Abstract
Ferroelectric properties, crystal structure and microstructures were examined for various Sr/Bi/Ta atomic ratio strontium bismuth tantalate (SBT) films prepared by metalorganic decomposition at 700 and 800° C. The 20% Sr-deficient and 10% Bi-excess (0.8/2.2/2) composition showed maximum remanent polarization (P r) values for both 700 and 800° C crystallization temperatures. From TEM analysis, the P r dependence on composition variation around the stoichiometric 1/2/2 composition was related to grain size and volume of voids. The effect of postannealing after Pt top electrode fabrication was also studied. On the films prepared at 800° C, postannealing markedly reduced the capacitor shorting rate. This was attributed to recrystallization of the Pt top layer, based on SEM analysis of the Pt layer and the Pt/SBT interface.
References
8
Referenced
183
10.1038/374627a0
/ Nature (1995)10.1063/1.113140
/ Appl. Phys. Lett. (1995)10.1557/PROC-361-21
/ Mater. Res. Soc. Symp. Proc. (1995)10.1143/JJAP.34.5069
/ Jpn. J. Appl. Phys. (1995)10.1143/JJAP.34.5240
/ Jpn. J. Appl. Phys. (1995){'journal-title': 'Integr. Ferroelectr.', 'key': ''}
/ Integr. Ferroelectr.{'key': ''}
10.1080/10584589508012303
/ Integr. Ferroelectr. (1995)
Dates
Type | When |
---|---|
Created | 22 years, 10 months ago (Oct. 1, 2002, 5:03 p.m.) |
Deposited | 2 years, 8 months ago (Dec. 7, 2022, 1:20 p.m.) |
Indexed | 1 month, 3 weeks ago (July 7, 2025, 9:25 a.m.) |
Issued | 28 years, 11 months ago (Sept. 1, 1996) |
Published | 28 years, 11 months ago (Sept. 1, 1996) |
Published Print | 28 years, 11 months ago (Sept. 1, 1996) |
@article{Noguchi_1996, title={Analysis of the Dependence of Ferroelectric Properties of Strontium Bismuth Tantalate (SBT) Thin Films on the Composition and Process Temperature}, volume={35}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.35.4900}, DOI={10.1143/jjap.35.4900}, number={9S}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Noguchi, Takehiro and Takashi Hase, Takashi Hase and Yoichi Miyasaka, Yoichi Miyasaka}, year={1996}, month=sep, pages={4900} }