/text-and-data-mining"
    }
  ],
  "content-domain": {
    "domain": [
      "iopscience.iop.org"
    ],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1997,
        8,
        1
      ]
    ]
  },
  "abstract": "<jats:p> \n   An epitaxial microscopic capacitor array of  Pb(Zr, Ti)O<jats:sub>3</jats:sub>/SrRuO<jats:sub>3</jats:sub> with    0.5-to 2-\u00b5 m squares was fabricated by electron-beam lithography and Ar-ion    etching on a  SrTiO<jats:sub>3</jats:sub>(001) substrate. Atomic force microscopic observation    revealed that line-and-spacing larger than 1 \u00b5 m assures adequate separation    between capacitors. A thin barrier is formed on the terrace edge of the    capacitors due to re-deposition of Ar-ion etched oxide. \n   </jats:p>",
  "DOI": "10.1143/jjap.36.5219",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        10,
        1
      ]
    ],
    "date-time": "2002-10-01T22:25:44Z",
    "timestamp": 1033511144000
  },
  "page": "5219",
  "update-policy": "https://doi.org/10.1088/crossmark-policy",
  "source": "Crossref",
  "is-referenced-by-count": 15,
  "title": "Fabrication of Pb(Zr, Ti)O<sub>3</sub> Microscopic Capacitors by Electron Beam Lithography",
  "prefix": "10.35848",
  "volume": "36",
  "author": [
    {
      "given": "Masahiko",
      "family": "Hiratani",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Choichiro",
      "family": "Okazaki",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Haruhiro",
      "family": "Hasegawa",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Nobuyuki",
      "family": "Sugii",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Yoshinobu",
      "family": "Tarutani",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Kazumasa",
      "family": "Takagi",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "266",
  "reference": [
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "21",
      "DOI": "10.1080/10584589708013026",
      "volume": "16",
      "year": "1997",
      "journal-title": "Integrat. Ferroelectr."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "1555",
      "DOI": "10.1111/j.1151-2916.1989.tb07706.x",
      "volume": "72",
      "year": "1989",
      "journal-title": "J. Am. Ceram. Soc."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "C256",
      "DOI": "10.1111/j.1151-2916.1986.tb07420.x",
      "volume": "69",
      "year": "1986",
      "journal-title": "J. Am. Ceram. Soc."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "4258",
      "DOI": "10.1143/JJAP.78.4258",
      "volume": "78",
      "year": "1996",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "journal-title": "Integrat. Ferroelectr.",
      "key": ""
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "3177",
      "DOI": "10.1063/1.115154",
      "volume": "67",
      "year": "1995",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "1128",
      "DOI": "10.1063/1.107690",
      "volume": "61",
      "year": "1992",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "365",
      "DOI": "10.1016/S0169-4332(96)00607-1",
      "volume": "108",
      "year": "1997",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "1718",
      "DOI": "10.1063/1.102199",
      "volume": "55",
      "year": "1989",
      "journal-title": "Appl. Phys. Lett."
    }
  ],
  "container-title": "Japanese Journal of Applied Physics",
  "original-title": [],
  "link": [
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.36.5219",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.36.5219/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.36.5219/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.36.5219/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2022,
        12,
        14
      ]
    ],
    "date-time": "2022-12-14T17:56:10Z",
    "timestamp": 1671040570000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.36.5219"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1997,
        8,
        1
      ]
    ]
  },
  "references-count": 9,
  "journal-issue": {
    "issue": "8R",
    "published-print": {
      "date-parts": [
        [
          1997,
          8,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1143/JJAP.36.5219",
  "relation": {},
  "ISSN": [
    "0021-4922",
    "1347-4065"
  ],
  "subject": [],
  "container-title-short": "Jpn. J. Appl. Phys.",
  "published": {
    "date-parts": [
      [
        1997,
        8,
        1
      ]
    ]
  },
  "assertion": [
    {
      "value": "Fabrication of Pb(Zr, Ti)O3 Microscopic Capacitors by Electron Beam Lithography",
      "name": "article_title",
      "label": "Article Title"
    },
    {
      "value": "Japanese Journal of Applied Physics",
      "name": "journal_title",
      "label": "Journal Title"
    },
    {
      "value": "paper",
      "name": "article_type",
      "label": "Article Type"
    },
    {
      "value": "Copyright (c) 1997 The Japan Society of Applied Physics",
      "name": "copyright_information",
      "label": "Copyright Information"
    },
    {
      "value": "1997-04-03",
      "name": "date_received",
      "label": "Date Received",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    },
    {
      "value": "1997-05-14",
      "name": "date_accepted",
      "label": "Date Accepted",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    },
    {
      "name": "date_epub",
      "label": "Online publication date",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    }
  ]
}