DOI: 10.1143/jjap.35.2416. Time-Resolved Observation of Laser-Induced Surface Reaction for Si/Cl<sub>2</sub> System Using Second-Harmonic Generation

Time-Resolved Observation of Laser-Induced Surface Reaction for Si/Cl2 System Using Second-Harmonic Generation

10.1143/jjap.35.2416

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

Laser-induced surface reaction for the Si(111)/Cl2 system has been observed using second-harmonic generation (SHG). Chlorine gas molecules are introduced to the clean Si surface and their adsorption, desorption and reaction are indirectly measured by surface SHG. In the case of Nd:YAG laser measurement, SHG output decays rapidly with exposure to Cl2 and is recovered by pump beam irradiation with a power of 65 mJ/pulse. Cl coverage can be estimated from SHG intensity and we determine the mean residence times of adsorbed Cl to be 300 ns and 11.4 s with and without pump beam exposure, respectively, at a sample temperature of 180° C. In the case of Ti-sapphire laser measurement, SHG outputs increase and decay rapidly with exposure to Cl2 as measured by 800 nm and 1300 nm probe beams, respectively.

Bibliography

Haraichi, S., Sasaki, F., Kobayashi, S., Masanori Komuro, M. K., & Toshiro Tani, T. T. (1996). Time-Resolved Observation of Laser-Induced Surface Reaction for Si/Cl2 System Using Second-Harmonic Generation. Japanese Journal of Applied Physics, 35(4S), 2416.

Authors 5

Satoshi Haraichi (first)
Fumio Sasaki (additional)
Shunsuke Kobayashi (additional)
Masanori Komuro Masanori Komuro (additional)
Toshiro Tani Toshiro Tani (additional)

References 8 Referenced 5

{'key': '', 'first-page': '161', 'volume': '14', 'year': '1992', 'journal-title': 'Surf. Sci. Rep.'} / Surf. Sci. Rep. (1992)
10.1103/PhysRevLett.61.2883 / Phys. Rev. Lett. (1988)
10.1116/1.582967 / J. Vac. Sci. & Technol. B (1985)
10.1103/PhysRevLett.68.503 / Phys. Rev. Lett. (1992)
10.1116/1.579819 / J. Vac. Sci. & Technol. A (1995)
10.1038/337519a0 / Nature (1989)
10.1103/PhysRevB.41.865 / Phys. Rev. B (1990)
10.1016/0039-6028(91)90835-G / Surf. Sci. (1991)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 1, 2002, 5:20 p.m.)
Deposited	2 years, 8 months ago (Dec. 7, 2022, 1:15 p.m.)
Indexed	6 months, 1 week ago (Feb. 21, 2025, 5:33 a.m.)
Issued	29 years, 4 months ago (April 1, 1996)
Published	29 years, 4 months ago (April 1, 1996)
Published Print	29 years, 4 months ago (April 1, 1996)

Funders 0

None

BibTeX

@article{Haraichi_1996, title={Time-Resolved Observation of Laser-Induced Surface Reaction for Si/Cl2 System Using Second-Harmonic Generation}, volume={35}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.35.2416}, DOI={10.1143/jjap.35.2416}, number={4S}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Haraichi, Satoshi and Sasaki, Fumio and Kobayashi, Shunsuke and Masanori Komuro, Masanori Komuro and Toshiro Tani, Toshiro Tani}, year={1996}, month=apr, pages={2416} }

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