DOI: 10.1143/jjap.35.l602. Growth of Transparent Conductive Oxide ZnO Films by Atomic Layer Deposition

Growth of Transparent Conductive Oxide ZnO Films by Atomic Layer Deposition

10.1143/jjap.35.l602

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

ZnO films have been grown by atomic layer deposition (ALD) using diethylzinc (DEZn) and H2O as reactant gases. Self-limiting growth occurred at substrate temperatures ranging from 105 to 165° C. Self-limiting growth was also achieved when the flow rates of DEZn and H2O were varied. It was found that the orientation and surface morphology of the films were strongly dependent on the substrate temperature. A high electron mobility of 30 cm2/V·s was obtained for undoped ZnO films only 220 nm thick. The mobility of films was higher than that of films grown by MOCVD.

Authors 2

Baosheng Sang Baosheng Sang (first)
Makoto Konagai Makoto Konagai (additional)

References 8 Referenced 60

10.1016/0165-1633(88)90014-7 / Sol. Energy Mater. (1988)
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{'key': ''}
10.1016/S0920-2307(89)80006-4 / Mater. Sci. Reports (1989)
10.1016/0040-6090(85)90254-8 / Thin Solid Films (1985)
10.1016/0169-4332(94)90192-9 / Appl. Surf. Sci. (1994)
10.1016/0169-4332(94)90186-4 / Appl. Surf. Sci. (1994)
10.1143/JJAP.30.L1152 / Jpn. J. Appl. Phys. (1991)

Dates

Type	When
Created	22 years, 11 months ago (Oct. 1, 2002, 5:20 p.m.)
Deposited	2 years, 8 months ago (Dec. 14, 2022, 12:30 p.m.)
Indexed	3 months ago (June 2, 2025, 6:30 a.m.)
Issued	29 years, 4 months ago (May 1, 1996)
Published	29 years, 4 months ago (May 1, 1996)
Published Print	29 years, 4 months ago (May 1, 1996)

Funders 0

None

BibTeX

@article{Baosheng_Sang_1996, title={Growth of Transparent Conductive Oxide ZnO Films by Atomic Layer Deposition}, volume={35}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.35.l602}, DOI={10.1143/jjap.35.l602}, number={5B}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Baosheng Sang, Baosheng Sang and Makoto Konagai, Makoto Konagai}, year={1996}, month=may, pages={L602} }

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